pa 74.5 FLUID I N AIR EXH AIR EXH (Pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (Pilot air supply port) (257) 112 Rc 1/4 56 165 56 Reset button RESET FLUID OUT PROCESS PUMP 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (Pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 17-5-152 Process
distance: AN200 to 500 1 m, AN600 to 700 2 m, AN800 to 900 3 m Tension bolt Sound absorbing material (PE sintered body) Sound absorbing material (PE sintered body) Cover Case Without silencer With silencer Body 130 Hexagonal flats 120 Port size Hexagonal flats 110 100 Port size 90 80 Note 1) About the display of products material POM: Polyacetal PE: Polyethylene SPCC: Carbon steel S20C:
V 100 V or less 100 V, 200 V 200 V or less 24 V or less IC circuit Grommet Relay, PLC 12 V Connector 2-wire 24 V IC circuit PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state
(For the 100 L/min types, the piping length should be 11 cm or longer.)
H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 75 125.5 52 63 72.5 80.5 80 84.5 124 144.5 26 24.3 2.3 55 42 4.5 25 28 34 14 60.5 73 1 84 100 92 108 135.5 137 153 156 172 84 90 62 72 80 90 89 95 93.5 99.5 31 36 28.3 33.3 2.3 2.3 50 60 5.5 6.5 30 35 35 40 43 49 17.5 20 151.5 Port
Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension
(Displays 0 when the value is (Displays 0 when the value is below 80 L/min) below 160 L/min) 90 to 1050 L/min 180 to 2100 L/min 9.0 0 to 9%F.S. (Displays 0 when the value is (Displays 0 when the value is below 90 L/min) below 180 L/min) 100 to 1050 L/min 200 to 2100 L/min 10.0 0 to 10%F.S.
Push button Cover for push button 3410701-R 3410703 (White only) Color Red 3410701-B Black 3410701-G Green 2348 2/3 Port Mechanical Valve New New RoHS Lightweight 60 g 90 g (Conventional model: 95 g) VM100 Side ported (Conventional model: 111 g) VM200 Bottom ported Side ported, basic type Mounting interchangeable with the conventional model Available in vacuum applications (VM100) 100
The surface temperature of the motor can increase to approx. 90 oC to 100 oC due to operating conditions. Energizing alone may also cause this temperature increase.
200 0 100 200 300 400 500 600 700 0 50 100 150 200 250 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) NOTE) Contact SMC for details of ARBY7000 (New) 1.2-182 5 Port Solenoid Valve/Body ported Cassette Type Manifold Series SY3000 / 5000/7000 SV SY SY SYJ SX VK Series SY7000 VZ VF VFR VP7 VQC Series SY5000 SQ VQ VQ4 VQ5 VQZ VQD
The guideline is 80% or less. 0 to 100 % 12 Effective load ratio The continuous effective load current is displayed. The effective value is displayed relative to the rated current of 100%. 0 to 300 % 13 Peak load ratio The maximum torque is displayed.
27 17 15 Rc 1/8 RB1006 50 M6 x 1.0 90 120 105 M10 x 1.0 40 16.5 25.5 117 130 10 10.5 29 20 28 Rc 1/8 RB1411 60 M6 x 1.0 0.5 100 130 105 1.0 M14 x 1.5 50 16.5 25.5 127 130 10 12.5 49 40 22 DRc 1/8 70 M8 x 1.25 0.5 120 160 121 1.0 M20 x 1.5 60 18.5 28.5 157 149 12 13.5 52 42 33 RB2015 Rc 1/4 90 M8 x 1.25 1.0 140 190 159 1.0 M20 x 1.5 84 20.5 35.5 187 194 12 12.5 51 36 35 -X PA dimensions
Set the parameter No.PC30 (direct specification selection) to " 2". -90- Device No.
motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder
90 90 115 115 115 145 145 6 6 6 6 6 6 8 8 72 72 72 86 86 86 106 106 110 110 110 130 130 130 170 170 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120 120 140 140 140 170 170 30 310 380 450 520
(100) 44.5 112 16 22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R thread installation.
Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore
Thus, it can be used in a Class 100 clean room.
terminal X 92 94 97 DIN connector V 59 60 63 C R 47 (54) 54 (64) 61 (71) T 40 (47) 46 (56) 54 (64) Y 74 (81) 81 (91) 88 (98) U 47 48 51 W 84 (91) 90 (100) 98 (108) Q 23 25.5 28 VVX21l VVX22l VVX23l The figures in parentheses are a closed style at energizing ( ): Individual pressure 20.5 (17.5) 26.5 (22.5) 26.5 (22.5) 56 (67) 64 (81) 72 (87) 38 49 49 11 13 13 25 30 30 32 40 40 36 46 46 12
Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .