CY1F

17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P

3 Position Cylinder Series RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

VCL

VA VCL40: 19/16 VA LVA VCL40: 13 VA Holding LVH Note 1) When the ambient temperature or fluid temperature is 60C or more, use high temperature specifications (class H coil).

NCA1

-93 NCA325-13-Q6311 5008-131 10 Tie Rod Nut Carbon steel NCA150-13-Q6308 5008-93 11 Retaining Ring Carbon steel NCA150-31-Q6308 NCA150-31-Q6308 NCA325-31-Q6311 12 Rod Seal Retainer Resin NCA150-31-Q6308 13* Cushion Seal NBR Available only as an Assembled Item.

Pin Clamp Cylinder Series CKQ/CLKQ

A 13 48 B CKQ CLKQ B B B B B B A 14 49 B B A 14 49 B A 14 49 B A 7 42 A 10 45 A 11.5 46.5 A 11 46 19 or more 17 or more 33 or more 27 or more 28 or more 27 or more 22 or more 30 or more 22 or more 17 or more 54 or more 52 or more Auto Switch Mounting Height Atmosphere General use Mounting Rail mounting Rail mounting Welding Direct mounting D-A7 D-A80 D-A7H D-A80H D-F7BAL D-F7W D-J79W D-F7NTL

42

Note) 13 13 () (+) Orange Red VFS Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common. VFR Special Wiring Specifications 1 VQ7 14 2 15 2. Wiring specifications Double wiring (connected to SOL. A and SOL. B) is used for the internal wiring of each station regardless of valve and option types.

SFOD-OMT0009CN

DRIVE ON No.Bit No. 11 OUT2 DRIVE ON 31 OUT3 12 OUT4 32 OUT5 (1) RESET ON OFF (2) 13 OUT6 33 OUT7 14 OUT8 ON (BUSY1BUSY4OR) Bit No. BUSY 34 (OUT9) 3) ON (AREA1AREA4AND) Bit No.

CHKD/CHKG

15 17 18 21.5 23.5 31.5 B 19 20 21.5 23.5 27.5 31 40 49.5 B 16.5 18.5 22.5 26 35 44.5 B 15 16 17.5 19.5 27 36 45.5 B 16.5 18.5 22.5 26 35 44.5 A 10 12 13 16.5 18.5 26.5 A 8 9 11 13 17.5 19.5 27.5 A 10 12 13 16.5 18.5 26.5 20 25 32 40 50 63 80 100 Note 1) D-A9/A9V models cannot be mounted on 50.

HRX-OM-X071

9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels . 9-16 9.8.1 Locations of Hazard Labels . 9-16 9.9 Daily Check . 9-17 Chapter 10 Product Warranty . 10-1 HRR Series HRX-OM-X071

Compact manifold regulator ARM5 Series

L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

Booster Regulator/Air Tank

PVQ VY1 VBA VBAT VBA VBAT AP100 Booster Regulator/VBA Series Air Tank/VBAT Series 1007 Booster Regulator VBA Series Reduced by 13 dB (A) compared with the current model compared with the current model Reduced by 13 dB (A) Improved service life that of the current model Doubled that of the current model Doubled Reduced noise Floating piston structure Grease retaining groove Metal noise

HRX-OM-W060

(This wiring is an example.) 13 25 14 1 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie.

Series KV2 Fittings

(g) Bag/Box Quantity MA MB L1 L2 L3 P A* 5/8 1/2 1/2 1/2 5/8 5/8 1/4 3/8 3/8 3/8 3/8 1/2 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 1/2-14 KV2Z07-15-37S KV2Z11-13-35S KV2Z11-13-36S1 KV2Z11-13-37S1 KV2Z11-15-37S KV2Z13-15-37S 25.40 25.40 25.40 25.40 25.40 25.40 28.9 23.9 23.9 23.9 28.9 28.9 29.8 29.8 29.8 29.8 29.8 29.8 37.9 34.5 34.5 34.5 37.3 36.4 33.7 27.2 28.2 31.2 33.7 33.7 28.9 23.9 23.9 23.9

CJP

Mounting nut (Refer to page 6-2-13.)

CJP

Mounting nut (Refer to page 6-2-13.)

Thermo-chiller/Rack Mount Type

, Ion exchange resin*13 Power supply Single-phase 200 to 230 VAC, 50/60 Hz, Allowable voltage range 10%*15 Circuit protector [A] 10 Applicable earth leakage breaker capacity8 Rated current: 10 A Sensitivity current: 30 mA Electrical system Cable quantity x Size (Including grounding cable)16 3 cores x 14 AWG (3 cores x 2.0 mm2) Rated operating current (50/60 Hz)17 [A] 2.5/3.0 For Option T1

SFOD-OMT0005CN

(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

IDX-OM-W017

V 13 V V 12-2 13-1 1. 1 2 2. 3.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

) (7.5) (45.9) (48) 24 M4 x 0.7, thread depth 8 (F.G. terminal) Auto switch groove (1 row per side) 6.5 38.5 48 6 B D x 120 (= E) 10 120 F 3H9 (+0.025 0 ) depth 35 Motor mounting position: Right side parallel Motor mounting position: Left side parallel 106 4 106 48 5 3H9 (+0.025 0 ) depth 35 3H9 (+0.025 0 ) depth 35 8 46 46 47 47 H G *1 When mounting the actuator using the body mounting