CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36

Fieldbus system EtherCAT compatible SI Unit

or 1342 22, 38, 70 or 1342 IO-Link master Class B EX600-LBB1 1 (4 ports) 22, 38, 70 or 1342 22, 38, 70 or 1342 1: Not available for EX600-SEC1/2 compatibility mode. 2: The allocated bytes of the IO-Link master can be changed by the IO-Link master size setting switch. -80No.EX-OMA1023 Details of I/O map of the IO-Link master unit I/O map of the IO-Link master unit is described below.

HRX-OM-O021

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20 30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 12-10-4 4 Series MHY2/MHW2 180 Angular Style Air Gripper MHZ MHW2-32D MHW2-50D MHW2-20D MHF 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa MHL 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 MHR 200 0.5 0.5 0.5

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20 30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 12-10-4 4 Series MHY2/MHW2 180 Angular Style Air Gripper MHZ MHW2-32D MHW2-50D MHW2-20D MHF 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa MHL 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 MHR 200 0.5 0.5 0.5

MHY2/MHW2

0.1 0.1 5 L L 0 20 30 50 60 Holding point L (mm) 40 70 0 30 40 60 70 Holding point L (mm) 50 80 90 2.8-4 180 Angular Gripper Series MHY2/MHW2 MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7MPa Pressure 0.7MPa Pressure 0.7MPa 250 20 0.6 80 0.6 0.6 Holding force (N) Holding force (N) Holding force (N) 200 0.5 0.5 0.5 60 15 0.4 0.3 150 0.4 0.4 40 10 0.3 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

180° Angular Style Air Gripper Series MHY2/MHW2

30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 658 180 Angular Style Air Gripper Series MHY2/MHW2 MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 200 0.5 0.5 0.5 60 15 0.4 0.3 0.4 150 0.4 40 0.3 10 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40 Gripping

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 Load [N] 70 60 15 50 40 30 10 20 10 0 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] Adjuster holder 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

After securing the cylinder, readjust the stroke with the adjustment bolt. 80 Load [N] 70 60 15 50 40 30 10 20 10 0 0 100 200 300 400 500 600 700 800 900 Distance between supports L [mm] Adjuster holder 6. There are limitations on the load mass and operating pressure in case the product is used in the vertical direction.

Compact

CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12 MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4

CXS

The maximum piston speed for retraction is approximately 70% that of extension. MY Standard Stroke CY (mm) MG Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 CX 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 D10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

CXS

The maximum piston speed for retraction is approximately 70% that of extension.

Free Mount Cylinder

(g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 70 80 90 100 33 (38) 36 (46) 40 (50) 43 (53) 46 (56) 50 (60) 57 (67) 64 (74) 71 (81) C(D)UKW6-D 51 (56) 56 (66) 60 (70) 65 (75) 69 (79) 74 (84) 83 (93) 92 (102) 101 (111) C(D)UKW10-D 84 (109) 91 (121) 98 (128) 105 (135) 112 (142) 119 (149) 133 (163) 147 (177) 161 (191) C(D)UKW16-D 150 (185) 163 (203) 177 (217) 191 (231) 205 (245) 219 (259) 247

LEF-OM002xx

200 mm/s mm/s 100 500 100 500 1 1 To CN4 200 1000 200 1000 2 2 50 200 50 200 3 3 To CN3 or (4) Actuator cable (6) Teaching box PC To CN2 (7) Controller setting kit (3) Power supply plug (2)Controller To CN1 Table 2.

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

XLA Series

H 5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 consumption (W) Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

XLF Series

H 5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

High Vacuum L Type Valve

H 5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 consumption (W) Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.