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I %sillrc SERIES NCJ2 Standard Type: Single Acting/ Spring Extend Spring Extend/Rod Side Flange Type (F) rucrzr lEi," F4-l sr'or,Jl r NCJ2F6 Rod Cover Head Cover NCJ2Fl0, 16 .sE (114") a10 o16 (5i8") BORE SIZE .06 l'v4"t s10 (3/8") o16 (5/8") * In case of auto switch with 06 bore, add smm to S and Z. Spring Extend/Double ClevisType (D) r.rcJzo [e*" "i'"F] qE6] r ocDaSocr?

Table of Contents

x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Model MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074 0 +0.074 0 +0.087 0 34H9 42H9 52H9 65H9 82H9 12-7-29 29 3 Finger Parallel Style Air Gripper Through-hole

Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) Th9 Z U V S Q N F M A E J G H I K1 B C D K2 L P 0 0.043 12 5 to 30 19.5 25 35.5 15.5 3.5 22 32 1.5 44.4 37.4 10.5 M3 x 0.5 5.2 M5 x 0.8 6 6 5 3.5 15 0 0.052 16 5 to 30 22.5 29 41.5 15 3.5 28 38 1.5 48 41 10 M4 x 0.7 6 M5 x 0.8 8 8 6 3.5 20 0 0.043 20 5 to 50 24.5 36 48 18.5 5.5 36 47 2 55 46 10.5 M5 x 0.8 8 M5 x 0.8 7 10 8 4.5 13 0 0.043

CQ2

Standard Bore (mm) Stroke range (mm) (mm) A B C D E F G H I J K1 K2 L M N p Q S U V Z Th9 0 0.052 44.4 6 6 10.5 M3 X 0.5 3.5 M5 X 0.8 15.5 37.4 35.5 1.5 5.2 32 5 22 3.5 25 19.5 5 to 30 12 15 0 0.052 48 41 10 15 8 8 M4 X 0.7 3.5 M5 X 0.8 41.5 1.5 6 38 6 28 3.5 29 22.5 5 to 30 16 20 0 0.052 10.5 18.5 48 55 46 7 10 M5 X 0.8 4.5 M5 X 0.8 2 8 47 8 36 5.5 36 24.5 5 to 50 20 13 0 0.052

3 Port Air Operated Valve Series SYJA300

0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5

42

53 Bottom ported drawing 1/2" 1(P), 4(A), 2(B) port M5 x 0.8 ground screw 4(A), 2(B) port SMC 31.5 37 41 50 98 G1/2 Electrical entry PE X 26.5 16 P R1 R2 18.4 18 27.5 1/8" PE. port 27.5 1/8" External pilot port 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-position double: VQ520 0 1 3-position closed center: VQ530 0 1 3-position exhaust center: VQ540 0 1 3-position pressure center:VQ550

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 X 0.8 20 stations 20 P Port Note) If more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port. M5 X 0.8 SY 41 Type Applicable solenoid valve SYJ314-l SYJ314M-l SYJ324-l SYJ324M-l How to Order SS3YJ3-41-05 --M3 SYJ 41 Type S41 Type Coil is located on same side as the A port.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 45 50 37 41 41 45 13 17 17 22 26 32 32 41 26 26 26 31 5 6 6 8 8 8 8 10 134 138 140 174 M8 x 1.25 M20 x 1.5 M10 x 1.25 M26 x 1.5 M10 x 1.25 M26 x 1.5 M32 x 2 M14 x 1.5 The bracket is shipped together.

SMC Pneumatic Clean Series

37 37 30 21.5 15 15 15 46.5 37.5 33.5 28 7 5.5 5.5 5 1/8 45 41 41 37 M26 x 1.5 M26 x 1.5 M20 x 1.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 154 122 120 116 21 19.5 19.5 15.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033 0 32-0.039 0 82 36 10 8 M32 x 2 With air cushion Cushion valve (Width across flats 1.5) WB C2 2-FD Relief port M5 x 0.8 2-NN GB WC WA GA GC B 2-P Width across

AZ1000

Delivery pressure Code 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 02 06 10 15 Bonnet Standard Panel Installation 3) Bonnet port (NPT 1/8 inch) Code No code P BP Material 3) Panel mounting hole: dia.39.6 mm.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) Th9 Z U V S Q N A F M E J G H I K1 B C D K2 L P 0 0.043 12 5 to 30 19.5 25 35.5 15.5 3.5 22 32 1.5 44.4 37.4 10.5 M3 x 0.5 5.2 M5 x 0.8 6 6 5 3.5 15 0 0.052 16 5 to 30 22.5 29 41.5 15 3.5 28 38 1.5 48 41 10 M4 x 0.7 6 M5 x 0.8 8 8 6 3.5 20 0 0.043 20 5 to 50 24.5 36 48 18.5 5.5 36 47 2 55 46 10.5 M5 x 0.8 8 M5 x 0.8 7 10 8 4.5 13 0 0.043

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position

VQ5000

2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.