ZP

22 34.5 41 51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Sine Cylinder Series REC

Y-020B Y-032B Y-040B Size 0.2 0.1 9 Type C9 for shaft 46 16 20 25 36 M8 x 1.25 9 18 5 14 CDP-1 0.2 0.1 9 Type C9 for shaft 48 18 20 25 38 9 18 5 14 M10 x 1.25 MQ CDP-1 0.3 0.1 16 3 x 18 l 68 22 24 55 12 38 13 25 49.7 M14 x 1.5 CDP-3 Knuckle pins and retaining rings (cotter pins for 40) are included.

Sine Cylinder Series REC

Y-020B Y-032B Y-040B Size 0.2 0.1 9 Type C9 for shaft 46 16 20 25 36 M8 x 1.25 9 18 5 14 CDP-1 0.2 0.1 9 Type C9 for shaft 48 18 20 25 38 9 18 5 14 M10 x 1.25 MQ CDP-1 0.3 0.1 16 3 x 18 l 68 22 24 55 12 38 13 25 49.7 M14 x 1.5 CDP-3 Knuckle pins and retaining rings (cotter pins for 40) are included.

Sine Cylinder Series REC

Y-020B Y-032B Y-040B Size 0.2 0.1 9 Type C9 for shaft 46 16 20 25 36 M8 x 1.25 9 18 5 14 CDP-1 0.2 0.1 9 Type C9 for shaft 48 18 20 25 38 9 18 5 14 M10 x 1.25 MQ CDP-1 0.3 0.1 16 3 x 18 l 68 22 24 55 12 38 13 25 49.7 M14 x 1.5 CDP-3 Knuckle pins and retaining rings (cotter pins for 40) are included.

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

MNB

65 120.5 58.5 15 46.5 104.5 15.5 19 40 32 20 14 90 63 to 600 35 27 11 1/4 17.5 18 75 134.5 68 12 56.5 119.5 16.5 23 45 37 25 20 102 80 to 750 40 32 13 1/4 22 22 95 169 81 18 72 150 19 33 45 37 30 20 116 100 to 750 40 41 16 1/4 25 26 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H VA W Bore size (mm) 34 205 32 88.5 18.3 M6 x 1.0 4 6 27 154 6.5 4 M10 x 1.25 1/8 37 47 13

Table of Contents

0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31 5.3 18 [9.7]

CHKD/CHKG

86 9 51 18 94 14 19 15 M12 x 1.75 7 6.6 33 16 79 14 depth 8.6 98 55 11 22.4 108 23 19 20 M16 x 2 7 9 37 20 90 111 14 17.5 depth 10.8 60 28 126 24 27 24 M20 x 2.5 8 11 43 24 104 130 16 20 depth 13 67 146 35.5 30 33 M27 x 3 33 9 13 52 30 121 23 depth 15.2 151 18 78 45 172 41 38 36 M30 x 3.5 14 15 63 35 144 26 depth 17.5 179 22 96 56 208 50 43 45 M39 x 4 21 17 76 40 174 Note 1) Body dimensions

AIR COMBINATION

57.2 35 7 14 4 41 AC30-B 1/8 167.4 115.1 38.1 30 55.1 80 29.4 3.5 41 57.2 35 7 14 4 41 AC40-B 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 1/43/81/2 AC40-06-B 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 3/4 AC50-B 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 3/41 AC55-B 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

VHK

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 1 27 22 26 41 3.5 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

Modular F.R.L. Units

41 50 50 43.2 57.2 57.2 75.2 80.2 24 35 35 40 40 33 5.5 7 7 9 9 12 14 14 18 18 3.5 4 4 5 5 29 41 41 48 48 Model Semi-standard specifications Optional specifications Round type pressure gauge Round type pressure gauge (with color zone) With auto drain With barb fitting With drain guide B 91.4 121.9 121.9 153.9 155.9 H 37.5 37.5 37.5 42.5 42.5 J 58.5 58.5 65 72 72 H 37.5 37.5 37.5 42.5 42.5

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

MGP

A B C 50 56 72 82 98 106 130 142 180 210 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 M4 x 0.7 D By-pass port dia. M5 x 0.8 M5 x 0.8 C 0.2 M6 x 1.0 [Bottom mount] M8 x 1.25 B 0.2 B Pin hole M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 A 0.2 3.

Basic type / Direct mount type Series CY3B/CY3R

HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CYP QW 14 18 17 20 26 34 48 60 PW 26 32 38 43 54 64 82 94 Q 68 84 95 105 116 134 159 171 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6

VQ5000

2(B) port 59.5 53 4 (A) port17.5 13.5 2(B) port 59.5 4(A) port 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 Rc 1/8 PE port Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 External

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Specified layout (Up to 18 solenoids possible.) 18 18 18 stations 18 stations Note 1) Double wiring specifications: Single, double, 3 and 4 position solenoid valves can be used on all manifold stations. Use of a single solenoid will result in an unused control signal. If this is not desired, order with a specified layout.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

in setup software (MR Configurator2TM) . 4-15 4.5.2 Motor-less operation in PC or PLCetc . 4-18 5.

MNB

65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169 Up to 750 18 20 150 19 33 37 2089 100 16 30 25 40 41 1/4 55 26 114 96 116 189 Up to 750 20 20 170 19 37.5 37 Data T V VA W ZZ MB K MM N P S GR GE GF J Q H Bore size (mm) 32 6.5 6 27 4 205 M10 x 1.25 37 13 6.5