PSE530/200

SET SET To measuring mode 16-3-13 13 Series PSE530/200 Operation 2: Pressure Setting Auto preset Channel selection MPa Measuring mode kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE CH1 CH2 CH3 CH4 SET Adsorption Verification SET High Suction Auto preset mode Vacuum Work 1 Work 2 Work n OUT1 auto preset preparation Prepare the equipment to be set in this mode. Max.

IDX-OM-W029

2 . 10-1 10-3 . 10-2 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 11-6 . 11-3 12 V 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 2 i IDX-OM-W029 i i-1 () OFF 3 ON OFF IDU Series i-1 i 1 i IDX-OM-W029 i 1 1 3 IDU Series i-1 i 2 IDX-OM-W029 i i-2 5 i 2 1 IDU Series i-2 i 3 IDX-OM-W029 i i 2 2 i 2

AS-FG/ASD-FG

Type Applicable tube outside diameter Metric size Inch size 2 3 Elbow Universal 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 Control method 0 1 Meter-out Meter-in With One-touch fittings Use a 1/8" tube.

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Transfer

Special resin Stainless steel Special resin Stainless steel Special resin NBR NBR NBR NBR Special resin Stainless steel Carbon tool steel Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 1 1 2 2 2 2 2 2 4 2 6 4 8 2 2 6 2 1 2 4 4 4 3 4 4 1 1 2 2 4 1 4 2 1 1 1 1 1 2 2 1 1 Description Cylinder tube Head cover WR Head cover WL Piston yoke Piston End cover Wear ring Cushion ring Cushion needle Stopper Belt separator

Lightweight and Compact

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

32 37 37 39 55 166 187 187 218 218 241 241 277 334 AM150 1 8 1 4 3 8 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AM250 AMl 1 2 3 8 1 2 , AM350 3 4 Related poroducts 1 2 3 4 , AM450 1 2 , 1 1 1, 1 AM550 AM650 3 4 AM450SAM, #4 AM550SAM, #5 AM650SAM, #6 AM150SAM, #1 AM250SAM, #2 AM350SAM, #3 4.6-4 Series AM Dimensions: AM850 Accessory D: With auto drain (N.O.) for AMD850 Options T: With element service

Air Slide Table Series MXQ

Ma = K Mmax Work piece mounting coefficient K: Fig. 3 Allowable moment coefficient : Graph 2 Max. allowable moment Mmax: Table 4 Mar = 36 Mrmax = 36 K = 1 = 1 ' = 0.39/36 = 0.011 May = 1 x 1 x 18=18 Mymax = 18 K = 1 = 1 = 0.39/18 = 0.022 Find the load factor of the static moment.

AN

105.6 3 4 514 97.5 60 41 2508-010 129.6 1 57 54 22 19 2510-002 17.2 1 4 55 56 22 19 2511-003 17.2 3 8 Note) NPT thread is also available.

CXT

9 23 55 53 28 M8 X 1.25 10 86 6.9 9.5 16 MM (N) M (NA) NN PA* PB PW Q QW RB RW S T U W X Y Z Bore size (mm) 12 M4 X 0.7 M8 X 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 X 0.8 M8 X 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 X 1 M10 X 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 X 1 M14 X 1.5 10 12 50 60 100 130 105 50 RB1411

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Pitch, Yaw moment: Graph (2) Roll moment: Graph (3) 13 Find the load factor 1 of the static moment. Mar Nm 1 = M/Ma 1 = 0.1/13 = 0.008 300 Va mm/s 3-2 Load Factor of Dynamic Moment Find the dynamic moment Me (Nm). Examine Mep.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

NARM Series

8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

3

(Clamp part) Note 1) 1.4 1.2 0.9 0.7 Note 1) Refer to Rotary Angle figure.

MGQ

1 !2 !3 !4 !5 !6 !7 !8 !

Rotary Table/

1 @1 !2 q @0 u !

53

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

25

0.5 0.5 IZD IZE 11 13 8.8 8.8 6.5 7.8 10.2 10.2 IZH 13 14 60 7 7.7 Detection hole 1 6 10.5 2 x R3.3 10 61 (7.5) Auto balance sensor [High accuracy type]/IZS31-DG 2 x 3.4 2 x 3.4 Amplifier Head 3500 1500 0.2 0.2 20 4.8 6.6 4.8 69 95 23 78 98 14.5 5 8.8 7.8 10.2 10.2 13 Sensor 60 7.7 71 12 1 6 14 2 x Counterbore 6.6, Depth 5.7 (Height of thread bearing surface 8.8) 433 IZS40/41/42 Series Dimensions

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.