Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Series KV2 Fittings

(g) Bag/Box Quantity D2 L MA MB 5/32 5/32** 1/4 1/4** 3/8 3/8** 1/2 5/8 3/4** KV2H03-00 KV2H03-07 KV2H07-00 KV2H07-11 KV2H11-00 KV2H11-13 KV2H13-00 KV2H15-00 KV2H19-00 10.4 13.2 13.2 17.9 17.9 21.7 21.7 26.5 32.6 10.6 13.3 13.3 18.1 18.1 22.1 22.1 27.0 32.9 32.6 34.6 34.6 42.1 42.6 44.6 44.6 53.4 68.2 16 16 17 17 21 21 22 25 33 16 17 17 21 21 22 22 25 33 1.6 1.6 3.5 3.5 5.4 5.4 8.5 9.8 13.6

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

CL

64.5 M10 X 1.25 M26 X 1.5 34.5 64.5 70 M10 X 1.25 M26 X 1.5 M32 X 2 M14 X 1.5 21.5 42.5 CLM2L20SCLM220, #3 (#1+#3+#12) CLM2L25SCLM225, #3 (#1+#3+#12) CLM2L32SCLM232, #3 (#1+#3+#12) CLM2L40SCLM240, #3 (#1+#3+#12) CLM2G20SCLM220, #5 (#1+#5+#12) CLM2G25SCLM225, #5 (#1+#5+#12) CLM2G32SCLM232, #5 (#1+#5+#12) CLM2G40SCLM240, #5 (#1+#5+#12) 3.1-21 Series CLM2 Front Flange (F) CAD CLM2F Bore size

SQ1000/2000

A 3 3 () Station 5 16 SOL. B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

Table of Contents

MRHQ 5 3 7.5 5 3 5 3 Misc. 5 90 5 90 90 D20 20 20 20 20 20 20MHSH3-63D MHSH3-80D 4 10 4 5 11 3 5 3 5 5 90 90 20 20 20 20 (mm) L J 20 21 24 28 32 G 43.5 45 55.5 61 72 FX 22 26 32 40 50 O 4.5 4.5 5 5.5 6 EO 15.5 19 24 31 41 NA 14 16 18 24 28 EC 11.5 15 18 23 31 M 2 2 2 3 4 AE 38.5 39.5 49 53 61.5 DO 35.5 40 48 59 73 BC 62 72 84 102 125 DC 31.5 36 42 51 63 AD 15.5 17.5 21 26 31.5 BD 36 37 46

CA2

5 !6 !7 !8 !

Table of Contents

AD37 AD37N(5) AD48 AD48N(5) AD47 AD47N(5) AD48 AD48N(5) Float type auto-drain N.O.

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

Smooth Cylinder/Low Speed Cylinder

n-2) (n = 4, 6) Note 5) D-M9V 5 5 10 + 15 (n-2) (n = 4, 6) Note 5) D-A9V 10 5 D-M9 D-A9 15 + 15 (n-2) (n = 4, 6) Note 5) 10 10 (5) D-M9WV D-M9AV D-M9W D-M9A 15 + 15 (n-2) (n = 4, 6) Note 5) 15 10 20 + 15 (n-2) (n = 4, 6) Note 5) 15 15 (10) D-A7/A80 D-A7H/A80H D-A73C/A80C 15 + 10 (n-2) (n = 4, 6) Note 5) 10 5 Rail mounting D-A7H D-A80H 15 + 15 (n-2) (n = 4, 6) Note 5) 10 5 10

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Stroke length tolerance 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed +1.4 0 Mounting Basic/Axial foot/Flange 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Refer to page 889 for the applicable auto switch list.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

Table of Contents

VZS2000/3000 Caution 5.

CQ2

6 2 3 9 10 16 7.5 5 8 5.5 5 2.5 12 9.5 20 7.5 6.5 8 7 5 4 12 11 25 7.5 7 8 7.5 5 4.5 12 11.5 32 9.0 6 9.5 6.5 6.5 3.5 13.5 10.5 8 5 12 9 11 8 40 13 8.5 13.5 9 10.5 6 17.5 13 12 7.5 16 11.5 15 10.5 50 11 11.5 11.5 12 8.5 9 15.5 16 10 10.5 14 14.5 13 13.5 63 13.5 14.5 14 15 11 12 18 19 12.5 13.5 16.5 17.5 15.5 16.5 80 17.5 18 18 18.5 15 15.5 22 22.5 16.5 17 20.5 21 19.5 20 100 21 24 21.5 24.5

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

SMC Pneumatic Clean Series

D-C73 D-H7B D-H7A1 Load voltage 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 5 to 40 mA 40 mA or less Refer to page 182 for a list of applicable auto switches.

Tamper Proof and Flat Head Screw

19.7 18.5 3/8" 21 ASD530F-N02-07ST 25.6 48.7 13.2 1/4" 17 20.3 ASD530F-N02-09ST 28.2 53.7 55.3 1.5 51.3 23 19.8 9.5 19 15.2 5/16" NPT1/4 18.5 49.5 15.4 ASD530F-N02-11ST 32.6 54.1 23.1 18.5 3/8" 21 ASD530F-N03-07ST 25.6 48.7 13.2 1/4" 17 20.3 ASD530F-N03-09ST 53.7 53.7 1.5 28.2 51.3 23 19.8 9.5 15.2 19 5/16" NPT3/8 18.5 48 14 ASD530F-N03-11ST 32.6 54.1 18.5 23.1 3/8" 21 ASD630F-N04-11ST 64.3

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Locked condition Released condition 8-21-5 5 Guide Cylinder Series MGG 20, 25, 32, 40, 50, 63, 80, 100 How to Order MGG L B 32 100 H7BW Number of auto switches Bearing type Nil S n 2 pcs. 1 pc. n pcs.

Table of Contents

4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?