HRL

0.10 to 0.49 Minimum operating flow rate6 [L/min] 20 2 25 2 40 2 Tank capacity [L] 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range [S/cm] 0.5 to 45.0 0.5 to 45.0 0.5 to 45.0 Circulating fluid system Pump capacity Particle filter nominal filtration rating (Accessory) [m] 5 Circulating fluid outlet, circulating fluid return port CH1: Rc1 (Symbol

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2. Confirmation of allowable lateral load In the same way, the lateral load at L = 50 mm and P = 0.4 MPa is 48 N from the graph.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

KA

Calle 18 69-05 Apart.

CLK1

-R5006 CKA40-18-206C CKB40-18-207B Double knuckle joint CKA40-40-209A 75mm stroke CKA40-40-210A Weights (Basic weight is for a 0mm stroke.)

Clamp Cylinder with Lock Series CLK1

-R5004 CL1K40-18-R5006 CKA40-18-206C CKB40-18-207B 0.2 (0.44) 0.12 (0.26) 0.25 (0.55) Single knuckle joint CKM040-48-16070A Limit switch mounting base 0.28 (0.62) 0.17 (0.37) 0.33 (0.73) Double knuckle joint (includes pin) CKM040-42-16070 Dog fitting 0.22 (0.49) Limit switch mounting base CKA40-40-209A 75mm stroke 0.12 (0.26) Pedestal Dog fitting CKA40-40-210A 100mm stroke 2.2 (4.9)

HRX-OM-W058

Table 9-6 Compliance EMC Directive 2014/30/EU Machinery Directive 2006/42/EC CE Marking RoHS Directive 2011/65/EU 9.7 Compliance HRS-R Series 9-10 HRX-OM-W058 Chapter 9 Documents 9.8 Sample DoC. Sample DoC.

HRX-OM-X027

Table 9-6 Compliance EMC Directive 2014/30/EU Machinery Directive 2006/42/EC CE Marking RoHS Directive 2011/65/EU HRS-R Series 9.7 Compliance 9-9 HRX-OM-X027 Chapter 9 Documents 9.8 Sample DoC. Sample DoC.

MHY2/MHW2

MHY2-25D 2-M6 X 1 Depth 10 Pin hole positioning (Mounting thread) 16 5 23 50 4H9 Depth 4 +0.030 0 4-M5 X 0.8 (Thread for mounting attachment) 10 4-M6 X 1 Depth 12 12 0.005 0.025 (Mounting thread) 6 12 2-6.6 (Mounting hole) 2-M6 X 1 Depth 12 22.5 (Mounting thread) (Limted area for mounting attachment) 46 58 45 45 42 26H9 Depth 1.5 +0.052 0 Postioning pin hole 30 60 18 86 30 107 Auto switch

OMU0023

INP = 1 indicates that the target location has been reached. 18 Repeat steps 17-18 After settling time, the operation of step data No.20 is 19 completed. 66 - Caution If the direct operation parameters such as target position (Step Data No. 20) for D9103 to D9115 are changed using the "Direct Operation Step Data setting" function during direct operation, the changed parameters will not be

Vacuum gripper

ModelZPGU-7A-X2 (Suction cup formFlat type) ModelZPGC-7A-X2 (Suction cup formFlat type with ribs) Dimensions Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG13U-7A-X2 13 15 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG20U-7A-X2 20 23 ZPG25U-7A-X2 25 28 ZPG32U-7A-X2 32 35 20 24.5 4.5 Dimensions Model A B D E F Y ZPG10C-7A-X2 10 12 1.7 ZPG13C-7A-X2 13 15 1.8 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20C-7A-X2 20 23 1.7

1.63

MGF MGPWL, MGPWA Common Dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L MM ML MGZ 20 25 32 40 50 63 34 35 37 41 42 49 10 10 14 14 18 18 10 13 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24 27 32 39 18 21 24 27 32 39 24 30 34 40 46 58 M5 x 0.8 M6 x 1 M8

Guide Cylinder/Compact Type Series MGC

194 1/8 95 37 80 170 10.5 17 depth 12 35 M10 x 1.5 depth 20 GD GK GL GQ GR H I J K L M N O P Note 2) Q R S Bore size (mm) 20 25 32 40 54 3.5 5.5 4 4 M8 x 1.25 depth 14 35 60 80 105 50 25 M6 x 1 M5 x 0.8 94 12 26 62 4 9 7 7 M10 x 1.5 depth 18 40 70 95 125 60 32 M8 x 1.25 M5 x 0.8 104 12 31 62 4 9 7 7 M10 x 1.5 depth 18 40 70 95 125 60 32 M8 x 1.25 1/8 104 12 38 67 4 11 8 7 M12 x 1.75 depth

energy saving effect

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual.

LEH_C

/LEHF .17 3.1 . 17 3.2 . 18 3.3 . 19 4.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

48 42 85.5 91 93.5 91 80 59 93.5 101.5 55.5 50 54 50 94 107 102 107 (16.5) 14.5 (18) (14.5) 21 (17) (17.5) 15.5 (19) (15.5) 22 (18) 100 69.5 104 112 63 57.5 62 57.5 104 121 112 121 (11.5) (10.5) The factors in parentheses are for long stroke and non lubrication style.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

48 42 85.5 91 93.5 91 80 59 93.5 101.5 55.5 50 54 50 94 107 102 107 (16.5) 14.5 (18) (14.5) 21 (17) (17.5) 15.5 (19) (15.5) 22 (18) 100 69.5 104 112 63 57.5 62 57.5 104 121 112 121 (11.5) (10.5) The factors in parentheses are for long stroke and non lubrication style.

Step Motor Controller (Servo / 24 VDC)

Return to origin . 41 8.1 Return to origin . 41 8.2 Positioning operation . 41 8.3 Pushing operation. 42 (1) Pushing operation is successfully performed. . 42 (2) Pushing operation is failed (pushing the air) . 42 (3) Movement of the work piece after the completion of the pushing process .. 42 8.4 Controller input signal response time . 43 8.5 Methods of interrupting operation . 43 9.

JXCx-OMU0026

Power supply connector . 42 6.1 Connector specifications . 42 (1) Motor drive power connector : M PWR . 42 (2) Control power supply connector: CI . 42 6.2 Wiring . 43 (1) Wiring of the power supply connector. 43 (2) Wiring of the stop switch . 43 (3) Wiring of the lock release . 44 6.3 Wiring of shutdown circuit . 45 (1) Stop (Stop switch) . 45 (2) Stop (Stop relay contact) . 45 (3) Motor

Compact Slide Series MXH

19 18 15 MXP 5 5.5 10 5.5 5.5 MXY NS 4 9 10.5 8.5 31 + Stroke MTS 39.5 + Stroke 16 4 x M3 x 0.5 Depth 4.8 10 5 + Stroke LT NS LB J LA Stroke (mm) 5 14 42 4 10 10 14 10 42 4 15 52 24 20 4 20 52 24 4 20 25 30 62 4 30 30 30 30 62 4 40 20 72 45 20 6 50 82 55 25 6 25 60 60 92 6 30 30 D-X Individual -X 25 Series MXH Dimensions: 10 LT 11 19 11 LA LB J x M4 x 0.7 Depth 8 3 x M5 x 0.8 through