Water-cooledThermo-chiller 75 75 60 60 45 45 Outlet pressure [50 Hz] Return port pressure 30 30 15 15 Return port pressure 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 2.1 gpm (8 L/min)., the shutdown alarm activates and operation stops.
75 92 92 30 34.5 39 41 6.5 6.5 6.5 6.5 10.5 10.5 10.5 10.5 31 35 43 45 13.5 Electrical entry Conduit terminal Conduit Faston Port size P Model Q R Q R Q R S T 71 71 73.5 73.5 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 50 50 52.5 52.5 57.5 (64) 62.5 (68.5) 70.5 (77) 73.5 (79) 25.5 25.5 28 28 63.5 (70) 68.5 (74.5) 76.5 (82.5) 79.5 (85) 100 (106.5) 108 (114.5) 119 (126) 125 (131
, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142
C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach
50 to 2000 3 300 to 400 300 to 1500 350 to 2000 500 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50
Tightening Torque for Piping Connection thread Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Rc1 1/2 Rc2 Rc2 1/2 Rc3 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 48 to 50 4. When connecting piping to a product Avoid mistakes regarding the supply port etc. 5.
4.0 10.0 Position loop gain 120 84 120 84 Speed loop gain 3000 4000 3000 4000 Speed integral compensation 20 50 20 50 9 16 10.
(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95
Fittings & Tubing Air Cylinders Rotary Actuators Note 1) Actuation Voltage Electrical entry Light/surge voltage suppressor Sonic conductance C [dm3/(sbar)] 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal { } 4/25/3 (A/BEA/EB) Closed center Exhaust center
Diaphragm Nozzle Seat 316L SS Electropolish + Passivation 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 0.00 0.03 0.07 0.10 0.14 0.17 0.21 0.24 0.28 0.31 0.34 0.38 0.41 0.45 0.48 0.52 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 Delivery pressure (MPa) Delivery pressure (psig) 316L SS PCTFE (Option: Vespel, PTFE) PCTFE (Option: PTFE) Dimensions inch (mm) AZ1000 2.12 (53.8) Max. 5.0 (127.0
75 25 50 75 Weight [kg] Basic 0.24 0.29 0.34 0.47 0.55 0.65 Compact 0.41 0.49 0.59 Note 1) Pushing force accuracy is LEPY6: 30% (F.S.), LEPY10: 25% (F.S.).
, 75 30, 50 75, 100 30, 50, 75 100, 125, 150 50, 75 50, 100 50, 100 150 16 3 25 9 25 5 Miniature Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Rod type Slide table type Series LEPS Basic type Series LER High precision type Series LEPY Series LERH CAT.ES100-94 CAT.ES100-92 Series LER Series LEPY Series LEPS Max. speed (/s) Rotating torque (Nm) Size Size Max. work load (kg
Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 15mm 10mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 20mm 15mm 10mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt
Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.
Coil voltage 1 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others Valve style Pilot valve style 2 3 VQZ115l-lLl VQ110l-lMl 4 VQZ115l-lMl VQ110l-lLl 5 6 9 Consult SMC when requiring grommet, AC specification and others. 2.10-39
Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.
. 3) 3 3 (106.6) 57.6 21 41.5 (69.5) 2 1 56 43.8 43.8 (11.4) 28 37.5 73 73 10 37.5 77 75 45.5 3/4" [1(P) port] 2 x 3/4" [3(R) port] 164.5 3/4" [2(A) port] Should be normally open.
) 57.6 21 41.5 (69.5) 2 1 56 43.8 43.8 (11.4) 28 37.5 73 73 10 37.5 77 75 45.5 3/4" [1(P) port] 2 x 3/4" [3(R) port] 164.5 3/4" [2(A) port] Should be normally open.
for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins