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Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (N) All specifications in this catalog are subject to change without notice. This catalog is printed on recycled paper with concern for the global environment.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing May, 1998 D-SMC.L.A. P-73 (JT)

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)

Refer to flow characteristic chart to select the model with adequate margin for required flow rate. 687 Compact Proportional Solenoid Valve Series PVQ10 How to Order 13 03 M5 5 PVQ L A Base mounted Body / Seal material Valve type / /! & !

EtherCAT is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. 43 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NZ printing RQ 8150DN Printed in Japan. D-G

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MV printing MV 16400DN Printed in Japan.

PA03 02: LEC-MR-RB-032 03: LEC-MR-RB-12 Set this parameter to enable the absolute position detection system. For details, refer to "LECSN-T Operation Manual, Chapter 12.

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (N) All specifications in this catalog are subject to change without notice. This catalog is printed on recycled paper with concern for the global environment.

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

Refer to front matter 43 for Safety Instructions and pages 365 to 369 for Precautions on every series. Mounting Caution Design Warning 1. To avoid reversed connections of the air inlet/outlet, make connections after confirming the IN/OUT mark or arrows that indicate the direction of air flow. Reversed connections can cause malfunction. 2.

31.5 35.5 43 Note) The above values should be used as a guide for detection at stroke end.

-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MT printing MT 16400SZ Printed in Japan.

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70 75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43

Inlet pressure (MPa) 14-20-43 3 Series AMF Flow Characteristics/Refer to How to Select on page 14-20-43 regarding model selection. Element initial condition Note) Compressed air over max. flow line in the table below may not meet the specifications of the product. It may cause damage to the element.

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

-06 AS321F-03-07 55 55 6 39.3 17 27.8 13.2 12.8 1/4" 17 39.3 27.8 AS321F-03-08 AS321F-03-09 57 57 8 41 18.5 29.5 3/8 19.8 45.4 40.4 40.2 35.2 23 15.2 5/16" 15.2 18.5 29.5 41 3/8 23 35.2 19.8 40.2 40.4 45.4 AS321F-03-10 AS321F-03-11 59 59 10 43.3 21 31.8 17.9 18.5 21 31.8 43.3 3/8" AS321F-03-12 AS421F-04-11 100 61 12 47.9 21 33.6 17.9 20.9 3/8" 22 32.8 44.3 24 24.5 56.7 1/2 49.2 49.6 42.1