VZS

Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

AMR3000 to 6000

Meanwhile, the clean compressed air in housing w passes through flow hole A of body q , it is reduced to a specified pressure by the pressure reducing valve, and is discharged from the OUT. !1 SRH MPa e SRP SMC t q SRF OUT IN ITV MC cartridge element u IC i Seperation element Flow hole A ITVH y w Auto-drain type ITVX !

CUJ

3 w e q !1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !

Compact Cylinder with Lock Series CLQ

NZ L NX Part no. 20 Y-G02 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 16 21 IY-G02 8 25 Y-G03 20 25.6 IY-G03 10 32, 40 Y-G04 36 41.6 IY-G04 18 50, 63 Y-G05 44 50.6 IY-G05 22 80 Y-G08 56 64 IY-G08 28 100 Y-G10 64 72 IY-G10 32 Knuckle pins and retaining rings are included.

VP300/500/700

) (D, Y) VS N.C.

Precautions 1

020B, Y-032B Material: Rolled steel Y-040B Material: Cast iron R1 R1 Y (Max.)

MQQ

Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5

CE

7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Zinc alloy Body A w Brass Handle Electroless nickel plated e Brass Body B Electroless nickel plated r Brass Needle Electroless nickel plated t Brass Needle guide Electroless nickel plated y Brass Seat ring (1) Electroless nickel plated(3) u Brass(2) Lock nut i U seal NBR o O-ring NBR !0 O-ring NBR !1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

CYP

-06-X214 Caution 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CLQ

Component Parts No. q w e r t No. !7 !8 !

Cylinder with Lock

Bore size E1 L1 MM R1 U1 NDH10 NX NZ Y-03M*1 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-04M*1 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-05M*1 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 + 0.10 40 0.10 0.30 Y-08M*1 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 + 0.10 60 0.10 0.30 Y-10M*1 100 40 65 M26 x 1.5 20 34 22 +0.084 0

RQ

Rod end nut L1 7-7-13 13 Series RQ Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint For I-G02, I-G03 For I-G04, I-G05 For Y-G02, Y-G03 For Y-G04, Y-G05 ND hole H10 Shaft d9 MM ND hole H10 Shaft d9 MM L NDH10 MM NDH10 MM L RR1 RR1 RR1 RR1 E1 E1 E1 E1 A1 L1 A NX NZ U1 A1 L1 A NX NX U1 A1 L1 A U1 A1 L1 A NX NZ U1 Material: Carbon steel Material: Cast iron Material: Carbon

AS-FPQ/AS-FPG

3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.