Vacuum

oP X Adaolor olate: incllded shndard Applicable Tube Pad Diameters s10. s13. s16 Bellows type Pad Diameters s4O. o5O Bellows type O _ F l a l s : 1 0 F ats: 19 [ -i 1 0 '16 3 3 9 50 a4 95 5.5 13. 18.527.5 36.452.5 63.5 86.5 97.5 4.7 '19 zPRr6E l '16 1B 20 29 37.9 54 88 99 9.9 8.5 1 1 8 IPY $enies Wllrout Bullm Pad Diameters s2. a4' s6' sB Pad Diameters o2o. o25. o32 Oeep Type/ZPY2sD only

Vacuum

oP X Adaolor olate: incllded shndard Applicable Tube Pad Diameters s10. s13. s16 Bellows type Pad Diameters s4O. o5O Bellows type O _ F l a l s : 1 0 F ats: 19 [ -i 1 0 '16 3 3 9 50 a4 95 5.5 13. 18.527.5 36.452.5 63.5 86.5 97.5 4.7 '19 zPRr6E l '16 1B 20 29 37.9 54 88 99 9.9 8.5 1 1 8 IPY $enies Wllrout Bullm ) Pad Diameters s2. a4' s6' sB Pad Diameters o2o. o25. o32 Oeep Type/ZPY2sD only

MXH Series Compact Slide

socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 5 3-M4 x 0.7 through Bottom hole dia. 3.3 6-6 counter bore depth 3.3 4-M3 x 0.5 Depth 5.5 2-M5 x 0.8 6.5 5 4-M3 x 0.5 Depth 4.8 17 38 39 15 19 10 18 19 18 5 5.5 10 5.5 5.5 NS 4 9 10.5 8.5 31 + Stroke 39.5 + Stroke 16 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 Stroke (mm) NS LT LB LA J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

3 Port Solenoid Valve Rubber Seal Series SY100

SY11 A 3 4 0.22 100 kPA to 0.6 100 kPA to 0 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 100 kPA to 0 0.14 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 0.22 100 kPA to 0 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.O.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 63.5+ST ST 50+ST 8 5.5 16 2 x 3.2 through 15+1/2ST 2.75 19 2 x 6.5 counterbore depth 3.3 14 1 OUT 3 3 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M3 x 0.5 x 12.5 L and M3 x 0.5 (Hexagon bolt) (Hexagon nut) 7 2 x M5 x 0.8 thread depth 4.5 IN (Piping port) 2 x M3 x 0.5 (Through-hole) 2 x M3 x 0.5 (Through-hole) 4 x M5 x 0.8 thread depth

IZx-OMP0064

Mount the sensor head using two M3 screws (not supplied with the product). Do not pull the cable connected to the sensor head. Pulling the cable with excessive force may cause sensor head breakage or wire breakage. 2) Installation of sensor amplifier Mount the sensor amplifier using two M3 screws (not supplied with the product). Do not pull the cable connected to the sensor amplifier.

VK3000

-(S)42 Manifold base Applicable base: In common for all types of VV5K3 models Mounting Screw Tightening Torques Mounting Screw Tightening Torques Caution Base mounted Caution Body ported VK3000-6-1A Manifold gasket Screw assembly VK3000-6-2A M3: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.

100

m3/year 15 s 150 L/min (ANR) ON/OFF operation can be set freely within the set value range.

RLQ

Lock ring Lock ring Retraction locking Extension locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rear side) to unlock. 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market

SFOD-OMT0010

Signal name Category (OUT0 output is turned ON) (2)(6)(10)(14)(18)(22) DRIVE (4)INP output is turned OFF. (1)(9)(17) Input IN0 (5)BUSY output is turned ON. (1)(9)(17) IN1 PLC (6)Turn the DRIVE input OFF. (19)(11)(3) OUT0 (19)(11)(3) (7)INP output is turned ON. OUT1 Output (23)(20)(15)(12)(7)(4) (8)BUSY output is turned OFF.

Compact Manifold Regulator

19 20 8, 5/16 6 6 8, 5/16 3 11.5 19.5 20 23 10, 3/8 10, 3/8 1/4 1/4 7 11.5 22 22 26 1/4 1/4 19 20.5 737 ARM11A/B Series End Block Pressure Gauge ARM11E L Part no.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. M3 x 5L Bracket (Part no. ZS-28-B) M3 x 5L 2. Mounting with panel mount adapter Secure the panel mount adapter with two M3 x 8L mounting screws. Mounting Panel Caution Front protective cover (Part no.

Series VQ Base Mounted Metal Seal/Rubber Seal

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Series SY100 3 Port Solenoid Valve Rubber Seal

27.8 (In case of AC) 25.3 21.2 VQ 9 A R 6 VQZ 5.5 3 3 9.5 5 4 VZ 19 VS 3-M3 X 0.5 (Piping port) L plug connector (L): SY1 4 (A)-lLll-M3 1 2 M plug connector (M): SY1 4 (A)-lMll-M3 1 2 (Indicator light and surge voltage suppressor) 15.6 (Indicator light and surge voltage suppressor) 45.6 (In case of AC) + P P 36 300 (Lead wire length) 300 (Lead wire length) 39.1 (In case of DC) + 27.7 (In

Precision Cylinder Series MTS

x 0.5 (port size) 2-M3 x 0.5 (port size for axial piping type MTS8-P) 9 2-M3 x 0.5 Effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 M2.5 x 0.45 12 41 + Stroke 53 + Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male threads Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4 Stud bolt part number: MT-S8 Rod end nut part number: NTJ-006A

Digital Flow Switches

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without an unit switching function.)

ML2B

(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.

CE

61.5 49 60 9 M10 x 1.5 Rc(PT) 1/4 89.5 35 19 64 Refer to page 11 regarding the rod end nut which is included.

Escapements Series MIW/MIS

HC HD HE JA JB KA KB LA LB LC MA MB MC NB NAB 6 8.5 6 9 M2.6 x 0.45 M3 x 0.5 M4 x 0.7 M6 x 1 25 35.5 MD 34 43.5 ME 37 54 19 28.5 Model MIW12-12 MIW20-20 +0.030 0 4 5 3.5 5 19 28.5 11 15 7.6 14.5 2.2 2.8 37 53 7.5 9.5 12.5 16.5 +0.025 0 2.5H9 4H9 8 Series MIW/MIS Finger options Tapped on upper and lower faces Tapped on all faces Attachment mounting thread 8-FE through Attachment mounting