ISA2

200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

Air Slide Table Series MXS

30 13+0.15S 180 155 115 100 80 -X 15 35 9 45 40 40 26+0.17S 410 285 235 190 160 150 30 50 20 60 80 90 43+0.21S 890 660 480 385 325 325 325 Individual -X 50 80 30 105 120 160 55+0.21S 1700 1370 1090 760 640 580 570 570 100 170 71 205 140 310 150+0.45S 3190 2670 2150 1630 1250 1100 1010 980 960 150 215 125 300 240 540 220+0.45S 4710 4140 3270 2650 2090 1840 1690 1680 1660 55

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125, 150 20 to 63 Theoretical Output OUT IN 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125 80, 100 Unit: N Manufacture of Intermediate Stroke Bore size (mm) Operating direction Operating pressure (MPa) 0.3 0.5 0.7 Dealing with the stroke by the 1 mm interval by using an exclusive

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

Electric Actuator / Low profile slider type

output signal is turned on from Area 1:80[mm] between Area 2:90[mm].

Microspeed Cylinder

15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

IZx-OMP0064

50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100

2/3 Port Valve

180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 VNC5-32F VNC6-40F VNC7-50F 100 105 120 36 42 54 12 12 14 310.5 326 350 278 293.5 317.5 VX Port size: 65F, 80F Flange connection VN VQ Applicable flange 65 80 Model H F E D C B A 1 4 1 4 405.5 441.5 65 80 140 150 204 235 175 185 305.5 341.5 210 240 VNC81 -65F VNC91 -80F 4.2-25 VNC Construction N.C.

Digital Flow Switch (Manifold type)

(at 80 mA load current) PNP: 1.5 V max. (at 80 mA load current) Response time 25 0.5 s/1 s/2 s Output protection Short circuit protection Flow Selects one of the output (hysteresis or window comparator mode), the output for the accumulated flow and the accumulated pulse output. Output mode Temp. Selects the output for fluid temp.

AC Servo Motor Driver (Pulse input type/Positioning type)

Home Position Return Method .80 6.1 Position Control Mode (Pulse Input). 80 6.2 Positioning mode (point table) . 80 6.2.1 Stopper type home position return . 81 7.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Specifications 0.4 SYJ 0.3 SX 0.2 ARBYJ7000 ARBYJ5000 Interface regulator VK SYJ7000 SYJ5000 Applicatable solenoid valve 0.1 VZ P P Regulating port 0 50 100 150 200 0 Proof pressure 1.5MPa VF Flow rate (l/min(ANR)) Max. operating pressure 1.0MPa VFR (1) Setting pressure range 0.05 to 0.7MPa PARBYJ7000-00-P (2) Ambient and fluid temperature 5 to 60C VP7 Thread size for connection 0.6 M5 X

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, 25, 50, 75, 100, 125, 150, 200 Up to 1500 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.5 MPa Load rate: 50% Stroke 60 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Vertical, upward actuation Horizontal actuation 10-SYJ7143-02 Cylinder is in extending.

Booster Regulator/Air Tank

General line (low pressure) Locations requiring high pressure VBA Plant line (source pressure) VBA VBA (Two-stage pressure boost) 80 100 OUT 0.8 MPa E 0.5 MPa IN 0.5 MPa Operating pressure: 0.5 MPa Bore size: 100 Output 3850 N Operating pressure: 0.8 MPa Bore size: 80 Output 4000 N VBA Equivalent output When charging a tank or the like from a source at atmospheric pressure, a circuit with

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Contents 40 CA2Y40Z-PS Piston seal: 1 pc. 50 CA2Y50Z-PS Rod seal: 1 pc. 63 CA2Y63Z-PS Tube gasket: 2 pcs. 80 CA2Y80Z-PS Grease(10g): 1 bag 100 CA2Y100Z-PS When only grease for maintenance is required, order it by the following numbers. Net weight Part No. 5g GR-L-005 10g GR-L-010 150g GR-L-150 C a u t i o n 1 When replacing mounting brackets, use socket wrench.

Table of Contents

Series SZ3000 5 Port Solenoid Valve Serial Transmission Type. 52 53 54 55 56 57 57 59 60 60 61 62 63 64 65 66 67 67 69 70 70 71 72 73 74 75 76 77 77 79 80 80 81 82 83 84 85 87 89 91 97 97 98 100 101 101 102 103 104 105 106 106 107 111 111 114 121 125 130 130 132 134 137 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Process Pump

dB (A) or less (excluding the noise from the quick exhaust and solenoid valve) 80 dB (A) or less (Option: with silencer, AN20) Noise PA PB 0.75 MPa Withstand pressure 50 million cycles (for water) Service life 0 to 90C (No freezing) Operating fluid temperature 0 to 70C (No freezing) Ambient temperature Maximum viscosity 1000 mPas Recommended operation cycle 2 to 4 Hz Weight (without foot

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Select from Normal or Reversed output. 80 mA Switch output 28 VDC Internal voltage drop (Residual voltage) Response time Note 4) NPN output type: 1 V or less (at load current 80 mA) PNP output type: 2 V or less (at load current 80 mA) Select from 0.05 sec., 0.1 sec., 0.5 sec., 1 sec., or 2 sec.

PFxx-OMA1007

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below.