21

Boss-cut 40 20 to 32 ZZ + Stroke Rod Flange (F) (mm) A 14.5 AL 12 B 34 B1 13 B2 26 C2 30 D 8 E 20 F 13 FD 7 FL 10.5 FT 4 FX 60 FY FZ 75 G 6 H 31 H1 5 H2 8 Bore size 0 0.033 0 0.033 0 0.033 0 0.039 20 25 32 40 17.5 15 40 17 32 37 10 26 13 7 10.5 4 60 75 6 34 6 8 17.5 15 40 17 32 37 12 26 13 7 10.5 4 60 75 8 34 6 8 23.5 20.5 52 22 41 47.3 14 32 16 7 13.5 5 66 36 82 8 42 8 10 Boss-cut I

KQ2

(inch) Min. port size Note) Mass (g) D L A M Applicable tubing MS KQ2R01-03 KQ2R01-05 KQ2R01-07 KQ2R03-05 KQ2R03-07 KQ2R05-07 KQ2R05-09 KQ2R07-09 KQ2R07-11 KQ2R09-11 KQ2R09-13 KQ2R11-13 7 32 32 24 19 17 14 4 9 8 9 7 2 5 32 3 16 1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 9.6 34.5 18.5 17.5 17 15.5 2.5 1 8 LQ 9.2 34 10 34 34.5 34.5 36.5 37 40 40 41 44 5 32 16 17.5 3 MQR 10.4 11.4 10.7 18.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

17 2.5 18 41 14 5 1/8 CDRA1BSU63 M12 x 1.75 depth 13 0 0.030 6 92 142 22.5 23.5 12 15.5 62.5 M24 x 1.5 72 33 12 22 35 40 70 29 16 34 13 20 3 22 50 19 5 1/4 CDRA1BSU80 M12 x 1.75 depth 14 0 0.036 8 112 172 28 25 12.5 16 73.5 M24 x 1.5 85 33 12 22 40 45 85 39 16 34 13 25 4 22 60 19 5 3/8 CDRA1BSU100 Foot style: CDRA1LSU Single shaft flange style: CDRA1FSU Foot bracket Auto switch D-A53 Mounting

REA/REB

3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 Max.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(201.5) 6 0 0.030 11 CRA1BSU63 10 76 17 1/8 20 M20 x 1.5 54.5 19.5 30 13 18 117 19 57 14 60 2.5 41 5 30 186 (230) 6 0 0.030 13 CRA1BSU80 12 92 1/4 20 23.5 M24 x 1.5 62.5 22.5 16 35 22 142 22 70 19 72 3 50 5 40 245 (311) 8 0 0.036 13 CRA1BSU100 12.5 112 25 3/8 25 M24 x 1.5 73.5 28 40 16 22 172 22 85 19 85 4 60 5 45 ( ) are the dimensions for rotation of 180 and 190. 11-7-27 28 Series CRA1U

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(mm) 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry 32 32 40 B5 40 M5 x 0.8 50 50 Pad material N NBR Pad type S Silicon rubber F Ball joint U Urethane rubber F Fluoro rubber GN Conductive NBR GS Conductive silicon rubber 20 and larger are manufactured upon receipt of order.

Table of Contents

40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 5.5 6 6 7 7 AME150 1 8 1 4 3 8 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 , , 1 4 3 8 , AME250 1 2 3 8 1 2 , AME350 3 4 14-20-40 5 Super Mist Separator Series AME AME450 to AME850 Dimensions Courtesy of Steven Engineering, Inc.-

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

250 262.5 275 287.5 300 300 58.1 42.6 7.5 34.5 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

Cylinder with Lock

102 32 139 1/4 1/4 78 25 52 14 123 21 79.5 20 23 18 17 71 13 M12 x 1.75 10 Up to 1500 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 93.5 22 25 20 19 72 16 M12 x 1.75 10 (mm) Bore size (mm) 40 50 63 80 100 KA LD LH LS LT LX LY MM N P RT RY S T V X Y Z ZZ 14 40 207 3.2 42 70 M14 x 1.5 27 1/4 153 37.5 9 27 13 24 244 9 18 45 222 3.2 50 80 M18 x 1.5 30 3/8 168 44 11 27 13 31 266 9 30 76 18 50

JXCx-OMT0023

13.

Vacuum Pad: Ball Joint Type

Pad dia. 10 13 16 20 25 32 40 50 Buffer stroke 10 mm 20 mm 30 mm 40 mm 50 mm Inclination 15 (Rotation 30 ) 708 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer/Male Thread ZPT Series How to Order ZPT 25 F GN B5 A8 Mounting Pad diameter Symbol Mounting Pad dia. 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry port 32 32 40

C85

28 NCM 0.01 400 350 300 250 200 150 100 50 450 0 (40) (40) (40) (40) (100) 80 0.3 NCA Cylinder stroke (mm) U (40) (40) 61 30 38 0.5 77 Center trunnion: O Head side trunnion: U (40) 51 35 25 32 0.7 64 DSeries CS1 only W Series C85: 20, 25 W 37 24 35 17 22 0.3 47 -X 100.0 T 27 18 26 12 16 0.5 35 2022 14 21 10 13 0.7 28 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40

Series SV

13 12.5 12.5 12 12 L4 13 Series SV EX500 Decentralized Serial Wiring How to Order SI Unit Refer to page 3 for valve specifications.

13

Vacuum Pad: ZPT P. 13-11-2 Large/Heavy Duty Type (40 to 125): ZPT/ZPX P. 13-11-72 Large Size Bellows Type (40 to 125): ZPT/ZPX P. 13-11-86 Ball Joint Type (10 to 50): ZPT/ZPR P. 13-11-104 Free Mount Cylinder for Vacuum: ZCUK P. 13-12-2 Drain Separator for Vacuum: AMJ P. 13-13-3 Vacuum System Peripherals: P. 13-14-2 Related Products: P. 13-14-13 Manifoid Specification Sheet P. 13-

CNA

10 85 15 52 16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11

CNA

50 63 80 100 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 2035 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4

CY1

CY1S15, 20 to 40 (mm) J x K GP G FB A L B C D d EA EB FA H HA HG HP HT HS HB Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 7.5 9.5 5 16.6 12 6 13 3 40 29 13 39 21 15 1 52 6.5 6 60 M6 x 1.0 x 9.5 10 9.5 5.2 21.6 16 46 36 17 45 20 25.5 4.5 62 8.5 70 M6 x 1.0 x 9.5 10 11 6.5 26.4 16 8 14 4 54 40 20 53 20 23 9 70 8.5 7 70 M8 x 1.25 x 10 12.5 14 8 33.6 20 8

CP95

size (mm) d3 Part no. d1 H9 h d6 (max) b1 l a l3 32 KJ10D 10 43 28 14 20 13 14 M10 x 1.25 40 KJ12D 12 50 32 16 22 13 16 M12 x 1.25 50, 63 KJ16D 16 64 42 21 28 15 26 M16 x 1.5 80, 100 M20 x 1.5 KJ20D 20 77 50 25 33 15 26 6-13-13 13 13 ISO/VDMA Cylinder: Non-rotating Type Double Acting with End of Stroke Cushioning Series CP95K 32, 40, 50, 63, 80, 100 How to Order CP95K B 32 100 W Without

CP95

-32 16 64 16 32 32 50, 63 83 M16 x 1.5 C85 +0.60 +0.15 M20 x 1.5 GKM20-40 20 80 20 80, 100 105 40 40 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data Bore size (mm) d3 Part no. d1 H9 h d6 (max) b1 l a l3 KJ10D 10 43 28 14 20 13 14 32 M10 x 1.25 KJ12D 12 50 32 16 22 13 16 40 M12 x 1.25 KJ16D 16 64 42 21 28 15 26 50, 63 M16 x 1.5 80, 100 M20 x 1.5 KJ20D 20 77 50 25 33 15