base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .14643 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .22928 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .33069 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .29700 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .45052 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .45052 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .43651 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .45052 lb

MG

to 300 st Over 100 st to 200 st 105 Over 200 st to 300 st Over 300 st 12 16 20 25 14 110 60 48 3 22 3.5 56 M5 x 0.8 41 10 50 5 37 20 40 15 25 16 110 200 60 105 24 54 3 25 3.5 62 M5 x 0.8 46 10 56 5 38 24 44 17 27 18 120 200 77 117 167 28 70 3 30 3.5 81 M6 x 1.0 54 12 72 17 44 24 44 300 29 39 26 120 200 77 117 167 34 78 4 38 4.5 91 M6 x 1.0 64 12 82 17 50 24 44 300 29 39 MGPM (Slide bearing

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

MXS Series Air Slide Table

M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5 MXS16 Mounted to table 16.5 M5 X 18 19 M5 X 18 12 5 21 14 37 11 MXS-AS16-X11 15 34.5 M10 X 1 MXS-AS16-X12 25 44.5 Q MXS-AS20 5 27.5 MXS20 M12 X 1.25 21 M6 X 20 24 M6 X 20 13 6 25 17 13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 17 6 31 19 26.5 M14 X 1.5

LX

Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3. T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

FZ L Inch Metric 24 25.5 28.5 32.5 B 22 22 29.5 32.5 A 35.5 35.5 44 47.5 B 17 17 19.5 22.5 A 30.5 30.5 34 37.5 12 16 20 25 21.5 21.5 22.5 24.5 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 13.5 13.5 14.5 15 5, 10 Rear Flange With auto switch Withoutauto switch L1 Bore (mm) Stroke range (mm) FD FT FV FX FZ L Inch Metric 14 15.5 18.5 22.5 B 17 17 19.5 22.5 A 31 31 42 45.5

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

Rotary One-touch Fittings Series KS/KX

M5, M6 Weight (g) M5, M6 D1 D2 L1 L2 A M Nylon Urethane M5 0.8 M6 1.0 KXL04-M5 KXL04-M6 KXL04-01S KXL06-M5 KXL06-M6 KXL06-01S KXL06-02S KXL08-01S KXL08-02S KXL08-03S KXL10-02S KXL10-03S KXL10-04S KXL12-03S KXL12-04S 22.5 23 24 8 11 4 10.4 13 16 2.5 3.5 3.5 22 1 8 M5 0.8 M6 1.0 12 16 24 23.5 24 25 28 29 32 33 38 39 42 40 43 25 2.5 3 3.5 5.0 3.5 5.0 8 26 15 6 12.8 15 24 17 1 8 1 4 28 20 26