MGC 1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 Material Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Note Clear hard anodized Clear hard anodized Chromated No.
2 46 M6 x 1 9 0 V 75 220 55 114 89 75 56 M6 x 1 9 50 msec Analog output 1 to 5 VDC PF2A7H--68 69(-M) 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured
. 8-10 8.4.1 Replacing Particle Filters . 8-10 8.4.2 Replacing the DI filter . 8-10 8.4.3 Consumables . 8-13 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRL100/200/300-A-40 . 9-1 9.1.2 HRL100/200-W-40 . 9-3 9.1.3 Refrigerant with GWP reference. 9-5 9.1.4 Communication specifications . 9-5 9.2 Dimensions . 9-6 9.2.1 HRL100-A-40 . 9-6 9.2.2 HRL200-A-40 . 9-7 9.2.3 HRL300-A-40
3r#0q u @9#2 e y!6#1@8t!2w#3!5 !7 !8 @1 @6 14A !9 @0 CJ1 CJP @7 i o CJ2 80, 100 CM2 C85 !0 !1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !
9 !8 !2 !1 t e y !7 !6 !5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.
Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.
winter season . 8-6 8.3 CONSUMABLES . 8-6 8.4 OPERATION STOP FOR AN EXTENDED PERIOD OF TIME . 8-7 8.4.1 Discharge of the circulating fluid . 8-7 8.4.2 Drain of the facility water . 8-8 Chapter 9 Documents . 9-1 9.1 SPECIFICATIONS. 9-1 9.1.1 HRLE050-A-20. 9-1 9.1.2 HRLE090-A-20. 9-2 9.1.3 HRLE050-W-20. 9-3 9.1.4 HRLE090-W-20. 9-4 9.1.5 HRLE090-A-40. 9-5 9.1.6 HRLE090-W-40. 9-6 9.2 REFRIGERANT
fluid and facility water . 8-7 Chapter 9 Documents . 9-1 9.1 Specifications List . 9-1 9.1.1 Product specification . 9-1 9.1.2 Refrigerant with GWP reference . 9-4 9.1.3 Communication specifications . 9-5 9.2 Outline dimensions . 9-6 9.3 Flow Chart . 9-7 9.3.1 HRS012-A-0 HRS018-A-0 HRS024-A-20 . 9-7 9.3.2 HRS012-W-0 HRS018-W-0 HRS024-W-20 . 9-7 9.4 Cooling capacity . 9-8 9.4.1 HRS012--10
J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5
J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5
Common connector assy for manifoldRefer to page 1-6-9.
Series ZP2 CAT.ES100-76A Vacuum Pad Series ZP2/ZP Vacuum Pad Series ZP2/ZP Pad Diameter List : Series ZP2 : Series ZP Page of ZP2 Pad type Symbol 14 0.8 1.1 2 3 3.5 4 5 6 7 8 9 10 11 13 Note) U P. 1 MU P. 2 Flat EU P. 5 AU P. 8 C Flat with rib P. 1 P. 1 P. 10 UT Thin flat (pad) CT Thin flat with rib Note) Note) B P. 1 J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT
Series ZP2 CAT.ES100-76A Vacuum Pad Series ZP2/ZP Vacuum Pad Series ZP2/ZP Pad Diameter List : Series ZP2 : Series ZP Page of ZP2 Pad type Symbol 14 0.8 1.1 2 3 3.5 4 5 6 7 8 9 10 11 13 Note) U P. 1 MU P. 2 Flat EU P. 5 AU P. 8 C Flat with rib P. 1 P. 1 P. 10 UT Thin flat (pad) CT Thin flat with rib Note) Note) B P. 1 J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT
Series ZP2 CAT.ES100-76A Vacuum Pad Series ZP2/ZP Vacuum Pad Series ZP2/ZP Pad Diameter List : Series ZP2 : Series ZP Page of ZP2 Pad type Symbol 14 0.8 1.1 2 3 3.5 4 5 6 7 8 9 10 11 13 Note) U P. 1 MU P. 2 Flat EU P. 5 AU P. 8 C Flat with rib P. 1 P. 1 P. 10 UT Thin flat (pad) CT Thin flat with rib Note) Note) B P. 1 J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT
Series ZP2 CAT.ES100-76A Vacuum Pad Series ZP2/ZP Vacuum Pad Series ZP2/ZP Pad Diameter List : Series ZP2 : Series ZP Page of ZP2 Pad type Symbol 14 0.8 1.1 2 3 3.5 4 5 6 7 8 9 10 11 13 Note) U P. 1 MU P. 2 Flat EU P. 5 AU P. 8 C Flat with rib P. 1 P. 1 P. 10 UT Thin flat (pad) CT Thin flat with rib Note) Note) B P. 1 J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT
Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y
1 !1 !2 !2 !3 w t y q i o e u t y q i o e u w !0 !0 !9 Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread r !8 !4 !6 !7 !5 !1 !2 w t y q i o e !0 u @0 Meter-in type Meter-out type Component Parts No.
9 stations S Note 6) Note 1) Without SI unit, the symbol is nil.
9 !5 u o !4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !
Regulator Block Stations 1. Manifold Mounting ARP Direct mount B A Stations Symbol 1 2 3 4 5 6 7 8 9 M Symbol IR-A 1 station DIN rail mount How to mount 1 station 2 stations 3 stations 2 stations IR 3 stations 4 stations IRV 5 stations Appearance 6 stations VEX 7 stations 8 stations SRH 9 stations 10 stations SRP 4. Accessory 3.