KR

4 14 1 4 KGE04-02 17 Connection thread 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 30 Applicable tubing 6 M14 x 1 15 17 13.1 10.4 17 19 29 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 x 1 18.5 8 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 41.5 29.5 53 67 34.5 36.5 12.5 14 21 21 M20 x 1 10 22 24 3 8 KGE10-03 3 8 KGE12-03 92 59 37 14 12 M22 x 1 27 23 24 58.3 46.1 22 1 2 KGE12-04 41 18 3

ZP

(Rc, NPT, NPTF) 50 21 M22 x 1.5 Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) Width across flat 30 (Hexagon) 1/8 (Rc, NPT, NPTF) 8 8 Width across flat 27 (Hexagon) 35 16 Width across flat 27 (Hexagon) 35 16 9 9 9 9 M18 x 1.5 Width across flat 21 (Hexagon) 4 x M5 x 10 (J) M18 x 1.5 Width across flat 21 (Hexagon) 4 x M4 x 8 (J) (J) Width across flat 21 (Hexagon

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

stations 10-SS5YJ3SA 21 32 For 9 to 16 stations Pilot valve (V111) Adapter plate For 1 to 8 stations 20 41 42 43 Existing valve 10-SS5YJ5SA For 9 to 12 stations (Orange) Manual override For 13 to 16 stations + B A For 1 to 8 stations Interface 10-SS5Y7SA 21 41 For 9 to 12 stations For 13 to 16 stations Note 1) The above is for station addition or maintenance.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

8 55.5 30 34 40 13 16 52 17 M8 x 1.25 69 10 14 5.5 9 depth 7 Rc 1/8 8 62 7 40 30 50 15 20 64 22 M10 x 1.5 86 13 17 8 50 6.6 11 depth 8 Rc 1/4 10 77 39 63 15 20 77 22 M10 x 1.5 103 14 depth 10.5 13 17 8 60 9 Rc 1/4 10 90 39 80 21 25 98 26 M16 x 2.0 132 16 22 10 11 17.5 depth 13.5 Rc 3/8 12.5 114 48 77 100 27 30 117 26 M20 x 2.5 156 17.5 27 11 17.5 depth 13.5 Rc 3/8 12.5 134.5 12 94 48 Note

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

2-Rc(PT)1/8 (Exhaust port) 2-Rc(PT)1/8 (Exhaust port) Gasket Gasket Blank Plate Assembly VZS DXT199-21-7 DXT199-21-4 SYJ7000-21-1A VFS Applicable manifold base SS5YJ7-40 SS5YJ7-41 SS5YJ7-42 Applicable manifold base SS5YJ7-20 SS5YJ7-21 Pillips head screw M3 X 8, matted nickel plated (With spring washer) VS Individual Supply Interface Ass'y Interface Regulator(P regulation) VS7 Applicable manifold

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

21-18 18 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !

SMC Pneumatic Clean Series

5 8 8 8 50 45 45 41 36 31 31 31 6 6 6 6 6 6 5 M26 x 1.5 M26 x 1.5 M20 x 1.5 108 82 80 80 15 11.5 10.5 8.5 40 32 25 20 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 55 40 40 40 75 55 55 55 27 25 25 21 122 120 120 3.2 3.2 3.2 24 22 22 18 22 17 17 13 41 32 32 26 14 12 10 8 1/8 21 19.5 19.5 15.5 35.5 17.5 4 4 4 11 8 8 16 13 13 1/4 1/8 1/8 7 6.8 6.8 191 155 153 35.5 17.5

Table of Contents

10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5 3.5 3 3.3 3.3 Note) For AR20 only, the position of the pressure gauge

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H E A B L1 L2 M F G 2 LQ1R1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 12 15.5 1/8" 10 4 8 18.5 11.5 LQ1R4C-M LQ1R4B-M LQ1R4A-M LQ1R3D-M LQ1R3C-M LQ1R3B-M LQ1R3A-M LQ1R2F-M LQ1R2E-M LQ1R2D-M LQ1R2C-M LQ1R2B-M LQ1R2A-M 1/8" 19.5 4 16 14 15 6 12 28 16.5 22 1/4" 1/4" 19 25 5 17 20 9 18 36.5 23 21 27 3/8" 3/8" 23 29 6 21

4/5 Port Air Operated Valve Series SYJA3000

0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

Table of Contents

9 9 10 11 12 NB Model MHSH3-32D MHSH3-40D MHSH3-50D MHSH3-63D MHSH3-80D I +0.025 0 0 0.036 0 0.036 0 0.036 0 0.043 0 0.043 6 7 9 11 12 2H9 3H9 4H9 6H9 8H9 8H9 8H9 +0.025 0 +0.030 0 10H9 +0.030 0 +0.036 0 12h9 14h9 WA SA 4.2 4.2 5.1 6.6 6.6 R 44 52 63 78 98 ZC 9 9 10 12 15 SB 8 8 9.5 11 11 ZB 7.4 11.4 13.4 17.4 21.4 TB 8 8 10 10 12 YB 8 8 10 12 12 SC 7 7 8 8 8 WB 2 2 2 2.5 3 Q 11 12 14 17

High Purity Fluoropolymer

Model K J E L M H t W1 W2 LQ1P1A LQ1P2A LQ1P2B LQ1P2C LQ1P3A LQ1P3B LQ1P4A LQ1P4B LQ1P5A LQ1P5B LQ1P6A LQ1P6B 11.5 10 13 10.5 6 44 8 11 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 1" 3/4" M 25 1 16.5 15 14 6 17 14.5 55.5 8 15 Class 6 23 20 17 7 24 20.5 69 8 21 28 24 21 7 28 24.5 78.5 8 26 39 29 26 9 43 36.5 100 13 39 49 36 10 39.5 55 48.5 133 20 51 15 High Purity Fluoropolymer Fittings

SQ1000/2000

A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

5

(mm) Bore size A AL B B1 B2 D F FL G H H1 H2 I K KA LC LD LH LS LT LX LZ MM NA NN P S X Y Z ZZ 20 18 15.5 40 13 26 8 13 10.5 8 41 5 8 28 5 6 4 6.8 25 102 3.2 40 55 M8 x 1.25 24 M20 x 1.5 1/8 62 20 8 21 131 25 22 19.5 47 17 32 10 13 10.5 8 45 6 8 33.5 5.5 8 4 6.8 28 102 3.2 40 55 M10 x 1.25 30 M26 x 1.5 1/8 62 20 8 25 135 32 22 19.5 47 17 32 12 13 10.5 8 45 6 8 37.5 5.5 10 4 6.8 28 104 3.2

Tamper Proof and Flat Head Screw

15.2 1/4" 13.2 27.8 39.3 17 29.5 8 18.5 41 53.7 9.5 R 3/8 19 1.5 47.7 23 20.9 AS321F-N03-09ST AS321F-03-10ST 18.5 NPT3/8 19 23 9.5 20.9 53.7 1.5 47.7 31.8 5/16" 15.2 29.5 41 18.5 10 43.3 21 AS321F-N03-11ST AS321F-03-12ST 20.9 31.8 43.3 32.8 21 17.9 3/8" 12 22 44.3 AS321F-N04-11ST AS421F-04-10ST 18.5 33.6 3/8" 17.9 33.6 47.9 21 21 10 47.9 28.6 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5 25.4

Smooth Cylinder/Low Speed Cylinder

6.8 102 3.2 M8 x 1.25 M20 x 1.5 131 40 8 13 8 41 28 5 6 4 25 40 55 15 24 62 20 8 21 18 25 33.5 5.5 M10 x 1.25 19.5 17 32 10.5 6 8 6.8 102 3.2 M26 x 1.5 135 47 10 13 8 45 8 4 28 40 55 15 30 62 20 8 25 22 32 34.5 37.5 5.5 M10 x 1.25 19.5 17 32 10.5 6 8 6.8 104 3.2 M26 x 1.5 137 47 12 13 8 45 10 4 28 40 55 15 64 20 8 25 22 40 21 7 7 M14 x 1.5 21.5 M32 x 2 42.5 46.5 22 41 13.5 8 10 134 3.2 171

Table of Contents

0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31 5.3 18 [9.7] 0.32 [0.45] 5.0 [2.9] 21 0.29 5.6 19 [9.2] 0.35 [0.48] 5.4 [2.8] 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position

CQ2

5.5 5.5 6.6 9 11 11 34 40 50 60 77 94 45 52 64 77 98 117 7 7 8 8 10 12 40 17 17 22 22 26 26 8 8 10 10 33 13 13 15 15 21 27 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 60 69 86 103 132 156 16 16 20 20 25 30 64.5 71 86 99 31.5 35 41 55.5 62 77 90 114 30 30 39 39 48 48 Note 1) Dimensions with rubber bumper are same as above standard type. 14 14 17 17 22 27 39.5 46.5 40.5 46 48.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

8 55.5 7 34 30 40 13 16 52 17 M8 x 1.25 69 10 14 7 40 5.5 9 depth 7 Rc 1/8 8 62 30 50 15 20 64 22 M10 x 1.5 86 13 17 8 6.6 11 depth 8 Rc 1/4 10 77 39 50 63 15 20 77 22 M10 x 1.5 103 13 17 8 60 9 14 depth 10.5 Rc 1/4 10 90 39 80 21 25 98 26 M16 x 2.0 132 16 22 11 17.5 depth 13.5 Rc 3/8 12.5 114 10 77 48 100 27 30 117 26 M20 x 2.5 156 17.5 depth 13.5 17.5 27 12 94 11 Rc 3/8 12.5 134.5 48 Note