3 Port Solenoid Valve Series VQ100 1

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

Auto Switch Guide

MLU ML1C Auto switch mounting screw M5 x 0.8 x 16 l 1.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

reference planes B D 16.5 14.5 Section AA MXP16-30 Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) MXP16-20 MXP16-30 SMXP16, #1(#1 + #3) SMXP16, #2(#2 + #4) L K J V H S Z G M W Model 36 40 93 82 58 20 102 18 40 65 MXP16-20 42 50 119 108 70 30 128 28 56 75 MXP16-30 13 Precision Air Slide

Series SY100 3 Port Solenoid Valve Rubber Seal

Applicable blank plate assembly SY100-77-1A P R 20 stations VP 20 R port M5 X 0.8 P port M5 X 0.8 VG VP Note 1) SY113 (A) and SY123 (A) cannot be mounted on the same manifold. S41 Type How to Order Applicable solenoid valve (1) SS3Y1 S41 05 M3 VQ SY114-l SY114A-l SY124-l SY124A-l Stations A port size M3 M5 M3 X 0.5 M5 X 0.8 VQZ 2 stations 02 ... ...

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 23 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Lead Wire Kit) L 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 2-G1 (electrical entry) 6-3/4 Ports P(SUP), R(EXH) Cable length L 0: 600mm L 1: 1500mm L 2: 3000mm U D U D U D 179 106 46.8 59.2 83.5 55.5 M5 ground screw

Compact Guide Cylinder

20 16 16 12 12 1 1 0.1 0.1 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] 50 mm stroke or less, V = 400 mm/s Over 50 mm stroke, V = 400 mm/s 100 100 50 50 10 10 40 40 Load mass m [kg] Load mass m [kg] 32 32 25 25 20 1 1 20 16 16 12 12 0.1 10 100 0.1 10 100 Eccentric distance L [mm] Eccentric distance L [mm] 11 Model Selection MGPK Series L L Plate Material Carbon Steel

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Bottom Mounting Style / CJ2RA, CJ2RA 10112122X GC Y Relief port M5 x 0.8 GA GB Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 MM C D B 0 0.3 L LX B 0 0.3 LB LH Head cover port location Axial direction (R) NA H A Z + Stroke S + Stroke NB 2 x LD The overall cylinder length does not change.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Series KG Stainless Steel One-touch Fittings

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 M5 0.8 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators S ZZ 12 12 SS 30 M8 x 1.25 x 6 L (Hexagon socket set screw) 6 30 1 Z 2 x 6.9 through 2 x 11 counterbore depth 6.3 28 1 600.2 600.2 3 5 80 78 64 6.3 5 14 2 x M6 x 1 (Through-hole) M6 x 1 x 18.5 L and M6 x 1 2 x M5 x 0.8 Thread depth 7.5 (Hexagon bolt) (Hexagon nut) M6 x 1 x 14 L (Hexagon socket head cap screw) 2 x M5 x 0.8 thread depth 4.5 Note

MK

For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6. 1. Allowable bending moment Use the arm length and operating pressure within graph (1) for allowable bending moment loaded piston rod. l Caution Graph (1) Mounting of Clamp Arm 20 MK250/63 RE A B 1. Use a clamp arm that is available as an option.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 3) When specifying more than one option, enter symbols in alphabetical order. 23 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Lead Wire Kit) L 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 1 P SMC 2-G1 (electrical entry) 6-3/4 Ports P(SUP), R(EXH) Cable length L 0: 600mm L 1: 1500mm L 2: 3000mm U D U D U D 179 106 46.8 59.2 83.5 55.5 M5 ground screw

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size Model Port size 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" ASD230FG-M5 M5 x 0.8 ASD330FG-01 R 1/8 ASD430FG-02 R 1/4 ASD530FG-02 R 1/4 ASD530FG-03 R 3/8 ASD630FG-04 R 1/2 ASD230FG-U10/32 10-32 UNF ASD330FG-N01 NPT 1/8 ASD430FG-N02 NPT 1/4 ASD530FG-N02 NPT 1/4 ASD530FG-N03 NPT 3/8 ASD630FG-N04 NPT 1/2 Specifications Air Fluid 1.5 MPa Proof pressure 1 MPa Max.

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

MQQ

Rod end nut 15 2-M5 x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

L plug connector: VQD1151l-lL-M5 M plug connector: VQD1151l-lM-M5 5 5 5.5 SY 4(A) 2(B) SYJ SX VK VZ Lead wire length: 300mm Direct manual override Light 27 VF VFR SMC 17.6 11.2 3(R) VP7 9 3 2-3.5 Mounting hole 10.9 9.1 VP4 5.5 VQ VQ4 33.5 38 37 12 28.5 VQZ 1(P) 1(P) VQD 4-M5 X 0.8 5.5 (P, A, B, R port) 13 VZS L plug connector (L) 49 50.5 VFS M plug connector (M) VS VS7 1.13-7 Series VQD1000

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

MQQ

P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page

MQQ

CE1 CE2 Mounting Style and Accessory ML2B L: Foot style Note F: Rod side flange style G: Head side flange style C: Single clevis style D: Double clevis style Mounting B: Basic style C J G5-S (2 pcs.) (1 pc.) (1 pc.) (1) (1 pc.

Fieldbus System

size M5 x 0.8 1/8 Applicable series SY3000 SY5000 Symbol M5 01 Only metal seal type is available for the high pressure type.