LX

1 10 10 10.1 20.1 5.1 1.1 0.2 20.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 5.1 1.3 0.3 0.1 5.1 2.6 1.3 0.3 0.1 80 80 1.3 2.6 0.7 0.2 0.1 2.6 1.3 0.7 0.2 0.1 For transfer load of 3kg Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 10 20.1 10.1 5.1 1.1 0.2 Speed (mm/s) 40 5.1 2.6 1.3 0.3 0.1 80 2.6 1.3 0.7 0.2 0.1 Refer to page 303 for acceleration time. 221 14

HRX-OM-W038

Frunzei, Nr.29, Sector 2 Bucharest, Romania Slovakia SMC Priemyselna Automatizacia, s.r.o. (421) 2-444 56 725 Nmestie Matina Benku, 10, 81107 Bratislava Slovenia SMC Industrijska Avtomatika d.o.o. (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje Spain SMC Espaa, S.A. (34) 945-184-100 Zuazobidea 14, 01015 Vitoria Sweden SMC Pneumatics Sweden AB (46) 8-603-12-00 Ekhagsvgen 29-31, SE-14171

HRX-OM-O021

Frunzei, Nr.29, Sector 2 Bucharest, Romania Slovakia SMC Priemyselna Automatizacia, s.r.o. (421) 2-444 56 725 Nmestie Matina Benku, 10, 81107 Bratislava Slovenia SMC Industrijska Avtomatika d.o.o. (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje Spain SMC Espaa, S.A. (34) 945-184-100 Zuazobidea 14, 01015 Vitoria Sweden SMC Pneumatics Sweden AB (46) 8-603-12-00 Ekhagsvgen 29-31, SE-14171

HRX-OM-R005

Frunzei, Nr.29, Sector 2 Bucharest, Romania Slovakia SMC Priemyselna Automatizacia, s.r.o. (421) 2-444 56 725 Nmestie Matina Benku, 10, 81107 Bratislava Slovenia SMC Industrijska Avtomatika d.o.o. (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje Spain SMC Espaa, S.A. (34) 945-184-100 Zuazobidea 14, 01015 Vitoria Sweden SMC Pneumatics Sweden AB (46) 8-603-12-00 Ekhagsvgen 29-31, SE-14171

Guide Cylinder Series MGG

82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201 82 37 52 16 38 65 12 21 14 114 Rc 1/8 200mm or more 101 350 to 800 238 92 44 62 20 47 84 12 25 15 138 Rc 1/4 250mm or more 116 350 to 1000 285 104 55 25 75 94 58 14 26 16 164 19 Guide Cylinder Series MGG Front mounting flange type/MGGF 63 to 100 Bracket (See table below.)

Slider Type Ball Screw Drive/11-LEFS Series

6 900 11-LEFS40l-850l 1206 1255 856 1028 14 6 900 11-LEFS40l-900l 1256 1305 906 1078 14 6 900 11-LEFS40l-950l 1306 1355 956 1128 16 7 1050 11-LEFS40l-1000l 1356 1405 1006 1178 16 7 1050 LC3F2 521 AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS25, 32, 40 Refer to page 46 for model selection and page 510 for particle generation characteristics

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.

Possible to transfer a workpiece at low-speed.

(mm) ND NC NB NA K GE GD GC GB GA EF EE ED EC EB EA Size 10 20 30 50 91.4 112.4 118.7 145.8 M8 x 1 M10 x 1 M10 x 1 M14 x 1.5 20 25 27 32 15.6 19.5 21.5 28 11 14 14 18 7.5 9.5 9.5 11.5 45.2 56.4 61.5 72.9 10 14 14 19 5.5 8 8 8.5 12.5 16.5 16.5 19.5 4 4 4 6 47.1 57.1 58.4 74.4 44.3 55.3 60.3 71.4 33.5 43 46 56 14 18 19.5 22 80 100 110 130 Dimensions other than the above are the same as standard

Compact Hydraulic Cylinder

11 100 20 25 98 28 57.5 89 26 17.5 depth 13.5 77 11 Rc3/8 112.5 100 M20 x 2.5 156 6.5 26 12 107 24 30 117 29 67.5 95 26 17.5 depth 13.5 94 11 Rc3/8 132.5 Rod end male threads (mm) H C D L K X Bore size (mm) 20 M8 x 1.25 15.5 10 23 8 18 32 M14 x 1.5 27 16 38.5 14 30 40 M14 x 1.5 27 16 38.5 14 30 M18 x 1.5 50 32 20 46 18 35 M18 x 1.5 63 32 20 46 18 35 M22 x 1.5 37 25 51 22 80 40 M26 x 1.5

RZQ

22.4 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 45 33 14 40 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 50 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 63 130 102 39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5

3 Position Cylinder Series RZQ

22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 14 32 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 40 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 50 45 M16 x 2.0 84 130 102 21 77 39.5 16.5 15 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 36.5 21.5 18 4.5

CE

20 18 36 10 57.5 195.2 7 11.2 6.6 59 33 158.4 71.5 64 79.5 78 5.5 76.5 8 65.5 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 84.5 46 177.4 97 95 109.5 113 9 107 9 91 80 92 108 60 203 238 14 224 20 30 22 44 14 89.5 Dimensions for auto switch model D-F79W. 10-12-25 25 Series

CE

20 18 36 10 57.5 195.2 7 11.2 6.6 59 33 158.4 71.5 64 79.5 78 5.5 76.5 8 65.5 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 84.5 46 177.4 97 95 109.5 113 9 107 9 91 80 92 108 60 203 238 14 224 20 30 22 44 14 89.5 Dimensions for auto switch model D-F79W. 10-12-25 25 Series

MXW Series Long Stroke Slide Table

14 14 14 V 121 141 166 191 216 A 56.5 31.5 31.5 31.5 31.5 31.5 B 138.5 163.5 188.5 213.5 238.5 263.5 5.5 MXW16 W 42.5 17.5 17.5 17.5 17.5 17.5 V 152.5 177.5 202.5 227.5 252.5 277.5 A 65.5 40.5 40.5 40.5 40.5 40.5 40.5 B 171.5 196.5 221.5 246.5 271.5 296.5 321.5 7 MXW20 W 51.5 26.5 26.5 26.5 26.5 26.5 26.5 V 185.5 210.5 235.5 260.5 285.5 310.5 335.5 A 83.5 71.5 41.5 41.5

LEY-OM007

25 LE-D-2-2 32 LEY-L032 LEY-F032 LEY-D032 32 LE-D-2-3 1 2 C /P.46 7.4 /P.47 7.5 -12- 3.

Modular Type Lubricators Series AL

AL800 AL900 AL800 AL900 12316 123156 12314PA 123413A-1(12) 123413A-2(14) 123417A(12) 123416A(14) 123128PA 124232A 123321-1A 123321-4A 12318 123111 113136 KA00466 123032A 123058 C4SL C4SL-2 C4SL-3 C4SL-6 C4LL-8 800147AP 800147A-S1P 800147A-S2P Standard -6 Aluminum casted Aluminum die-casted Aluminum die-casted Body Housing Platinum silver painted Platinum silver painted 1 2 Polycarbonate Nylon

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

MXU

30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25 0.190 0.165 0.464 52.5 30 4.

MXU

37.5 14 20 10 50.5 51 42.5 14 20 15 55.5 56 47.5 24 25 20 60.5 61 52.5 24 30 25 65.5 66 57.5 34 40 30 70.5 71 62.5 34 40 35 8-3-6 7 Compact Slide Series MXU Dimensions: MXU10 MX MTS MY CY MG CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5 14 14 10 57.5 58 46.5 14 19 14 62.5 63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2