ML1C

Applicable bore Shock absorber model ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 Side Support Side support A 2 x G E E F 2 x H A B Side support B 2 x J A B (mm) A B C D E F G H J Part no.

PA300/500/700

15 0.29 0.23 3.1 3.8 2.9 3.8 12 14 0.36 0.25 VPA742 (Body ported) 0.64 Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

VQ

Dimensions Grommet VQ1l0l-lGlM5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 Mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking style manual override 30.7 28 11 A P (4.1) (5.9) (5.9) 7 5 5 5 4.9 9.7 4.9 3-M5 (M3) (18.1) ( ): M3 Broken line: locking style manual override 2.9-8 Series VQ100 Dimensions L plug connector VQ1l0l-lLlM5 (M3) (37.8) 31.4 Manual override 6.1 4.9 12.4

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

PEEK

N.C. 9 LVM20R4 11 11 2 depth 3 2 depth 3 5 5 2 x 5.7 3 x 5.7 6.8 6.8 6.8 LVM205R LVM20R3 Recommended interface dimensions Surface roughness = Rz3.2 or less Surface roughness = Rz3.2 or less 31 0.1 31 0.1 15.5 0.1 15.5 0.1 11 2 x M3 x 0.5 Effective thread length 4.5 or more 6.8 0.1 6.8 0.1 6.8 0.1 2 x M3 x 0.5 Effective thread length 4.5 or more 6.5 0.1 When using a positioning pin

Miniature Fittings M3, R(PT) 1/8, M5 Series M

3 15.2 12 14 12 23 23.3 30.2 23.5 15.7 16 17 15.7 16 17 15.7 17 15.7 18.8 17 15.7 18.8 19 17.7 18.8 19 17.7 18.8 30.2 23.5 4 5 24.3 23 23.3 24.3 23 24.3 23 27.3 24.3 23 27.3 27.5 26.2 27.3 27.5 26.2 27.3 19 30.2 23.5 8 16.2 12 14 16 30.2 23.5 5 6 25 30.2 23.5 27 12 31.8 24.5 6.5 5.5 34 14 33.8 26.5 17 18.8 10 30 31.8 24.5 12 7.5 6.5 41 31 33.8 26.5 14 8 7 44 19 14 19.3 12 34.3 27.5 32 9

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

EX500

Position indicator LED M3 Ground terminal Ground terminal Communication connector (M12, 5 pins, socket reverse key) EX500 SERIES GATEWAY UNIT EX500 SERIES GATEWAY UNIT BUS MS IN PE PE RUN NS SOL BUS Power source connector Note 1) SOL BF DIA 68 88 88 68 OUT 12 12 Power source connector Note 1) 24VDC COM A COM B COM C COM D 24VDC COM A COM B COM C COM D Branch connector Note 2) Marker: BN-WH

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

KK/KK13

Body size Part no. 4 6 8 10 6 8 10 12 12 16 4 6 8 10 6 8 10 12 12 16 KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Applicable tubing O.D. mm Applicable tubing O.D. mm Body size Part no.

IDX-OM-W011

R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E/6E/8E/11E/15E1-10-R IDF15E1-20-R IDF4E/6E/8E/11E-20-R (A) 10 5 (mA) 30 12-3 M5 9.5mm 2 1.25mm L ,N N L () () IDF Series 12-1 12 1 IDX-OM-W011 12 R AC100V M4 () AC200V (M3) 12-4 () () ONOFF 12-5 1-1 IDF Series 12-4 12 2 IDX-OM-W011 13.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Fittings & Tubing Air Cylinders Rotary Actuators 3 x M3 x 0.5 thread depth 6 25 M3 x 0.5 Finger closing port P.C.D.24 25 (Mounting thread) M3 x 0.5 Finger opening port 44 31 0 9h9-0.036 21.5 1 5 16 19 (36.5) 33.5 6.1 M3 x 0.5 thread depth 4 Vacuum suction port 2 4 4 12 2 3e8-0.028 -0.014 Open: 11, Closed: 8 8-0.05 0 3 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) With Auto Switch

Slider Type Ball Screw Drive/11-LEFS Series

1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14

Support Guide/11-LEFG Series

Body fixed A Maintenance Warning L Model Screw size Max. tightening torque [Nm] A [mm] L [mm] LEFl16 M3 0.6 3.5 20 LEFl25 M4 1.5 4.5 24 LEFl32 M5 3.0 5.5 30 LEFl40 M6 5.2 6.6 31 Maintenance frequency Perform maintenance according to the table below.

Precision Cylinder Series MTS

Basic type Width across flats 3.5 23 9 4.5 4.5 6.5 3.5 2-M3 x 0.5 (port size) 2-M3 x 0.5 (port size for axial piping type MTS8-P) 9 2-M3 x 0.5 Effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 M2.5 x 0.45 12 41 + Stroke 53 + Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male threads Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4

Fieldbus System

B 12 B 12 B 12 12 B 22.8 31 5.4 3.9 8.8 End plate (6) 36.7 (9.3) (A, B port: 12) (17.9) 4 x M5 Mounting hole Digital Input Unit (Fitting for the type with P/E ports on the U and/or D sides) Valve plate Input connector SI Unit Output connector One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 6, 1/4" : 8, 5/16" : 10, 3/8" : 12 Digital Output Unit Connector for Handheld Terminal (Station

CYP

A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3) 0.05 0.05 0.05 0.04 0.04 0.04

CYPSeries

12-CY1R 3 Series CYP Clean Room Rodless Cylinder How to Order CYP 15 Z73 200 Number of auto switches Clean room rodless cylinder 2 pcs. 1 pc.