VFS

1 Hexagon socket head screw Steel M4 x 40 M4 x 40 M4 x 40 !2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

0.5

IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153 113.4 (195) (155) With adjustable louver IZF21-m-mmWm IZF31-m-mmWm (60) (144) 14 (40) 127 (60) (104) 14 (40) 89 127 89 (195) (155) With filter IZF21-m-mmmU IZF31-m-mmmU (144) (45) 134 5 (40) (45) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions

PFxx-OMX0002

A to B C to D 3,000 L 30 to 3000 30 to 3150 40 to 4000 40 to 4200 L/min 6,000 L 60 to 6000 60 to 6300 40 to 4000 40 to 4200 12,000 L 120 to 12000 120 to 12600 40 to 4000 40 to 4200 PF3A7#H 3,000 L 1.1 to 105.9 1.1 to 111.2 40 to 4000 40 to 4200 cfm 6,000 L 2.2 to 211.9 2.2 to 222.4 40 to 4000 40 to 4200 12,000 L 4.0 to 424.0 4.0 to 445.0 40 to 4000 40 to 4200 : The flow ranges and relationship

ZP

ZPX40HBN-B01-B8 -B10 ZPX50HBN-B01-B8 -B10 ZPX63HBN-B01-B10 -B12 ZPX 80HBN-B01-B10 -B12 ZPX100HBN-B01-B10 -B12 ZPX125HBN-B01-B10 -B12 150 275 40 50 63 80 100 125 +1 0 +10 152 271 1 +1 0 +19 166 464 2 +2 0 +37 164 460 3 +2 0 +61 235 648 6 +4 +1 +121 225 644 12 +7 +228 +3 22 How to Order ZPX 40 HB N B01 B10 Pad diameter (mm) Mounting thread 40, 50 63, 80 100, , 125 40 40 50 B 8 50 M8 x 1.25

Digital Flow Switches Series PF2A

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13

MY2

M2 m1 M3 30 50 200 m3 Allowable moment (Nm) Allowable moment (Nm) MY1C Load weight (kg) 40 Load weight (kg) Diagonal cam follower 20 45 Lateral cam follower 50 30 100 20 10 10 0 MY2C 0 0 16 25 40 0 16 25 40 16 25 40 16 25 40 Bore size (mm) Bore size (mm) Bore size (mm) Bore size (mm) Diagonal cam follower 60 Lateral cam follower MY2HT MY2H MY1H MY2HT MY2H MY1H MY2C MY1C MY2C MY1C Features

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Martensitic stainless steel used for the body and guide block. 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 Stroke adjuster 10 Three types available: Rubber stopper, Metal stopper and Shock absorber. 20 Shown with shock absorber 30 40 50 60 70 80 90 Highly flexible piping methods 100 Auto switch capable Two types can be selected, side and axial.

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

D I M E N S I O N S ( I N C H) S TA N D A R D S I N G L E A C T I N G S P R I N G E X T E N D D O U B L E C L E V I S T Y P E NCJ2D_-_T ZZ 50 100 150 200 300 400 500 3.73 3.94 4.23 4.71 3.91 4.12 4.41 4.89 5.31 5.92 6.69 *Clevis Pin Included S Z D GA NB U Bore Size A B C CD CX MM NA R 50 100 150 200 300 400 500 50 100 150 200 300 400 500 H 0.157 0.31 0.93 0.31 10 (3/8) 0.60 0.47 0.55 0.187

Slider Type/Ball Bushing Bearing

32 1000 Outside of cylinder tube with hard chrome plated 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 Auto switch rails on both side faces (with 2 pcs.) 1500 Made to Order Specifications Click here for details 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 40 1500 Symbol Specifications -XB9 -XB13 -XB22 Low speed cylinder (15 to 50 mm/s) Note) Intermediate

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

A larger range of work piece sizes can now be accommodated. 100 M2 m1 200 Allowable moment (Nm) Load weight (kg) 50 100 0 16 25 40 0 16 25 40 Bore size (mm) Bore size (mm) (kg) Load weight (for m1) Allowable moment (for M2) (Nm) MY1H MY2H MY2HT MY1H MY2H MY2HT Bore size mm Bore size mm Series Series 25 40 16 25 40 16 MY2HT MY2H MY1H MY2HT MY2H MY1H 20 15 38 32 80 62 55 120 220 6 26 50 10.8

45

port) Applicable tubing O.D.: 10 4 6 8 L plug connector M plug connector DIN rail holding screw 300 (Lead wire length) 300 (Lead wire length) (Rail mounting hole pitch 12.5) L1 (mm) Stations n L1 L2 L3 L4 2 stations 148 137.5 118 15 3 4 5 6 7 8 9 10 stations 135.5 125 102 16.5 160.5 150 134 13 185.5 175 150 17.5 198 187.5 166 16 210.5 200 182 14 223 212.5 198 12.5 248 237.5 214 17 260.5

Bag Filter

Material FGFC3-40 Carbon steel F-86S FN AL-79S AL-80S FGF3-40 FGFR3-40 FGFC3-40 159 115 3 10(4B) F-90S F-86S V#6500 210 175 115.4 19 18 FGF5-60 FGFS3-40 FGFR3-40 220 167 3 Stainless steel F-87S AL-79S AI-17S EB ES FGFL3-40 FGFS3-40 Note) 2 pieces are required per filter unit.

air-filter-e

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Air Preparation Equipment

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-XC8 to XC11 1 2 Reversed Shaft Change of Rotating Range -XC7 CRB2 CRBU2 CRA1 Refer to How to Order on page 11-7-40. XC8 CRA1 Refer toHow to Order on page 11-7-40.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-XC8 to XC11 1 2 Reversed Shaft Change of Rotating Range -XC7 CRB2 CRBU2 CRA1 Refer to How to Order on page 11-7-40. XC8 CRA1 Refer toHow to Order on page 11-7-40.

VZ5000

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Igm: Leakage current of the servo motor (Found from Table 11.4.) 120 120 100 100 Leakage current Leakage current 80 80 60 60 40 40 [mA] [mA] 20 20 0 2 0 14 100 5.5 38 2 3.5 8 1422 38 80 150 5.5 30 60 100 3.5 8 22 60 150 30 80 Cable size[mm2] Cable size[mm2] a. 200V class b. 400V class Fig. 11.3 Leakage current example (lg1, lg2) for CV cable run in metal conduit 11 30 11.

Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note

Booster Regulator/Air Tank

(Option) 8 OUT port Rc 1/2 22 32 EXH port Rc 1/2 96 4 x 12 130 3.2 116 150 VBA43A-04 (When silencer installed: 224) (When high-noise reduction silencer installed: 230) 404 40 Pressure gauge (Option) 43 OUT side gauge port Rc 1/8 IN side gauge port Rc 1/8 IN port Rc 1/2 221 62 62.8 8 OUT port Rc 1/2 Silencer (Option) 22 32 EXH port Rc 1/2 96 4 x 12 130 3.2 116 150 (When silencer installed