Base Mounted Metal Seal/Rubber Seal Series VQ

M5 fittings for M5 thread are attached without being incorporated.

Rotary Gripper Series MRHQ

A R I 18 6 21 9 5 5 34 23 Side A Side B 726 Rotary Gripper Series MRHQ Dimensions MRHQ16 A B 41 50 66.5 4 x M5 x 0.8 depth 8 30 0 -0.062 47h9 41 +2.2 0.2 0 -0.1 5 20.9 opened depth 6 +0.03 0 3 x 4H9 M5 x 0.8 4 x M3 x 0.5 0 -0.1 8 0 0.7 14.9 closed (attachment mounting screw ) Finger closing port (one each on three sides) 4 7 4 x M5 x 0.8 depth 8 15 Max. 7.3 18.8 (two on opposite side) 42

Clamp Cylinder with Lock

1 o i w q $7 $8 @4 @3 @5 @1 t 40 Description Component Parts No. 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Qty 1 1 1 1 1 1 1 1 1 1 1 2 1 4 1 1 1 1 1 2 2 4(5) 1 2 Note Zinc chromated Zinc chromated Zinc chromated Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Copper alloy

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-45 4 Series AS-FG Construction: Universal Type Meter-out type M5 type U10/32 type AS3301FG-02 Meter-in type M5 type U10/32 type AS3311FG-02 Component Parts No.

Digital Flow Switch (Integrated display type)

13.6 2.7 depth 14 PF3W720 3/8, 1/2 78 54 30 66 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 PF3W740 1/2, 3/4 98 71 38 68 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36

CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-20. 8-26-19 18 Series CXWM 16 With End Lock: CXWM1625 stroke R 2 x 2-M5 x 0.8 thread depth 10 2-M5 x 0.8 2 x 2-5H7 depth 6 +0.012 0 Cylinder port M8 x 10 Adjusting bolt 2-M5 x 0.8 Hexagon socket head cap plug 4-4.3 through 4-8 counterbore depth 4.5 M8 x 1.0 2-RB0805 shock absorber (Single housing installed) 2-M5 x 0.8 plug (M-5P) (Cylinder port

HRX-OM-Q026

Table 3-1 Weight of the product Weight kg Model Standard model Option A Option T HRSH250/300-AApprox. 280 [Standard model] + 24 None HRSH150/200-AApprox. 215 [Standard model] + 18 None HRSH100-AApprox. 180 [Standard model] + 18 None HRSH150/200/250-WApprox. 180 [Standard model] + 18 [Standard model] + 22 HRSH100-WApprox. 150 [Standard model] + 18 [Standard model] + 52 3.1 Transport HRSH Series

VK300

Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

2–4

NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 14 8 80 41 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7 Compact Cylinder/Guide Rod

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

Hygienic Design Cylinder Series HY

32 12.5 13.5 M5 x 0.8 M5 x 0.8 20, 30, 50, 100, 150, 200 DBore size QA PB PC PD QB RA RB RC RD RE RF TA TB TC TD UA UB UC UD -X 20 25 32.5 34.5 14 15 28.5 34 7 8.5 68.5 78.5 39 41.5 9.5 9.5 32 38 5.4 5.4 M6 x 1 M6 x 1 12 12 24 29 72 80 M5 x 0.8 M6 x 1 13 14.5 18 26 70 78 M5 x 0.8 M6 x 1 10 12 Individual -X Note 1) Refer to page 888 for details about the optional parts (plug bolt).

48

Weight [g] D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.The auto switch may be damaged if a screw other than the one supplied is used. 5 68 68 63 How to Order D-M9 N Auto Switch Internal Circuit D-M9N(V) Series Lead wire length Nil M L Z 0.5

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

Heavy Duty Stopper Cylinder Series RSH/RS1H

Double acting spring type Single acting RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS Double acting RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS RSH-R20 RSH-R32 RS1H-R50 RS1H-R63 RS1H-R80 Set of items 37 to 41 in above table Set of items 37 to 41 in above table (not including 39) The seal kits for 20 to 32 consist of items 37 to 41 and those for 50 to 80 consist of items 37 to 41

Air Cylinder Series MB

Bore size (mm) Part no. l Applicable cotter pin m Dd9 L d H B C 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03Note 1) 10 14 22 25 44 36 4 4.5 5 5 3 4 4 4 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 6 8 11 13 16 16 17 22 27 32 41 41 19.6 25.4 31.2

VK300

Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

Compact Cylinder

27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory

Escapements Series MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 185 155 125 MIS12-30 MIS12-20 18 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

Series CE1

200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1 62 30 14 Rc(PT) 1/4 76.5 49 50 6.6 M8 X 1.25 61.5 35 19 Rc(PT) 1/4 89.5 49 60 9 M10 X 1.5 64 35 19 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto switch model D-F79W. 4.4-12

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51