Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 18 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 5 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 8 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 9 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 2 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 3 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 4 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 6 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 10 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 20 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Lightweight and Compact

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.

Rotary Table

Allowable load a b Allowable thrust loadN Allowable momentNm Size Allowable radial load a b Basic type High precision N type 1 31 41 41 0.56 0.84 2 32 45 45 0.82 1.2 3 33 48 48 1.1 1.6 7 54 71 71 1.5 2.2 Unit used as flange mount Rotary table can be mounted from three directions-Two side of axial direction and one side of lateral face.

Micro-Mist Separator with Prefilter Series AMH

16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76

Air Cylinder MGQ Series Compact Guide Cylinder

5 . , ' , . i u , , MGQbll2 Slide bearing 0.24 0.24 o.32 0.35 0.39 MGOLI2 Ball bush bearing o.23 0.26 0.29 0.35 0.38 16 vepr,lrol Slide bearing 0.36 o.41 o.47 0.52 0.57 vcbr-ro Ball bush bearing 0.3s o.3s o.44 o.52 o.57 n MGOM20 Slide bearing 0.56 0.63 0.70 o.77 0.s6 1.10 MGOt20 Ball bush bearing 0.54 o.60 0.70 o.90 1.04 ,' .is MGOM25.

COQ2BP

L L N'm J MJ in3 in3 Energy em3 (ee) 0.0610 m3 35.320 0.0283 28.329 1t3 N'm 0.7375 11 Ib 1t3 J 0.7375 It Ib L 0.0353 Power It IbiS hp 9al(U.S.) 3.785 gal (U.S.)

Title not found

5 . , ' , . i u , , MGQbll2 Slide bearing 0.24 0.24 o.32 0.35 0.39 MGOLI2 Ball bush bearing o.23 0.26 0.29 0.35 0.38 16 vepr,lrol Slide bearing 0.36 o.41 o.47 0.52 0.57 vcbr-ro Ball bush bearing 0.3s o.3s o.44 o.52 o.57 n MGOM20 Slide bearing 0.56 0.63 0.70 o.77 0.s6 1.10 MGOt20 Ball bush bearing 0.54 o.60 0.70 o.90 1.04 ,' .is MGOM25.

PFxx-OMS0001CN

(2 ) (71 ) 0.50.7 Nm M3 -16No.PF-OMS0001CN-A IN8cm 2F.S.

Series VQ Metal Seal/Rubber Seal Body Ported

Max. 16 stations.

HRX-OM-X084

External temperature sensor 13 ue own Blue 3B 8 14 ue 15 (CN7) Blue 5 7 ue 16 6 Blue 8 Brown 3 4 1 9 Brown Blue Serial communication 9 10 Blue Blue Blue 7 12 2 Blue 9 Blue 11 3 10 11 12 Blue Blue Blue External communication section for customer connection Brown 15 1 Blue 8 Blue 16 9 17 2 Brown Blue 18 10 (CN1) 1/2 Red Brown 19 3 1A White Blue 20 11 2A outlet White Blue 21 4 3A 22 12 Blue

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5