3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6

AC Servo Motor Driver (SSCNET Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 14 6.1 Setup software (MR Configurator2TM) .14 6.1.1 Installation Method . 14 6.2 Basic driver set-up for Initial Test Drive .14 6.2.1 Start up the Setup software (MR Configurator2TM) . 15 6.2.2 System Settings . 16 6.2.3 Model Selection . 16 6.2.4 Driver ON LINE Check . 17 6.2.5 Help Function . 17 6.3 Parameter setting (

Series KV2 Fittings

17 17 17 21 21 21 21 21 21.8 21.8 21.8 22 22 22 25 17 16 16 16 21 17 17 17 17 17 21 21 21 16.8 20.4 20.4 2 22 22 25 1.6 1.6 1.6 1.6 3.5 3.5 3.5 3.5 3.5 3.5 5.4 5.4 5.4 4.6 7.0 7.0 8.5 8.5 8.5 9.8 23 15 16 23 40 16 23 37 40 53 36 44 68 76 64 76 43 51 76 126 100/400 100/400 100/400 100/400 100/200 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/100 100/100 100/100 100/100 100/200

42

Valve + Release valve spacer (VVQ4000-24A1 5 D) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve Spacer Valve + SUP stop valve spacer (VVQ4000-37A1 5 ) q AXT632-17-10 (M3 x 62) 3 1 w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

Tamper Proof and Flat Head Screw

6 18.2 40.7 R 1/4 17 1.5 36.7 18.5 7 AS221F-N02-05ST AS221F-02-08ST 18.2 3/16" 11.4 24.9 34.2 17 15.2 18.5 27.2 8 36.4 AS221F-N02-07ST AS221F-02-10ST 18.5 7 33.9 20 40.7 1.5 36.7 NPT1/4 17.5 1/4" 13.2 25.2 34.5 18.5 18.5 10 43.2 21 AS221F-N02-09ST AS321F-02-06ST 17 5/16" 15.2 27.2 36.4 12.8 6 27.8 39.3 33.9 43.2 20 21 AS221F-N02-11ST AS321F-02-08ST 3/8" 17.9 15.2 8 18.5 29.5 41 55.3 49.3

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

6.7 12.3 7.2 1.2 16.5 3/16" 11.4 50 6.2 32.8 21 15.5 7.2 1.2 36 59.8 15.2 36.5 18 8.1 17 1/4" 13.2 52.2 7.1 33.7 19 56 59 12.8 45 17 7.4 16.5 3/16" 11.4 52.2 6.2 34.9 35 60 64.4 15.2 45.8 18 8.2 15.5 7.2 1.2 17 1/4" 13.2 54.4 7.1 35.7 33 20.6 9.8 1.2 64 71.6 18.5 47.3 21 9.8 18 5/16" 15.2 59.8 8.1 36.7 36 68 76 20.9 48.5 22 11 1/4" 17 13.2 59 7.4 45.2 56 121 77.7 18.5 55.4 21 20.6 9.8 1.2

Antistatic One-touch Fittings Series KA

-U02 10 13.9 13.9 17 Uni thread Uni thread 24.5 26 17 12 1 8 1 4 KAT08-U01 KAT08-U02 22.5 24.5 15 20 26 14 15.2 8 12 23 18.2 18.2 18.5 3 8 KAT08-U03 17 25.5 27 28 1 8 KAT10-U01 29.5 27 26.5 25 31 27 30 1 4 3 8 KAT10-U02 KAT10-U03 30 30.5 17 10 26.5 18.5 17 21 29.0 29.0 1 2 KAT10-U04 30 31.5 51 31 34 22 1 4 3 8 KAT12-U02 KAT12-U03 27 28 31.5 32.5 17 12 20.9 17 28.5 22 45.2 45.2 1 2 KAT12-U04

KA

> 1 4 10 KAL06-U02 11.4 11.4 15 24.5 23 17 12 1 8 1 4 22.5 24.5 25.5 26 KAL08-U01 KAL08-U02 11 16 14 15.2 12 8 23 18.5 14.9 14.9 3 8 25.5 27 KAL08-U03 17 24 1 8 KAL10-U01 29.5 27 26.5 25 25 21 24 14.9 14.9 Kl 1 4 3 8 30 30.5 17 KAL10-U02 KAL10-U03 26.5 17 18.5 10 21 25.0 25.0 Ml 1 2 KAL10-U04 30 31.5 45 23 27 22 1 4 3 8 27 28 31.5 32.5 KAL12-U02 KAL12-U03 17 Hl 20.9 17 12 28.5

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to page 17-6-3 for Safety Instructions and 17-5-59 to 17-5-61 for High Purity Chemical Valve Precautions.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 18.2 17 25.2 34.4 12.8 10.4 6 5/32" 16 18.5 35.4 40.4 17 34.4 29.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 18.2 24.9 34.2 34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection

CHKD/CHKG

x 4 45 21 106 17 26 depth 17.5 146 3/8 36 15 36 Note 1) Body dimensions are the same with or without auto switches.

HRX-OM-X084

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMElectric conductivity control function

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

VM

Push pull VZM550-01-37 Panel mounting hole Stroke 2.7 Position indicator Hexagon nut thick 5, across flats 17 JIS Symbol 2-3.2 mounting hole 20 N F.O.F. 2.7 mm T.T. 5-6-46 45 5 Port Mechanical Valve Series VZM500 External pilot type VZM551 type With foot bracket VZM55-01--F 2-4.5 mounting hole (External pilot port) SA VA SA VA VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

HRX-OM-X071

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMWith electric conductivity control function

Rubber seal 5 Port Solenoid Valve Series SYJ7000

M3: 0.8 Nm 61 Series SYJ7000 Type 20: Top Proted/SS5YJ7-20Stations -00 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) 6 L2 L1 4-4.5 (For mounting) 6.5 (DIN 7.8) 20.3 (DIN 21.6) 15.5 3 8 3.3 122 [126.4] 17 16.5 107.4 [111.8] B A B A B A B A B A P R R 50 25 57.3 (DIN 58.6) 56.5 (DIN 57.8) P R R 17 17 79.5 [81.7] 78.7 [80.9] 1/8 (P, R port) 1/8 (A, B port) Manual override (Pitch) P = 19

VXP21/22/23

$%&' 2 0 17-3-43 2 The VX series will be revised shortly. Series VXP21/22/23 Normally Closed (N.C.)