MNB

13 31 9 3 10 83 46 101 91 1/8 40 14 65 63 14 27 to 1000 35 27 11 65 120.5 46.5 20 14 38.5 9 2 12 100 52 120 104.5 1/4 50 15.5 77 75 18 32 to 1000 35 27 11 75 134.5 56.5 20 14 39.5 9 2 12 115 62 135 119.5 1/4 63 16.5 92 90 18 32 to 1000 40 32 13 95 169 72 25 20 45.5 12 4 16 126 63 153 150 1/4 80 19 100 102 22 37 to 1000 40 41 16 114 189 89 30 20 54 14 4 16 150 75 178 170 1/4 100 19 120 116

0.4

) DeviceNet System OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-LINK Max.16 stations 16 Note) 16 stations D Note 3) Note 1) Refer to page 56 for details.

MGP

38.5 32 42 37 16 16 20 20 140 140 161 161 80.5 74 89 84 97 97 106.5 106.5 102 102 118 118 37.5 31 34.5 29.5 42.5 36 46 41 20 20 25 25 3.17-14 Compact Guide Cylinder Series MGP MGPM, MGPL 80/100 4-YY depth YL 6H7 depth 10 Dimension of T slot CL b a MLGC X 0.02 X c d 6H7 CNA e CB 7 5 10 CV/MVG 6H7 e 22.5 30 Bore (mm) a 13.3 15.3 b 20.3 23.3 c 12 13.5 d 8 10 CXW 80 100 XX details XX section

MXQ

16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 ZZ 108 108 108 118 136 169 226 254 282 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-40 MXQ20-50 MXQ20-75 MXQ20-100 MXQ20-125 MXQ20-150 Note) Note) Note) Refer to the bottom view of MXQ20

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

CLS

n = 4, 8, 12, 16 n = 4, 8, 12, 16 CL 2 (Different sides, Same side), 1 155 170 35 145 CL1 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 170 + 55 35 + 55 145 + 55 MLGC n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Different sides Same side Different sides Same side CNG 110 150 2 35 110 150 100 D-A3 D-G39 D-K39 MNB 150 + 30 (n 2) n = 2, 4, 6, 8 Courtesy

MNB

n 4) 2 (n 4) 2 (n 4) 2 110 + 45 (n 4) 2 85 + 45 90 + 45 n = 4, 8, 12, 16 100 + 45 n 20 + 45 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 140 2 (Different sides, same side), 1 15 120 130 D-P5DWL 140 + 65 n = 4, 8, 12, 16 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 120 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 n 15 + 65 n = 2, 4, 6, 8 Other than the applicable

MNB

n 4) 2 (n 4) 2 (n 4) 2 110 + 45 (n 4) 2 85 + 45 90 + 45 n = 4, 8, 12, 16 100 + 45 n 20 + 45 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 140 2 (Different sides, same side), 1 15 120 130 D-P5DWL 140 + 65 n = 4, 8, 12, 16 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 120 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 n 15 + 65 n = 2, 4, 6, 8 Other than the applicable

AIR COMBINATION

ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9. HOW TO REPLACE 17 10. DISASSEMBLY DRAWING . 1819 11. DIMENSIONS . 2024 AIR COMBINATION Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Series KG Stainless Steel One-touch Fittings

A M Weight (g) L D Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9

CHKD/CHKG

17 D-A9/A9V D-Z7/Z80 12 11 9.5 11 12 14 16 20 Since this is a guideline including hysteresis, not meant to be guaranteed.

Basic type / Direct mount type Series CY3B/CY3R

51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CYP QW 14 18 17 20 26 34 48 60 PW 26 32 38 43 54 64 82 94 Q 68 84 95 105 116 134 159 171 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25

C95

10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66 86 47 40 60 25 63 14 27 18 11 11.5 100 18 20 18 71 15 30 12.5 55 50 70 25 11 76 96 6-12

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1 16.7 Encoder initial communication Transmission data error 3 DB 16.A Encoder initial communication Process error 1 DB 16.B Encoder initial communication Process error 2 DB 16.C Encoder initial communication Process error 3 DB 16.D Encoder initial communication Process error 4 DB 16.E Encoder initial communication Process error 5 DB 16.F Encoder initial communication Process error 6 DB

High Power Cylinder Series RHC

(123) 20 8, 10 1/4 500 9.5 0 1,000 2,000 3,000 Maximum speed Vmax [mm/s] 50 12, 16 1/4, 3/8 1000 19 63 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 1500 2000 2500 3000 28.5 3/8, 16 3/8, 16 3/8, 16 1/2, 16 100 =0.7 38 47 0.5 56.5 0.1 0.3 50 10, 12, 16 1/4, 3/8 500 15 63 1000 1500 2000 2500 3000 30 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16

High Power Cylinder Series RHC

=0.7 2000 38 2500 47 0.5 3000 56.5 0.1 0.3 10, 12, 16 1/4, 3/8 50 500 15 63 1000 30 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 0 1500 45 1,000 2,000 3,000 2000 60 Maximum speed Vmax (mm/s) 2500 75 80 3000 89.5 16 3/8, 1/2 500 24.5 =0.7 1000 48.5 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4 3/4 3/4 3/4 150 80 1500 72.5 2000 96.5 0.5 100 2500 120.5 0.1 0.3 3000 106 500 38 50 1000 75.5 1500 113

RHC

, 16 3/8, 16 1/2, 16 1500 2000 2500 3000 28.5 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500

Rubber seal 5 Port Solenoid Valve Series SYJ5000

SUP spacer SYJ5000-16-2 Applicable manifold base Type SS5YJ5-20 Type SS5YJ5-40 Type SS5YJ5-41 Type SS5YJ5-42 Type SS5YJ5-43 Applicable manifold base Type SS5YJ5-41 Type SS5YJ5-42 Type SS5YJ5-43 Caution Mounting screw tightening torques M2.5: 0.45 Nm Use caution to the assembly orientation for solenoid valves, gasket, and optional parts. 38 Series SYJ5000 [ ]: AC Type 20: Top Ported/SS5YJ5

CV/MVGQ

90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77