Basic type / Direct mount type Series CY3B/CY3R

B Counter bore depth C T Y HP 0 -0.1 Note 1) L 2 x P (Piping port) 4 x J x E TC 4 x 3.2 X F WP WP D GW QW 4 x LD PW WS GP 4 x 6.5 CY3R6 2 x 4 x MM Thread depth M Switch rail W K HS Plug G G Q + Stroke HR CR Z + Stroke CY3R25 to 63 Note 1) 50, 63: L 0 0.2 CY3R10 to 20 (mm) D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 CB 2 2 2 3 3 3 5 5 5 H 19 26 32 39 44 55 67 85

Mechanically Jointed Rodless Cylinders

can be loaded directly on the work table due to the integrated guide. 0 0 16 25 40 63 16 25 Bore size (mm) Bore size (mm) 40 63 Height (H) reduced by 36% at the maximum Overall length (Z) reduced by 140 mm at the maximum MY3A (with rubber bumper) Height (H) Height (H) MY1B MY3A/3B MY3M MY1M MY3B/MY3M (with air cushion) Height (H) (mm) 16 25 40 63 Series 20 32 50 MY3A MY3B MY1B 37 45 54 67

Pilot Operated

.): VXD2130 Conduit: C Grommet: G (67) (52) 19.5 Approx. 300 19.5 (52) (67) I Approx. 280 I G1/2 (5.5) (1.6) (1.6) (5.5) H D E (A) (32) H (7.5) (7.5) Bracket G G (A) OUT IN OUT IN E (28) 50 C B 2 x Rc 1/4, 3/8, 1/2 Bracket (28) 50 B C 2 x Rc 1/4, 3/8, 1/2 40 F 40 F DIN terminal: D Conduit terminal: T J I Cable 6 to 12 J 19.5 H 32 19.5 (7.5) (1.6) (5.5) (A) 25 (7.5) (1.6) (5.5) 44 31.5 G 1

Guide Cylinder Series MGG

or more M6 x 1 depth 9 1/8 12 12 26 12 82 48 40 39 71 157 14 79 250 to 400 125 st or more M6 x 1 depth 13 1/8 12 12 31 13 100 57 46 46 71 175 14 79 350 to 500 150 st or more M6 x 1 depth 13 1/8 12 12 38 16 114 65 52 46 73 201 14 81 350 to 600 200 st or more M8 x 1.25 depth 16 1/8 13 12 47 20 138 84 62 56 80 238 15 89 350 to 800 250 st or more M10 x 1.5 depth 21 1/4 14 14 58 25 164 94 75 67

Air Slide Table Series MXS

Axial piping type (20) MXS20-P Max. 11.5 Operating port 2 x Rc 1/8 (NPT1/8, G1/8) 30 (mm) J 68.5 68.5 68.5 78.5 93.5 132.5 185.5 239.5 291.5 Model MXS20-10R MXS20-20R MXS20-30R MXS20-40R MXS20-50R MXS20-75R MXS20-100R MXS20-125R MXS20-150R 65.7 32 15 D29.5 -X Other dimensions are the same as the basic style. 20 Individual -X Other dimensions are the same as the basic style. 67 Series MXS

LEC-OM069xx

From completion of latching to transmission of a response: One com29 munications cycle max. 8-67 8 MECHATROLINK-II Commands (2) Related Parameters The parameters related to the execution of LATCH command are listed below. Parameter No.

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

Hydraulic Cylinders

H J K M P Q R Bore size (mm) 20 M8 x 1.25 9.5 depth 5.4 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 25 M10 x 1.5 9.5 depth 5.4 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67

Single Axis Electric Actuator Serriies LJ1S Slider Guide

20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 140 184 176 Z section detail 52 52.5 169 18 22 175 162 Stroke + 178 (table movement range) Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 362 135 A section detail (Switch groove) 92 Stroke + 32 3-8H10 depth 5 11.5 20 90 (T-slot pitch) 67 45 62 92 8-6.6

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

MXS Series Air Slide Table

Q Q Product Features .pages 42-43 Q Q MXS Series Q How to Order .page 44 Specifications.pages 45-46 Q How to Select .pages 47-48 Q Table Deflection .pages 49-50 Q Stroke Adjuster .pages 51-52 Construction/ Parts List, Seal Kits .page 53 Q Dimensional Drawings.pages 54-65 Q How to Order MXS L (Symmetric type) .page 66 Dimensional Drawings MXS L (Symmetric type) .pages 67

Digital Flow Switches Series PF2A

PF2A710, 750 60 82 98 67 58 6 1.6 17 Brown 1 Load Load OUT1 Main circuit Main circuit 4 Load Load Black FLOW SWITCH OUT2 12 to 24 VDC UP 2 + White 54 44 SET 3 OUT1 OUT2 Blue DOWN FOR AIR PF2A7--27(-M) 24 2-Port size 40 50 4-4.5 Brown 1 OUT1 4 Black Load Load (42.2) White OUT2 2 + 12 to 24 VDC Load Load 3 Blue PF2A7--67(-M) 42 4 43 2-3.4 Flow direction PF2A711, 721, 751 64 23 116 1.6 88

Compact Cylinder with Air Cushion and Lock Series RLQ

0.8 Dust cover (Manual unlocking unit) PL unlocking port Unlocks when pressurized Rod end male threads M18 x 1.5 11 26 Rod end nut 28.5 33.5 9 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions/50 (Emergency Stop) Foot type/RLQL50 18 38 49.5 + Stroke Special cap bolt 78 39 5 14.7 8 3.2 8 14.7 4-9 79 95 113.7 + Stroke 64.5 + Stroke Rod end nut 43.5 Front flange type/RLQF50 67

Large Type Vacuum Unit Series ZR

vacuum switch specifications (D1, D2, D3) 1.3mm 13 Symbol Lead wire length 1.5mm 15 Applicable switch Output specifications 25 (L) Lead wire length 0.6 (3.0) m 1.8mm NPN output 18 D1 D2 26 (L) Lead wire length 0.6 (3.0) m Analog output 2.0mm 20 65 (L) Lead wire length 0.6 (3.0) m PNP output 27 (L) Lead wire length 0.6 (3.0) m NPN output D3 26 (L) Lead wire length 0.6 (3.0) m Analog output 67

mlu

85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Operation y [Specify Step No.1 to input the DRIVE signal.] 100 602 Step Motor Controller (CC-Link Direct Input Type) LECPMJ Series Dimensions 4.5 For body mounting (Screw mounting type) 32.5 35 67 (11.5) 1.2 84.2 64.2 35 187.3 (When locking DIN rail) 193.2 (When removing DIN rail) 152.5 170 161 Mountable on DIN rail (35 mm) (77) 17.5 4.5 For body mounting (Screw mounting type) L DIN rail

LG1H

Not required. m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 58 for deflection data. 48 Standard Motor/Horizontal Mount Specification Series LG1H21 With Coupling Dimensions/LG1H21PA 110 4 x M6 x 1 thread depth 10 67 20 0.02 4 x M8 x 1.25 thread depth 10 8H10 depth 10 8H10 depth 8 160 (123.5) Stroke + 180 (table movement range) 82.5 10 107 95 Work piece mounting reference plane 55 Body

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

LVD20 LVD30 LVD40 LVD50 LVC20 LVC30 LVC40 LVC50 A 54.5 79.5 82 105.5 54.5 79 96 129 B 114 67 83 93 79 106 131 154 Integral tubing (construction) 493 Guide ring Eliminates lateral motion of the poppet which reduces internal leakage. Piston damper Absorbs piston momentum to minimize impact-induced particle generation.

JA/JAH/JB/JS

67 67 82.5 82.5 98.5 123 123 155 213 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 8 9 9 13 13 13 15 15 18 24 24 24 42 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5

Floating Joint

67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 13 17 17 22 22 22 27 27 32 41 41 41 55 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03