90

Vacuum pressure [kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

MXS

MXS25-125 MXS25-150 MXS25-125 MXS25-100 MXS25-100 0.04 Table deflection (mm) 0.030 Table deflection (mm) Table deflection (mm) 0.05 MXS2575 MXS2575 MGQ MXS2540 MXS2550 0.025 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 MGG 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 MGC 0.01 0.01 0.005 MGF 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load

ML2B

Piston speed (mm/s) 1000 Air cushion RS Q G Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt RS H A Adjusting bolt 200 RZQ Lock plate holding bolt 0.5 100 10 20 30 4050 100 200 300 400500 MI W S W2 max W1 max W3 max CEP1 Allowable load (N) Shock absorber CE1 ML2B40 Horizontal collision: P = 0.5 MPa Lock plate 2.

ML2B

Piston speed (mm/s) 1000 Air cushion RS Q G Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt RS H A Adjusting bolt 200 RZQ Lock plate holding bolt 0.5 100 10 20 30 4050 100 200 300 400500 MI W S W2 max W1 max W3 max CEP1 Allowable load (N) Shock absorber CE1 ML2B40 Horizontal collision: P = 0.5 MPa Lock plate 2.

ML2B

Piston speed (mm/s) 1000 Air cushion RS Q G Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt RS H A Adjusting bolt 200 RZQ Lock plate holding bolt 0.5 100 10 20 30 4050 100 200 300 400500 MI W S W2 max W1 max W3 max CEP1 Allowable load (N) Shock absorber CE1 ML2B40 Horizontal collision: P = 0.5 MPa Lock plate 2.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

RSH20, 32 Graph q Graph w Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 1.0 RSH20 RSH32 0.9 Operating pressure ZP [MPa] 0.8 1300 1300 80 0.7 1200 1200 RSQ 0.6 1100 1100 0.5 RSG 1000 1000 0.4 900 900 0.3 RS 63 80 Load mass m [kg] Load mass m [kg] 0.2 800 800 50 0.1 MI 700 700 500 0 100 200 300 400 600 600 63 Lateral load F [N] 500 500 50 400 400 RS1H50, 63, 80 300 300 1.0 RS1H80 RS1H50

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

15 273 262.5 244 14.5 17 298 287.5 265 16.5 18 310.5 300 275.5 17.5 19 310.5 300 286 12.5 20 323 312.5 296.5 13.5 L1 L2 L3 L4 389 Cassette Type Manifold 10-SZ3000 Dimensions: 10-SZ3000 for Plug-in 10-SS5Z3-60PD (26 pins) U1 2 Stations Directional Control Valves Air Grippers Modular F.

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Max. speed (mm/s) 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Up to 100 Up to 300 Up to 400 More than 400 Max. speed (mm/s) 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum

MXS Series Air Slide Table

MXS25-10 0.06 MXS25-125 MXS25-100 MXS25-125 MXS25-150 MXS25-100 0.04 0.030 0.05 MXS2575 MXS2575 Table deflection mm Table deflection mm Table deflection mm 0.025 MXS2540 MXS2550 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 50 100 150 200 250 300 0 Load N 1N = 0.2248 lbf Load

Rotary Clamp Cylinders

Rotary Angle Theoretical Output Unit: N During unclamping (Extension end) 80 to 100 (9010) L type During unclamping (Extension end) Operating pressure (MPa) Rod size (mm) Operating direction Bore size (mm) Piston area (cm2) 80 to 100 (9010) R type 1.0 0.7 0.5 0.3 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Clamp part 600 418 300 182 R

AS

[gpm (L/min) (ANR)] (100) 132 (500) 06, 07, 08, 09, 10 06, 07, 08, 09, 10 03, 04 08, 09, 10, 11 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 106 52.8 06, 07 (400) (200) 02 01, 23 79.3 13.2 03, 04 (300) (50) 26.5 52.8 (100) (200) 26.4 (100) 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as

K35-OMW0030

Power supply connector (Body) M23 19 pin male connector *1 Based on the SMC's test conditions 17 Table 1 Weight Bore size (mm) Stroke (mm) Weight (kg) 125 250 24 200 37 160 300 43 200 53 200 300 61 350 86 250 450 97 200 100 320 350 129 530 163 Table 2 Allowable lateral load at rod end Bore size (mm) Allowable lateral load at rod end (N) 125 70 160 90 200 140 250 160 320 230 Table 3 Theoretical

Compact Manifold Regulator Series ARM5

0 50 100 150 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate l/min

Air Slide Table Series MXQ

MXQ20-50 MXQ20-50 MXQ20-30 MXQ20-100 MXQ20-150 0.08 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-100 MXQ20-20 MXQ20-10 0.04 0.02 MXQ20-10 0.02 0 0 400 500 600 100 200 300 0 100 200 300 100 200 300 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 25 25 25 Lr = 200mm 0.08 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

Table of Contents

-02-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed