C76

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S + Stroke ZZ + Stroke (mm) LD AM B C D EE G1 H K KK L LH LX N1 N2 NB NDh8 S SW WH XB ZZ 116 Bore 26 0 0.033 32 40 20 24 42.3 52.3 12 14 37.5 46.5 G1 /8 G1 /4 22 27 36 40 10 12 47 58.5 21 26 30 38 29 38 17 22 34.5 42.5 80 105 17 19 16 16 28 31 M10 x 1.5 9, 14 depth of counter

Dual Speed Controller with One-touch Fitting Series ASD

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 29.4 12 17.5 12.9 25.5 28.6 25.8 10 7.8 9.6 11.7 M5 x 0.8 28.3 8 25 22.2 6 ASD230F-M5-06 11.6 32.5 13 13.7 20.6 6 34.6 ASD330F-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 11.8 10.6 14.2 R 1/8 12 32.1 27.1 15.8 8 33.9 ASD330F-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430F-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430F-02-08S 36.7 41.7

AC

SAC2000, #1 + #2 + #14 SAC2503, #1 + #2 + #14 SAC2503, #1 + #2 + #14 SAC4000, #1 + #2 + #14 SAC5000, #1 + #2 + #14 SAC6000, #1 + #2 + #14 AC1020 AC2020 AC2520 AC3020 AC4020 AC5020, 5520 AC6020 1.1-12 Air Combination Air Filter + Mist Separator + Regulator AC2030 to 4030 JIS symbol AC2030 AC3030 AC4030 Air filter Regulator Mist separator Standard Specifications AC2030 AC2530 AC3030 AC4030

HRX-OM-S004

Circulating fluid temperature: 31 This product Users equipment Serial communication Fluid discharge temperature: 31 Circulating fluid display temperature Heat 31 dissipation 1 Circulating fluid set temperature 30 Offset temperature 30 1 HRS Series 5.9Offset function 5-23 HRX-OM-S004 Chapter 5 Display and setting of various functions When only the "displayed circulating fluid temperature

Rotary Table/Vane Style Series MSU

MSUA1 MSUA1-S,SE C 8 x M3 x 0.5 depth 5 51 31 38 23.5 B 25 4 x M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (Positioning pin hole) 35h9 0 0.062 22.5 3 x 3H9 depth 3 +0.025 0 +0.043 0 17 H9 ( A , B , C ) 27 2.5 2 2 x 4.5 through 12.5 37 8 6.5 10.3 6.5 31 4.2 2 31.5 2 36h9 0 0.062 27 16 9 5 4.5 Angle adjustment bolt 2 x 4.5 through 2 x M3 x 0.5 1 5 Adjustment: Max. 7.5 B port

ZSE30A(F)/ISE30A

0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 40 ZSE30A(F)/ISE30A Series 2-Color Display High-Precision Digital Pressure Switch The F in ( ) shows the function code number.

Mechanically Jointed Rodless Cylinder Series MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2C 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Compact Slide Series MXH

x 0.5 Depth 6.5 LA LB 8 MXS MXQ Guide rail width 5 3 x M4 x 0.7 through Bottom hole dia 3.3 6 x 6 counterbore depth 3.3 4 x M3 x 0.5 Depth 5.5 Plug for port (Hexagon socket head set screw) 4 x M5 x 0.8 x 4 l 2 x M5 x 0.8 6.5 5 MXF 4 x M3 x 0.5 Depth 4.8 MXW 17 38 39 MXJ 19 10 18 19 18 15 MXP 5 5.5 10 5.5 5.5 MXY NS 4 9 10.5 8.5 31 + Stroke MTS 39.5 + Stroke 16 4 x M3 x 0.5 Depth 4.8 10 5

SFOD-OMT0009CN

) . 28 1 No.SFOD-OMT0009CN-B (2) . 29 (3) . 30 5. . 31 5.1 . 31 (1) C PWR . 31 (2) M PWR . 31 (3) CI . 32 5.2 . 33 (1) . 33 (2) . 34 6.

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

ZR

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

HRX-OM-T002

Flow switch Blue(DC COM) Brown(DC 24V) Brown (DC 24V) Terminal No. 14 6 Terminal No. Flow switch 5 Terminal No. Blue(DC COM) 11 Terminal No. Black (Output1) 3 Terminal No. Black(Output1) Fig. 3-14 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue(DC COM) Brown (DC 24V) Brown(DC 24V) 14 Terminal No. Blue(DC COM) 6 Terminal No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

6.5 16.5 6.5 4 45 14 62 29 14.5 M3 7 4.5 M4 x 0.7 34 26 3 6 20.5 8 4 51 17 70 29 14.5 M4 8 5.5 M5 x 0.8 39 31 3 7 21 9.5 4.5 62.5 22 76 34 17 M5 10 6.5 M6 x 1 50 41 3 7.5 25.5 9.5 7.5 74.5 28 90 39 19.5 M5 10 6.5 M6 x 1 60 45 3 7.5 Note 1) FE, FF and HB provide a clearance of 1mm between the body and the floating joint, but do not consider dead weight deflection of the cylinder

Escapements Series MIW/MIS

Note 2) Refer to page 14 for lead wire length.

HRX-OM-W032

The displayed circulating fluid temperature is the fluid temperature discharged from the thermo-chiller (31 oC).

0.4

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 420 SV SYJ SZ VF VP4 VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 421 Construction

Compact

Note 10) A reference value for correcting an error in reciprocal operation. 13 800 14 900 15 1000 Switch and Acceleration Note) Table 2 Switch no. Acceleration [mm/s2] 0 250 1 500 2 1000 3 1500 4 2000 5 2500 6 3000 7 4000 8 5000 9 6000 10 7500 11 10 12 12500 13 15000 14 17500 15 20 Note) The factory default setting for the switch is No.0.

Multi-channel Digital Sensor Monitor ( compatible)

Mode 27 Simple Setting Mode 29 Function Selection Mode 31 Function selection mode 31 Default setting 31 F 0 Differential pressure check mode, pressure range, display unit 33 F 1 Setting of OUT1 39 F 2 Setting of OUT2 42 F 3 Digital filter setting 44 F 4 Auto-preset function 45 F 6 Fine adjustment of display value 47 F10 Sub display setting 48 F11 Display resolution setting 54 F14 Zero cut-off

Ionizer

31 22 4.5 2 x 5.4 22 4.5 32 20 Ionizer 27 2 100 Hexagon socket head cap screw M4 x 6 (Accessory) 6 Ionizer full length (L) Angle adjustable (90) (31) 12 2 Angle adjustment range is 45.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60