13

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

The controller is sold as single unit after the compatible actuator is set. q Check the actuator label for model number. This matches the controller. q * Refer to the operation manual for using the products.

Hydraulic Filters

M16 x 2 x 50 M16 x 2 x 60 M20 x 2.5 x 65 M22 x 2.5 x 65 4 x N depth Q A 06 G30 SSA20 F (Element removal dimension) Differential pressure indicator G (60) (65) G (30) (34) Blanking cap 08 G35 SSA25 2 x d G E H INLET X OUTLET X' INLET OUTLET OUTLET INLET 10 G40 SSA32 Differential pressure indication switch Differential pressure indicator 12 Bracket mounting base port size 10 to 24 G50 SSA40

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Q Rated voltage CE-compliant: Electrical entry is applicable only for the DIN terminal. 50 60 1 2 100 VAC, Hz 200 VAC, Hz 50 60 50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50 60 Port size 50 60 Note 1) CE-compliant: Electrical entry is applicable only for the DIN terminal.

SL5200

No gauge port psig/bar unit MPa unit No code Porting Configuration No pressure gauge (Connections: 1/4 inch face seal male) 0 r r e V3 L 1 2 4 10 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa Sample Order Number Port w q w q w q SL5406S e q FV4 FV4

Title not found

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Environment

0 i o e r t q u !1 !2 !3 !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators SZ3 LOZ 1 60 10 C6 5 Rated voltage CE-compliant 5 24 VDC Nil Clean series CE-compliant Q Actuation type Made to Order Nil 2 position single solenoid Main valve fluororubber (Refer to page 411.)

New

e q VXF26D<q e q Component Parts Component Parts No.

IDG

IDG50L (Type B products group) IDG30L (Type B products group) 0 0 P1 = 0.3 MPa P1 = 0.3 MPa Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) 10 10 20 20 P1 = 0.5 MPa P1 = 0.5 MPa 30 30 40 40 P1 = 0.7 MPa P1 = 0.7 MPa 50 50 60 60 70 70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) Courtesy

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

Electric Rotary Table

q Check the actuator label for model number. This matches the driver. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

Air Cylinder

2 q t w e u y CJP CJ2 JCM CM2 CM3 CG1 CG1 With air cushion CG3 o !4 !0 !5 !1 !3 !2 q t w e r i JMB MB MB1 CA2 CS1 CS2 Component Parts Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 20 CG1WN20Z-PS Set of the nos. !2, !3, !4 No.

LEC-OM069xx

Name Mid-execution Automatic Parameter changes changes Pn401 Torque Reference Filter Time Constant No Yes Pn408 Torque Related Function Switch Yes Yes Pn409 1st Notch Filter Frequency No Yes Pn40A 1st Notch Filter Q Value No No Pn40C 2nd Notch Filter Frequency No No Pn40D 2nd Notch Filter Q Value No No 6-29 7.

CKZ2N

N O P Q 85.0 Part no.

CJ2

(Refer to page 6-3-60.) Standard stroke (mm) Same as the standard. (Refer to page 6-3-60.)

SYJ3000/5000/7000

SYJ7000-22-1 SYJ7000-22-2 V111(T)No. q w e r t y Aluminum die-casted 1/8 1/4 Body Piston plate End cover Piston Spool valve assembly Spool spring Sub-plate u i Pilot valve How to Order Pilot Valve Assembly V111 5 G V115 5 D Rated voltage Coil specifications Light/Surge voltage suppressor 5 6 1 2 24 VDC 12 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 V AC 50/60 Hz] 220 VAC

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

C95

60 80 105 110 115 1, 2 A5 15 + 55 (n 2)/2 20 + 55 (n 2)/2 60 + 55 (n 4)/2 60 + 55 (n 4)/2 80 + 55 (n 4)/2 105 + 55 (n 4)/2 110 + 55 (n 4)/2 115 + 55 (n 4)/2 n A6 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 20 60 70 85 110 115 120 2 20 + 55 (n 2)/2 25 + 55 (n 2)/2 65 + 55 (n 4)/2 70 + 55

Rotary Table/Rack & Pinion Style Series MSQ

Load A Displacement CRB2 MSQB70 MSQB100 CRBU2 80 80 70 70 CRB1 Displacement m Displacement m 60 60 50 50 MSU 40 40 CRJ 30 30 20 20 CRA1 10 10 CRQ2 18 16 14 12 8 6 4 10 2 0 8 6 4 12 10 2 0 Load Nm Load Nm MSQ MSQB200 MSZ 90 80 CRQ2X MSQX Displacement m 70 60 MRQ 50 40 30 20 10 30 25 20 15 10 5 0 Load Nm Rotation Accuracy: Displacement Values at 180 (Reference values) Rotating amount of table