Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1 3 and !5 and 1 piece of no. !4 MXPJ6 No. Description Material Note Component Parts Heat treated Stainless steel Body q Heat treated Table Stainless steel w u q w i o y !3 !2 !
For details, refer to the MXQR Operation Manual. 5.5 3 5.75 3 depth 2.5 +0.03 0 3 depth 2.5 +0.03 0 N x M3 x 0.5 thread depth 4 4 5.5 3 0.5 13.5 1 12 15 31 14 27 12 20 10 4 1.5 F 4 x M2.5 x 0.45 thread depth 3.5 9 -1 x F 2 N 11 3 x M3 x 0.5 thread depth 5 M 5 K 12.5 4 x M2.5 x 0.45 thread depth 2.5 3 6.5 Bottom view of MXQR6-30 18.2 0.3 20 16 13 3.5 20 Z ZZ (NN-1) x H G H 3H9 depth 2.5 +0.025
f e H ZZ ZZ 125 140 160 180 200 250 300 1/2 341 133 75 40 318 110 0.2 stroke 157.5 M30 x 1.5 35 98 100 45 20 364 Lube Non-lube Air-hydro 1/2 133 341 40 318 75 110 0.2 stroke 180.5 M30 x 1.5 35 98 112 45 30 364 3/4 367 40 141 75 346 120 0.2 stroke 197 M36 x 1.5 39 106 118 50 25 388 3/4 399 153 45 85 135 381 0.2 stroke 227 M40 x 1.5 39 132 111 60 30 417 3/4 1 399 153 90 45 381 135 0.2 stroke
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 Bore size [mm] f Bore size [mm] f 12 4.5 16 4.5 20 8.5 25 8 Section XX 4 x YY depth YL Bottom view 4 x MM depth ML 4 x NN through Z WA L 4 x OA through 4 x OB counterbore depth OL Section XX Section XX HA: T-slot for hexagon bolt (OL) X0.02 X0.02 DA DB H VA VB T R U X PW MGJ JMGP Section EE 1 G K J PB Q S GA GB T-slot 2 x P (Plug) PA + Stroke 2 x P XA
This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.
3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.
0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.
Example) ZR100-K15MZ-EC (-Q) . 1 pc. 3 L 38 ZS VJ10-20-4A-6 . 3 pcs.
Laser output power 3 [kW], conversion efficiency 30% The oscillators power consumption is, 3 [kW] 0.3 = 10 [kW] The cooling capacity required for the oscillator is, 10 [kW] 3 [kW] = 7 [kW] Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] W Efficiency Q = P = In this example, using an efficiency of 0.7: 5.1 0.7 = = 7.3 [kW] Q: Heat generation amount Cooling capacity = Considering
(X20 X2F) X20 1 2 ( 1 ) (2 ) 9 7.1.2 RX( E0H15FH)1M0M31 RX00 RX1F M0M31 E 0 H RX0F RX00 1 1 FROM E 1 H RX 1 F RX 1 0 M15 M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0
CY1 MY1 3.4-3 End Lock Cylinder Series CBM2 20, 25, 32, 40 How to Order L 40 150 H N CBM2 Standard L 40 150 C73 H N CDBM2 With auto switch Air cylinder with auto switch Number of auto switch Mounting 2 1 n S n Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion B L F G C D U T Bore size 20 25 32 40 20mm 25mm 32mm 40mm Auto switch Without auto
MGQ MGG MGC MGF MGZ CY MY 3.8-3 End Lock Cylinder Series CBM2 20, 25, 32, 40 How to Order L 40 150 H N CBM2 Standard L 40 150 C73 H N CDBM2 With auto switch Air cylinder with auto switch Number of auto switch Mounting 2 1 n S n Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion B L F G C D U T Bore size 20 25 32 40 20mm 25mm 32mm 40mm Auto
block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.
block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.
3 !0 q u !4 e !1 e r t !0 !1 o q y !2 w u !3 i Meter-in type Meter-in type AS3211F-02 AS3311F-02 AS ASP ASN AQ ASV AK ASS ASR Component Parts Component Parts No. Description Material Note No.
When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.
adsorption (sec) QL: Leakage volume during workpiece adsorption L/min (ANR) Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (ANR)
adsorption (sec) QL: Leakage volume during workpiece adsorption L/min (ANR) Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (ANR)