1.1

Thermo-cooler side Customers equipment side 9 RD Circuit configuration diagram 10 SD Internal circuit L N 1 2 3 4 5 6 7 8 9 10 11 11 SG Power supply cable Signal cable Communication cable outlet (also used as signal cable outlet) Front side Power cable entry 11 Series HRGC Option symbol T High-lift Pump Option combination ( : Available, : Not available, : Possible, but specification needs

Compact Slide Series MXH

17 38 39 MXJ 19 10 18 19 18 15 MXP 5 5.5 10 5.5 5.5 MXY NS 4 9 10.5 8.5 31 + Stroke MTS 39.5 + Stroke 16 4 x M3 x 0.5 Depth 4.8 10 5 + Stroke LT NS LB J LA Stroke (mm) 5 14 42 4 10 10 14 10 42 4 15 52 24 20 4 20 52 24 4 20 25 30 62 4 30 30 30 30 62 4 40 20 72 45 20 6 50 82 55 25 6 25 60 60 92 6 30 30 D-X Individual -X 25 Series MXH Dimensions: 10 LT 11 19 11 LA LB J x M4 x 0.7 Depth

Clamp Cylinder with Lock

(for IA type) 2 x M6 thread depth 11 (for YA type) 15 15 35 18 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 20 20 17 17 40 A 20 20 19.5 0.2 0.5 15 45 60 25 45 60 A Part no.

Low Profile Slide Table Series MXF

Model Maximum allowable load mass Average speed Va (mm/s) A2 10 11 12 17 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 0.6 1 2 4 Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Note) 16 mm for MXF8-10 only. 0.7 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model Stroke (mm) 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98 2.22 3.41 6.66

VZ100/300/500

G: 300 mm H: 600 mm SYJ (Lead wire length) Manual override (Non-locking) VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Mounting hole for manifold) VT VP VG (Piping port) VP S070 VQ 2-M3 x 0.5 depth 5 (Mounting thread) VKF VQZ VZ L plug connector (L) VZ10

IDX-OM-W014

R 11 R 11-1 11-2 1 AC100V AC200V, AC230V INOUT IDU3E/4E/6E-10-R IDU3E/4E/6E-20/23-R (A) 10 5 (mA) 30 11-3 M5 9.5mm 2 1.25mm L ,N N L () () IDU Series 11-1 11 1 IDX-OM-W014 11 R AC100V M4 () AC200V, AC230V (M3) 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W014 12.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12.S 12-2 L N PE M3 6.5mm 2

One-touch Fittings

3/16 R1/8 KQ2H05-01S1 Male connector Operating Environment Warning 4 M3 x 0.5 KQ2F04-M31 4 M5 x 0.8 KQ2F04-M51 6 M5 x 0.8 KQ2F06-M51 1/8 10-32UNF KQ2F01-321 5/32 10-32UNF KQ2F03-321 1/8 M3 x 0.5 KQ2F23-M31 1/8 M5 x 0.8 KQ2F23-M51 1.

LEF-OM007xx

-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable S* Standard cable S* 11-LEFS40 11-LEFS40 *Only Step motorcan be selected AC Servo motor 11-LEFS 25 B A1 100 2 S S2 ize I/O connector 25 25 None None Nil Nil 32 32 With connector With connector D D 40 40 Motor Controller type Vacuum

Modular F.R.L. Units

Note 11) : For thread type: NPT only.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Basic style Width across flats 3.5 23 9 4.5 4.5 MXH MXU 6.5 3.5 2 x M3 x 0.5 (Port size) MXS 2 x M3 x 0.5 MXQ (Port size for axial piping type MTS8-P) 0.2 2 x M3 x 0.5, effective length 5 9 5 MXF +0.035 +0.025 4 MXW 22 12 16 MXJ M2.5 x 0.45 12 41 + Stroke MXP 53 + Stroke 9 15 MXY MTS 0.2 9 4 x M3 x 0.5, effective length 5 10 15 Rod end male thread Width across flats 3.5 +0.035 +0.025 4 M3

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) VF VP4 Dimensions VQ 1/2 Single unit Manifold VQ 4/5 2n x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting VQC 1/2 VQC 1/2 2 x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting VQC 4/5 M3 mounting hole P = 11 M2.5 mounting hole VQZ SQ VFS VFR Residual pressure release manual override Residual pressure release manual override

Proposals for Energy Saving

depth 8 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 5.5 5.5 5.5 5.5 6.6 9 11 11 11 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 28 35 35 43 59 10.5 15 16 23 Note 1) Dimensions other than above are the same as the standard double acting single rod type.

MXH

Model MXH6 MXH10 MXH16 MXH20 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 5.5 7.5 10 11 6.5 8 9 9.5 Mounting of Workpiece Workpieces can be mounted on 2 surfaces of the compact slide.

Vacuum Module Series ZX

Release valve Release valve Pilot pressure EXH port (PE) M3 Manual override Release flow rate adjusting needle Interface plate Pilot pressure EXH port (PE) M3 70 Release flow rate adjusting needle Interface plate A 83.9 35.4 A 35.4 Pilot pressure SUP port (PS) M3 (Mounting hole) 2 x 3 1 Pilot pressure SUP port (PS) M3 5.4 1 (Mounting hole) 2 x 3 5.4 Vacuum pressure SUP port (PV) M5 (or M6

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

CRB1/Size: 10, 15, 20, 30

R Q2 B P C F(h9) D G1 G2 J K L M N Q1 E(g6) Q3 Model A 90 180 270 M5 M3 CRB1BW10-lS CRB1BW10-lSE CRB1BW15-lS CRB1BW15-lSE CRB1BW20-lS CRB1BW20-lSE CRB1BW30-lS CRB1BW30-lSE 3.4 (5.5) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 M3 (6) 0 0.036 15 24 8 0.004 0.012 9 14 3 1 5 9 0.5 29 4 M3 M3 (5) M5 M3 3.4 (6) M3 (10) 0.004 0.012 0 0.043 20 29 9 12 18 5 4 1.5 6 10 0.5 34 M3 M4 (7.5) 4.5

Angular Air Gripper Series MHC2/MHCA2/MHCM2

M3 x 0.5 Finger opening port 4 0.005 0.025 1.6 7 M3 x 0.5 Finger closing port 18 In the case of MHC2-6S, finger opening port is a breathing hole. 8 Series MHC2-6/MHCA2-6 Dimensions MHCA2-6 (Short body) 2-M2 x 0.4 thread depth 4 (Mounting thread) 4-M2 x 0.4 through (Attachment mounting thread) 5 10 Attachment mounting limiting range 16 11 2-M3 x 0.5 through Prepared hole dia. 2.6 through

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 9 SOL.B 22 SOL.A 10 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 Positive COM spec. Negative COM spec. 1021-VV5Q21 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 9 SOL.B 22 SOL.A 10 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 Positive COM spec. Negative COM spec. 1021-VV5Q21 The total number of stations is tabulated starting from station one on the D-side.