MQQ

Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40 20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT

MQQ

Dimensions Foot style: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke RE A B REC 10, 16, 20, 25 CX CY LY LH MQQ M X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT RHC MK(2) RS Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40

MQQ

Dimensions Foot type/MQMLL 6 25 14 33 42 18.5 6 9 2.3 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y 4-LC S + Stroke LS + Stroke ZZ + Stroke LX LZ Z LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 5.5 83 2.3 14 33 25 65 19 42 108 9 6 10 5.5 92 2.3 18 42 30 74 21 54 119 9 6 16 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 20 6.8 142.5 3.2 28 40 47 102.5 24.5

10

Bore size [mm] B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 Bore size [mm] Z MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 32 160 40 164 50 190 63 190 80 238 100 238 125 279 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64

Thermo-chiller/Rack Mount Type

2 [ ] lamp Lights up when AL.01 Low level in tank abnormal or AL.02 Low level in tank alarm is generated !3 Digital display (11-segment, 1 digit) X is displayed when maintenance notification is generated. !4 [RMT] lamp Lights up during remote operation by communication function !5 [KEYLOCK] lamp Lights up when key lock setting is active !

CLQ

A A1 E1 L1 NZ 16 16 20 22 28 38 44 34 41 42 56 71 79 25 30 30 40 50 55 20 25 32, 40 50, 63 80 100 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 34 41 42 56 71 79 25 30 30 40 50 55 IY-G02 16 20 IY-G03 20 22 IY-G04 36 28 IY-G05 44 38 IY-G08 56 44 IY-G10 Knuckle pin and snap ring are included. 64 Knuckle Pin (Common with double clevis pin

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

2/3 Port Valve

Teflon is a registered trademark of DuPont. 4.2-42

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Dimensions VP3145-DZA1-X81 (35) Max.10 125.5 87.4 21.5 B A 51 71 80 Manual override (Non-locking) Applicable cable O.D. 4.5 to 7 Pg9 2 x 1/8 (Pilot EXH port) 1/4 (External pilot port) 2 x 8.5 (For mounting) 204.5 195.5 29 PE PA 155 111.5 119 103 93 IN EXH OUT 65 62 42 42 3/8, 1/2, 3/4 (IN, OUT port) 71 36 36 22.6 (Guide) 3/4 (EXH port) In the case of B spec. of -X81 (N.O. spec.), VF3140

VP3145/3165/3185

Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) (Mounting hole) 2-8.5 EXH 205.1 196.1 PA PE 156 103 119 112 93 IN EXH OUT 65 62 42 42 25 (EXH port) Rc 3/4 (IN, OUT port) 2-Rc 3/8, 1/2, 3/4 36 71 36 When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

Model Selection 1

Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C./N.O. 1/8 to 3/4 0 to 3 (1) 17-2-57 VV2CW2/3/4 N.C./N.O.

AC Servo Motor Driver (CC-Link Type)

-T) {(16 A) (54 B) (88 C)} 2304 A: Number of remote I/O stations 64 B: Number of remote device stations 42 C: Number of local stations 26 (d) When the number of units connected is 4, station numbers can be set as shown below.

Compact Cylinder with Air Cushion

O M J E D B K ( across flats) 11.5 depth 7.5 34 9 25 7 12 YB-03 32, 40 H (With locking) 14.5 depth 8.5 42 11 32 9 12 YB-05 50, 63 18 depth 12 52 13 38 11 16 YB-08 80 d1 d2 21 depth 14 62 17 50 14 19 YB-10 100 L UT Weight (g) Bore size (mm) Part no. RS W T1 T2 V C UA Material: Chrome molybdenum steel (nickel plated) 9 50 80 18 6.5 10 YB-03 32, 40 Part no.

RQ

RQ Applicable air cylinder bore YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 YA-08 80 62 10 25 11 26 8.5 16 03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket DYA-10 100 76 12 30 14 31 10.5 18 Type A mounting bracket YA YB YU Bore size (mm) Type B mounting bracket Joint W V U Weight (g) Part no.

MTS

31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5 47.5 47.5 20 15 17 37 43.5 33 43.5 33 16 23 19 24.5 24.5 19 27 27 27 27 63.5 63.5 63.5 63.5 22.5 17 23 43 59.5 39 59.5 39 20 26 22 25.5 25.5 22 30 30 30 30 67 67 67 67 23.5 20 26 46 63 42 63 42 25 32 25 28.5 28.5 25 36 36 36 36 88.5 88.5 88.5 88.5 26.5 23 32 52 84.5 48 84.5 48 32 32.5 30 30 30 30 36.5 36.5 36.5 36.5 102.5 102.5 102.5 102.5