Adsorption Plate

Adsorption surface size SP2130 SP2230 SP2330 SP2430 SP2530 SP2630 50 x 50 40 10 100 x 100 80 10 P1 150 x 150 105 10 P1 200 x 200 130 10 250 x 250 155 10 P2 P2 300 x 300 180 10 Special Order Products Products with a stainless steel body or in other shapes can be manufactured. Consult SMC separately.

High Power Cylinder:

Basic Rc(PT)P Rc(PT)P GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5

3

CK1 CLK2 CLKG Graph (1) Graph (2) 4 6 101 CKQ CLKQ MK50 200 MK63 Note) CK CLK 2 MK32,40 MK50, 63 4 6 102 CKQ 100 MK20,25 MK32, 40 80 Moment of inertia [kgm2] MK16 2 MK20, 25 Arm length [mm] 4 6 103 60 40 MK12 2 MK12, 16 4 6 104 MK63 Note) 20 2 Operating range Operating range 4 6 105 10 2 50 0 100 82 150 200 0.45 0.55 0.2 0.4 0.6 0.1 1 Maximum piston speed Note) [mm/s] Operating pressure [

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

1.63

speed of 200 mm/s.

Card Motor

LEFT RIGHT 80 4 56 DOWN SEL.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

MWB

, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500 Cylinder model: MDWBD32-50-NW-M9BW Double clevis The manufacturing of intermediate strokes is possible.

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

RHC

7 RS Q G 25 25 1500 250 Up to 700 80 12 32 32 1500 250 Up to 1000 80 21 RS H A 40 40 1500 250 Up to 1000 80 33 50 50 1500 250 Up to 1200 RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke), even they

SL5200

100 Flow rate (slpm, N2) 0 40 80 120 160 200 240 280 320 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ.

Air Cylinder Double Acting, Single Rod JMB Series ø 32, ø 40, ø 45, ø 50, ø 56, ø 63, ø 67, ø 80, ø 85, ø 100

, 175, 200, 250, 300, 350, 400 400 67 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 85 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 Precautions Theoretical Output Be sure to read this before handling the products

SFOD-OMT0009CN

200 mm/s mm/s <> 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 2) AWG20 (0.5mm USB JXC-W1-2 -USB DC24V M PWR JXC-W1 2) C PWR DC24V 2) () <> 1.5m () 2) AWG16 (1.25mm JXC-C1 1) 2)PLCDC24V 12.

SFOD-OMT0010

Otherwise, the signal is OFF 80 No.SFOD-OMT0010-B 10.

ARM10/11

0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow rate

ARM10/11

0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow rate

Digital Flow Switch

Max. load current 80 mA Max. applied voltage (NPN only) 28 VDC Internal voltage drop (Residual voltage) NPN output type: 1 V or less (at load current of 80 mA) PNP output type: 2 V or less (at load current of 80 mA) Response time*5 Select from 1 s, 2 s, or 5 s.

IDX-OM-V022

IDF60/70/80/90 Series 9.1 Specifications 9-1 IDX-OM-V022 Chapter 9 Option C 9.2 Precautions for installation and handling IDF60/70/80/90 Series 9-2 IDX-OM-V022 Chapter 10 Option L Chapter 10 Option L Option L: Dryer with heavy duty auto drain.