REC

1000 22 1 4 51 M32 X 2 40 181 10 11 53 53 77 236.5 247 200 to 1000 26.5 4.9-13 Series REC Construction !

REC

Up to 1000 NN P RR S U Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 9 146 14 217 226 25 M26 x 1.5 Up to 700 1/8 9 146 14 221 230 32 M26 x 1.5 Up to 1000 1/8 9 159 14 234 243 40 M32 x 2 Up to 1000 1/4 11 181 18 270 281 Double clevis style: RECD 2-RcP NN CDH10 +0.058 0 G Plugged (M5 x 0.8) G H1 Standard port Width across flats B1 I Eh8 D MM AL CX0.1 0.2 K A U CZ N N F S + Stroke

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

ACB ACB SYJ 2-4.5 (Mounting hole) SX 57.5 VK 52.5 51 3(R) 1(P) 3(R) 1(P) VZ 9 16 32 17 4 VF VFR 10 4 10 P=11 L2 VP7 36.5 41.5 L1 VP4 45 M plug connector (M) VQ D side U side VQ4 Stations 1 2 3 4 5 n Direct manual override VQZ (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective depth 7 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 3.5 through M5 x 0.8 32 0.5 15.5 6 25 Rod end nut 9 Flat washer 9.2 10.5 10 4 4 5 32 + Stroke 14 15.5 8 4 46 + Stroke 25 16 Lead wire minimum bending radius 10 Auto switch 17.5 5 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

MHY2/MHW2

4-M4 X 0.7 Depth 5 (Thread for mounting attachment) M5 X 0.8 (Finger closing port) MHQ Auto switch mounting groove position MHL2 MHR O 41 30 18 12 S MHK 4 4 5 MHS M5 X 0.8 (Finger opening port) 20 9 6.45 MHC2 6 MHT2 MHW2-20D1 MHY2 Right angle finger MHW2 MRHQ Auto switch 31 15 10 11 14 5 28 16 4-M4 X 0.7 (Thread for mounting attachment) 41 MHW2-20D.SMHW2, #1 MHW2-20D1.SMHW2, #6 2.8-19 Series

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 2-M5 x 0.8 4(A), 2(B) port Direct manual override Indicator light 0.5 0.5 4 (11) 11 2 5.5 0.6 0.6 15 5.3 5.3 13 34 33 25.5 29 6 3 L plug connector (L) 21.5 4 2-3.5 mounting hole 28.5 49 50.5 2-M5 x 0.8 1(P), 3(R) port 3 1 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

HRX-OM-X084

9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type) . 9-14 9.7.1 HRR010-W-10/20. 9-14 9.8 Types of Hazard Labels . 9-15 9.8.1 Locations of Hazard Labels . 9-15 9.9 Daily Check . 9-16 Chapter 10 Product Warranty

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 11 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 11 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 11 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 11 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162

HRX-OM-W060

Refer to Table 5.4-11 Offset setting for details. (1) (2) Offset setting Table 5.4-11 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

HRX-OM-X071

9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

Soft Start-up Valve

5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 9 AV2000-A/3000-A/4000-A/5000-A Series Specific Product Precautions 1 Be sure to read this before handling the products

Guide Table Series MGF ø40, ø63, ø100 1

Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places) 73 146 8-23-11 12 Series MGF Dimensions: 100 MGF100 4-M12 x 1.75 through 170 200 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside