3

a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal

Magnet Gripper for Collaborative Robots

Replacement part . 42 6-3. Maintenance . 42 1 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

PSxx-OMU0005CN

No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

E-P HYREG ® Series VY1 1

00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series

Air Slide Table Series MXQ

15 14 Average speed Va mm/s Collision speed V mm/s 13 13 13 13 18 31 31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.



(Mounting hole) (Mounting thread) 4-M6 x 1 x 6 Rc 1 1/4 2-Rc1, 1 1/4 VEX1930 3-14, 20 Bracket (Option) Pressure gauge (Option) Air operated type Rc 1/8 2-M5 x 0.8 Rc 2 2-Rc 1 1/2, 2 4-M6 x 1 x12 (Mounting thread) (Mounting hole) 14-6-10 11 Precision Regulator Series VEX130 3 Base Mounted M5, Rc 1/8 VEX1B33-M5, 01 F.R.L.

Wedge Cam Operation Gripper Series MHK2

M5 X 0.8 (Finger opening port) 22.5 2.3 19 Series MHK2 Wedge Cam Operation Gripper Dimensions MHK2-20 /Standard model Scale: 37% (mm) 18.6 20 2-M5 X 0.8 thread 8 deep 4H9 4 deep +0.030 0 21H9 1.5 deep +0.052 0 2-M5 X .8 thread 10 deep 4-M5 X 0.8 thread 10 deep Bottom hole dia.4.3 through-hole 0 -0.1 8 Open 26 +1.2 0 5 13.5 16 0.02 60 58 32 42 30 0 -0.2 Closed 16 29 4H9 4 deep +0.030 0 21

ZQ-OM01401

) (7) (8) (9) (6),(10) (11) (12) (13) (3),(4), (5),(6),(14) (15) (7) (8) (16) 42 - No.ZQ-OM01401-B No. (1) (2) (3) ON 10 (%) (4) (5) Assy (6) (7) (8) 0.72[V] (9) Ass'y (10) 43 - No.ZQ-OM01401-B No. (11) (12) (13) (14) Ass'y (15) ON/OFF (16) (ZQ-ZSV-A) 44 - No.ZQ-OM01401-B Revision history A :UKCA B 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207

SMC Pneumatic Clean Series

14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18

AS-FG/ASD-FG

Min. d T H D1 D2 D3 L1 L2 L3 Model 4 17.5 29.4 9.3 ASD230FG-M5-04 12.9 9.6 10 28.3 25.5 28.6 25.8 8 M5 x 0.8 11.7 25 7.8 22.2 6 20.6 32.5 11.6 ASD230FG-M5-06 13.7 39.6 34.6 6 14 22.9 38.5 11.6 ASD330FG-01-06S 13.7 14.2 11.8 36.1 31.1 12 R(PT) 1/8 32.1 10.6 27.1 38.9 33.9 8 15.8 28.2 44.8 15.2 ASD330FG-01-08S 18.5 6 25.2 43.5 12.8 17 ASD430FG-02-06S 18 18.5 15 41.7 36.7 40.4 35.4 8 17 R(PT

ZP3

M5 x 0.8 Use the connection thread. M5 x 0.8 Use the connection thread. Use the connection thread.

High Vacuum Angle Valve, XL Series

XLCV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L With single solenoid Port P (pressure port) (mm) N 3 3 3 3 6.5 6.5 M 6.5 6.5 6.5 6.5 11 11 L 9 9 9 9 11 11 K 14 16 29 42 32 45 P 17 15 2 6 Q Model XLCV-16 XLCV-25 XLCV-40 XLCV-50 XLCV-63 XLCV-80 16.5 16.5 17.5 17.5 29 29 Other dimensions are the same as XLA. 11 Series XLF Normally Clossed/O-ring Seal Air

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

A

x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10

MHK2

M5 x 0.8 (Finger opening port) 22.5 2.3 12-6-13 13 Series MHK2 Dimensions MHK2-20: Standard type 18.6 20 2-M5 x 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 0.1 8 Open 26 +1.2 0 5 16 0.02 13.5 42 30 60 58 32 0 0.2 29 Closed

MHK2

M5 x 0.8 (Finger opening port) 22.5 2.3 12-6-13 13 Series MHK2 Dimensions MHK2-20: Standard type 18.6 20 2-M5 x 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 0.1 8 Open 26 +1.2 0 5 16 0.02 13.5 42 30 60 58 32 0 0.2 29 Closed

Wedge Cam Operation Provides

M5 X 0.8 (Finger opening port) 22.5 2.3 2.4-13 Series MHK2 Dimensions MHK2-20l /Standard model 18.6 20 2-M5 X 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 26 +1.2 0 5 16 0.02 13 . 5 42 30 60 58 32 0 -0.2 29 Closed

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3 8.8 22.8 19 3.5 4 Note) Through-hole mounting is not possible for 10. 925 Standard Type / Series MHZ2 Finger Option 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

LJ1H

mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale: 15% 10 6 Work piece mounting reference plane LJ1 LG1 LX LC6D/LC6C Switches LC1 80 5H10 depth 8 8-M5