Table of Contents

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The models VX31/32/33 have been revised.

Air Slide Table

25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC

1

25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58 68 82

Made to Order

25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42

Smooth Cylinder/Low Speed Cylinder

A L1 MM R1 ND E1 U1 A1 16 20 22 28 38 44 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 25 30 30 40 50 55 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 16 20 36 44 56 64 21 25.6 41.6 50.6 64 72 20 25, 32 40 50, 63 80 100 8.5 10.5 16 20 23 24 10.3 12.8 12 16 21 24 34 41 42 56 71 79 +0.4 +0.2

LX

20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 Refer

5

Y-G02 20 34 8.5 l16 25 M8 x 1.25 10.3 11.5 8 8 +0.4 +0.2 16 21 IY-G02 Y-G03 25, 32 41 10.5 l20 30 M10 x 1.25 12.8 14 10 10 +0.4 +0.2 20 25.6 IY-G03 Y-G04 40 42 16 22 30 M14 x 1.5 12 14 10 18 +0.5 +0.3 36 41.6 IY-G04 Y-G05 50, 63 56 20 28 40 M18 x 1.5 16 20 14 22 +0.5 +0.3 44 50.6 IY-G05 Y-G08 80 71 23 38 50 M22 x 1.5 21 27 18 28 +0.5 +0.3 56 64 IY-G08 Y-G10 100 79 24 44 55 M26 x 1.5 24 31

LX

20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 Refer

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

20 stations (Max.)

AC Servo Motor Driver (Network card type ）

position mode (pp) . 20-37 20.6.4 Profile velocity mode (pv) . 20-42 20.6.5 Profile torque mode (tq) . 20-48 20.6.6 Homing mode (hm) . 20-51 20.6.7 Point table mode (pt) . 20-79 20.6.8 Indexer mode (idx) . 20-84 20.6.9 Jog mode (jg) . 20-91 20.7 WEB SERVER . 20-97 20.8 MANUFACTURER FUNCTIONS . 20-98 20.8.1 PROFIdrive parameters for status monitor . 20-98 20.8.2 Stroke end . 20-100 20.8.3

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

ZP

1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT10D 16 18 16 20 42 25 47 7 21 ZPT16D 10 12 15 20 41 25 46 6 20 13-11-4 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer Connection Male thread Pad Form Bellows Vacuum

0.55

-42 Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.

LVQ

59.5 25 31.2 82 2 1 28.5 57 34.5 69 45.4 113 22 114 37.5 55.5 6 7 20 59.5 25 31.2 87.5 2 1 42 84 48 96 75 153.2 25 150 50.2 78.2 10 7 20 73 38.5 45 128 2 1 42 84 48 96 75 163 32 167 60 88 10 7 20 73 38.5 45 137.5 551 Series LVQ-Z Dimensions With bypass Double acting valve LVQ2 1 2 N M C C A B D D (Max.

KQ2

fitting size 8 KQ2R08-10 15.2 41 26.1 18.0 4.0 10 20 18.5 KQ2R08-12 42 4.6 12 12 KQ2R10-12 18.5 44.5 41.5 32.8 33 23 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.

Table of Contents

ZS-20-5A-50 . 1 pc.

CL

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 50 57 61.4 71.4 28 28 28 30 26 28 28 36 42 42 48 56 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Clevis Pin Rod End Nut

Combination Cylinder

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 Knuckle Pin Clevis Pin Rod End Nut

Table of Contents

25 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type 2 position single : VQ7-8-FG-S-SC single (Reverse pressure): VQ7-8-YZ-S-SC 154 154 71.5 82.5 82.5 56(71) 56(71) 49(64) 49(64) 16(20)(B port) 16(20)(A port) 31(42) 31(42) Mounting hole 2-7.5 P R2 R1 VK Manual override A B PB (11) 10 12 (16) 16 (23) (22) 16 VZ 62(72) 75(86) 62(72) 75(86) 50 A

Air Cylinder Series MB

42 14 14 20 20 30 30 10.5 11 15 15 23 23 154 158 182 182 228 228 13 13 17 17 26 26 U CX L Z + Stroke RR ZZ + Stroke Double clevis: (D) Port CDH10 Double Clevis (mm) Bore size (mm) Stroke range H10 CX +0.3 CD +0.1 CZ L RR Z U ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 10 10 14 14 22 22 28 28 40 40 60 60 164.5 169 197 197 251 251 23 23 30 30 42 42 14 14 20 20 30 30 10.5