PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 20 Type Manifold Specifications for 20 Type Port size Flow characteristics SS5Y5-20 52-SY520 SS5Y7-20 Model 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model 52-SY720 4,2 Applicable valve (A,B) c[dm3/(sbar)] c[dm3/(sbar)] Cv b b Cv (P,EA,EB) Single base / B mounting Manifold style SS5Y5-20 1/4 C8 1.90 0.28 0.53 0.20 0.48 2.20 1 (SUP) / 3/5 (EXH) Common SUP / Common

ZQ-OM01301

60 -60 40 Air consumption -40 30 -40 Suction flow rate 20 -20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 Supply pressure [MPa] Suction flow rate [L/min (AMR) ] The flow characteristics curve shows the relationship between the vacuum pressure and the suction flow of the ejector.

Electric Actuator

25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 17 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor

AC Servo Motor Driver

50 20 50 8 16 8.

Step Motor Controller

Refer to the dimensions on page 20 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 40 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 1.3376 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 0.62744 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 1.54323 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, MFLD, BASE MOUNT W/FITTINGS, VALVE, VV5QZ* MANIFOLD VQZ 4/5-PORT, UJ, VV5QZ* BUILT IN FITTING ( 2.04714 lb

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

Electric Actuator

25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 1.35 (6) 1.80 (8) 4 6 1.35 (6) 1.80 (8) 4 6 1.57 (7) 16 (32) 24 (48) 32 (64) 40 (80) 1.24 (5.5) 0.79 (3.5) 4 6 8 3.15 (14) 3.15 (14) 6.29 (28) 4.95 (22) 20.2 (90) 3.82 (17) 10 14 22 30 10 14 27.0 (120) 40.5 (180) 8.99 (40) 6.29 (28) 6.29 (28) 8.99 (40) 29.2 (130) 12 29.2 (130) 47.2 (210) Note) ( ): Long stroke Features 8 Controller Controller

LEC-OM02904

DC24V 2. 20 3. 4. 5. 6. 7. 8.

VKF300

) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

DIN terminal: VKF334-D-01 Base mounted Grommet: VKF334-G-01 33.5 16.7 26 4 Manual override (Non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 MAX.10 2-4.3 (Mounting hole) Applicable cable O.D. 4 to 6.5 48.5 300 26 4 Pg.7 3 27 (Lead wire length) Manual override (Non-locking) A 20.5 18.5 mPm 3 32 59 68 78 70.5 43.5 12 7.5 P R 7.5 12 43.5 13.5 11 33.5 P R 13.5 11 Refer to grommet type for other

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84

SY3000/5000/7000/9000

One-touch fitting for 4 C4 2 position double SY3000 One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 For DC One-touch fitting for 6 C6 SY5000 5 24 VDC 6 12 VDC One-touch fitting for 8 C8 SY9000 has no bracket.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

Except for M5 N3 N7 N3 N7 N9 N9 N11 N9 N11 One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting 5 32" 10-SY3000 Made to Order 3 position pressure center 1 4" 2(B) (A)4 5 32" Main valve fluororubber (Refer to page 169.)

Information

points/32 points)/(Remote register 4 words/4 words) 2 stations occupied (Remote I/O 64 points/64 points)/(Remote register 8 words/8 words) Up to 42 (when 1 station is occupied by 1 driver), Up to 32 (when 2 stations are occupied by 1 driver), when there are only remote device stations.