Pressure Gauge Guide

G E M 10 01 C 46 Attachment (Cover ring assembly) 5 Symbol Specifications Connection thread Size M5 x 0.8 x 5 Pressure gauge Without cover ring assembly Nil Size Symbol Clear cover has no protrusion. (Clear cover is irremovable.) Outside diameter C Symbol 46 42.5 01 R 1 8 02 R 1 4 Clear cover has protrusion. (Clear cover is removable.)

Slider Type/Ball Bushing Bearing

54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5

XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

3 Port Air Operated Valve Series SYJA300

x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

Table of Contents

With auto switch Note) 5 stroke (CU16-5D): 14.5 mm Bore size (mm) R T S 33 36 30 36 40 42 Z 46 52 46 55 63 69 S 33 36 40 46 50 52 Z 46 52 56 65 73 79 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 7 Free Mount Cylinder Double Acting, Single Rod Series CU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

ZR

PE port Vacuum release pressure port M5 PD port Ejector unit Non-locking push type Manual override EXH PE PE 109 PD PD PD PD 80.8 81.5 PS PS PV PV 61.5 52 50 13.5 PS PD 42 35.5 33 31.5 28 PV 17 16.5 PV PV Release flow rate adjustment needle Vacuum release pressure port M5 PD port Pilot valve supply pressure port M5 PS port 3 2.5 1 1.5 7.5 7.5 4.5 2-Rc 1/2 EXH port 2-M5 PD port Air supply

Intrinsically Safe Valve

) 21 4 Insulator: Black () B A 23 PE 38 46 A B X Insulator: Red (+) Manual override EB EA P 21.5 21 69 6.4 67.2 123.3 M5 x 0.8 (Pilot EXH port) 71.2 (E-type) L (Lead wire length) 0.3 mm2 1.55 26.5 11.5 13.5 20.5 20.5 5 x 3/8", 1/4" (Piping port) 33 L-type plug connector with cover (LL) 53-SY7140(R)-LL02 03 L (Lead wire length) 118.2 Insulator: Red (+) Insulator:

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A RR1 A1 L1 MM RR1 U1 NZ L L1 E1 10 12 16 20 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.048 0 5 6.5 8 10 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 10 12 16 20 12 16 20 25 12 16 20 25 5 6.4 8 10 21.5 32 34 41 6 8 8.5 10.5 16 25 25 30 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 6.3 8.1 10.3 12.8 7 14 11.5 14 21.5 6 11 8.5 16 21 25 30 M5 x 0.8 6.3 8.1 7 10 10 14.6 I-G012 I-Z015A I-G02 I-G03 Y-G012

PSxx-OMU0005CN

M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2 LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OMU0005CN-C digit() 1digit=1kPa 1,2,3,,99,100 1kPa F.S.() -0.100 1.000[MPa]F.S.=1.000(-0.100)=1.100[

smcmaintenancepartslist

Model Hexagon socket head cap screw Fe Ni Tightening torque (Nm) Model Hexagon socket head cap screw Fe Ni Tightening torque (Nm) MXS6 MXQ6 0.5 0.5 M2.5 x 6 M2.5 x 6 MXS8 MXQ8 0.9 0.9 M3 x 6 M3 x 6 MXS12 MXQ12 2.1 2.1 M4 x 10 M4 x 8 MXS16 MXQ16 M5 x 12 M5 x 10 4.3 4.3 MXS20 MXQ20 M5 x 14 M5 x 16 MXS25 MXQ25 M6 x 18 6.9 M6 x 16 6.9 A level difference is set to t No level difference with a

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

A 23 23 E P B A X Insulation Red (+) 46 EB EA P 21 69 21.5 M5 x 0.8 (Pilot EXH. port) 92.6 44.1 67.2 180.8 L 71.2 (For E type) (Lead wire length) 1.55 0.3 mm2 26.5 13.5 11.5 20.5 20.5 5 x 3/8", 1/4" (Piping ports) 33 96.9 L plug connector with cover (LL) 3 02 03 52-SY7440 (R) -LL5 L 170.6 (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 41.7

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Series IDG

Note 5) When very clean air is required, refer to page 46 "Precautions on Design", item 2.

Table of Contents

Refer to dimensions on pages 14-20-46 to 14-20-47 for details. Sight glass Tempered glass AMF850 is aluminum casted. Replacement Parts AMF450 Model No.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)