Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note

ISA2

100 150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

PFxx-OMX0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) -95No.PF-OMX0002-B Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 -96No.PF-OMX0002-B Lead wire with M12 connector (ZS-37-A) Pin

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

Slider Type/Ball Bushing Bearing

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

Non-contact Gripper

: 150 3.5 (7.3) (7.3) 3.5 54 70 54 120 to 132 (Adjustable) 3 70 150 to 162 (Adjustable) 3 With adjustment bolt assembly Size: 150 Size: 120 ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR XT661 XT661 3 (1) (Adjustable) 90 3 (1) (Adjustable) 114 745

asilltr

. nry\.. 06 {r 1/16 150 (1Y,') dimensions lor mounting holes same as'A'type on page 11.

Air Cylinder NCQ7 Series Compact Cylinder

. nry\.. 06 {r 1/16 150 (1Y,') dimensions lor mounting holes same as'A'type on page 11.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250

Stability of suction position,

150 210 492 490 502 ZP3E-YF80UMJB ZP3E-YF100UMJB Width across flats 17 Bushing Bushing Width across flats 17 8 8 50 8 8 50 Bushing Bushing Width across flats 30 M22 x 1.5 Width across flats 30 M22 x 1.5 24 33 A B 21.5 30.5 A B Rc1/8 Rc1/8 D D D D 32 32 61 50 53.5 22.61) 5 56 25.11) 7 4 4 30 (Rotating angle) 30 (Rotating angle) 83 80 103 100 D-D D-D 22 22 26 26 11 11 Dimensions Dimensions

ZP

NBR (50), Conductive silicon rubber (50) Durometer Spring Reactive Force Dia.

Floating Joint: Standard Type JA Series

0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 Basic type, Flange type, Foot type Mounting Operating range Center of sphere Operating range Axial center 5 Semi-standard/Thread nominal size -5 to 60C JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Mounting orientation Free Impact/Vibration resistance (m/s2) (2) 150/50 Note 1) Use turbine oil Class 1 (ISO VG32). Note 2) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

VQC

or less 52 or less 3-position pressure center Rubber seal VQC4301 (A) 4 (B) 2 6.2 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less Metal seal VQC4400 Exhaust center 280 7.0 7.3 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal VQC4401 6.2 6.4 0.18 1.9 0.18 1.6 45 or less 47 or less Metal seal VQC4500 Pressure center 1 (P) 5 (R1) 3 (R2) 7.0 7.1 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber

0.5

mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

ISO Standard Hydraulic Cylinder

A6/A59W cannot be mounted to 40, 50.

air-filter-e

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Air Preparation Equipment

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.