Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150

Compact Slide Series MXH

68 4 20 20 30 68 20 4 25 78 40 30 4 30 40 78 30 4 40 50 88 6 20 20 50 60 98 25 6 25 60 108 60 30 6 30 D-X Individual -X 27 Series MXH Dimensions: 20 LT 31 20 J x M5 x 0.8 Depth 9.5 LA LB 14 3 x M6 x 1.0 through Bottom hole dia 5.1 6 x 9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4 x M5 x 0.8 x 4 l 4 x M5 x 0.8 Depth 11 4 x M5 x 0.8 depth 8 Guide rail width 12

HRX-OM-O021

40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating

HRX-OM-W058

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] 3 wires x14AWG HRS018-A-20-R HRS030-A-20-R 1-phase 10 30 (3 wires x 2.0mm2) 200, (including ground) Cable diameter: 8.5 to 11.5 mm 200-230V AC 230 HRS0-A-20-T-R (50/60Hz) (High pressure pump 15 30 [Optional]) HRS-R Series 3.3 Installation 3-9 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.3.3 Preparation

HRX-OM-X027

40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.4-1 Cooling capacity(HRS050-A-20-R) 9.5 Heating capacity 2000 2000 Ambient 45oC 1500 1500 Ambient 40oC Ambient 45oC Heating Capacity [W] Heating Capacity [W] Ambient 40oC 1000 1000 Ambient 32oC Ambient 25oC Ambient 32oC Ambient 25oC 500 500 Ambient 5oC Ambient 5oC 0 0 0 10 20 30 40 50

Table of Contents

JIS Symbol Double acting, Single rod 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 For "Long Stroke", refer to P. 36.

CE

VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA NPN open collector Max. 30 VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA RS Q G Output transistor mode 80 to 120 VAC 50/60 Hz 21.6 to 26.4 VDC Power supply voltage RS H A 10 VA or less 5 W or less Power consumption RZQ Between case and AC line: 1500 VAC for 1 min.

CE

VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA NPN open collector Max. 30 VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA RS Q G Output transistor mode 80 to 120 VAC 50/60 Hz 21.6 to 26.4 VDC Power supply voltage RS H A 10 VA or less 5 W or less Power consumption RZQ Between case and AC line: 1500 VAC for 1 min.

AW

38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21 AC31 AC41 * Without relief valve option ** With relief valve option mm AC-A A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21A

Cylinder with Lock Series CNS

Max. load current or load current range (mA) D-A53 None PLC 5 to 50 24VDC 5 to 50 24VDC 5 to 25 100VAC Relay, PLC D-A54 5 to 12.5 200VAC None D-A56 20 IC circuit 4 to 8VDC 50 24VAC/DC or less None D-A64 25 100VAC Relay, PLC 12.5 200VAC None 30 Max. 24VDC None IC circuit, PLC D-A67 (2 color indication) 5 to 40 Relay, PLC 24VDC D-A59W None PLC 5 to 50 D-A33 24VDC 5 to 50 24VDC D-A34

Heavy Duty Stopper Cylinder

Cylinder stroke 30 40 30 mm (50, 63) Flange side Auto switch 40 mm (80) Nil Nil Without auto switch (Built-in magnet) Action D B T For applicable auto switches, refer to the table below. Auto switches are shipped together, (but not assembled).

New

Z Dimensions (mm) Model A B C E H I X Y Z J K L S 250 250 250 30 30 30 VXF25B< VXF26B< VXF27B< VXF28B< 182 206 206 206 18.3 34 34 34 90 100 110 120 78.4 78.4 78.4 78.4 118 121 121 121 59.8 59.8 59.8 59.8 47 50 50 50 24 24 24 24 18.6 18.6 18.6 18.6 30 30 30 30 17 17 17 17 Grommet Grommet (with surge voltage suppressor) DIN terminal Model Q R U Q R U 27 27 27 27 R U T 64.5 64.5 64.5 64.5

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

4.0 10.0 Position loop gain 120 84 120 84 Speed loop gain 3000 4000 3000 4000 Speed integral compensation 20 50 20 50 7 16 8.

High Power Cylinder Series RHC

52.5 50 to 100 EA EA GA NE 8 x J 2 x Rc P GA WH H1 MM D E E B C AL K FA JC JC FB A NF Width across flats KA C S + Stroke H B ZZ + Stroke (mm) A AL B C D EA FA FB GA H E Bore size (mm) 50 0 70 53 20 50 0.062 62 23 10 16 80 35 32 63 0 55 0.074 20 58 80 60 10 16 80 23 35 32 80 0 75 25 61 95 65 0.074 90 23 10 20 37 40 100 0 63 116 90 30 80 0.074 20 95 25 10 40 37 H1 J JC K KA MM NE NF S P WH

OMR0032

Specifications LAT3-10 Stroke 10 mm, Resolution 30 m LAT3-20 Stroke 20 mm, Resolution 30 m Card Motor 8 options LAT3-30 Stroke 30 mm, Resolution 30 m (Refer to the table Product LAT3M-50 Stroke 50 mm, Resolution 5 m Number on the right) LAT3F-10 Stroke 10 mm, Resolution 1.25 m LAT3F-20 Stroke 20 mm, Resolution 1.25 m LAT3F-30 Stroke 30 mm, Resolution 1.25 m LAT3F-50 Stroke 50 mm, Resolution

MXH Series Compact Slide

) Displacement (mm) Displacement (mm) 40 50 0.2 0.2 25, 30 40 Stroke Stroke Stroke 15, 20 0.15 0.15 25, 30 5, 10 0.1 0.1 15, 20 5, 10 0.05 0.05 0 0 0 0.17 0.33 0.50 0.67 0.82 0.20 0 0.37 0.57 0.76 0.96 Yaw moment My(Nm) Pitch moment Mp(Nm) 1 N m = 0.7375 ft lb 1 N m = 0.7375 ft lb MXH16 MXH16 0.16 0.3 60 0.14 60 50 0.25 50 Displacement (mm) 0.12 40 0.2 40 0.1 25, 30 25, 30 15, 20 0.15

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

Guide Cylinder/Compact Type Series MGC

, 125, 150 200, 250, 300 107 19 16 22 75 40 M8 x 1.25 depth 16 37 160 34.5 50 140 8.6 14 depth 10 M10 x 1.5 depth 18 142 25 19 22 110 45 M10 x 1.5 depth 20 42 194 37 80 170 10.5 17 depth 12 M12 x 1.75 depth 21 Bore size (mm) P Note 2) I J K L M N O Q R S T U V W X Y Z WH 20 25 32 40 50 60 80 86 80 25 44 38 25 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 30 52 70 95 46 32 M6 x 1 M5 x 0.8 21

Compact Cylinder with Air Cushion Series RQ

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

Series SV

5 50 l 31.3 14.9 30 5 34 50 48 l 5 1 2 1 2 5 4 3 4 3 Socket connector pin arrangement Socket connector pin arrangement Terminal no.