Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

12 16 0.1 5 10 20 30 40 50 100 200 0.01 5 10 20 30 MXW Overhang L (mm) Overhang L (mm) Maximum Speed: Up to 400 (mm/s) Graph (5) Graph (2) Maximum Speed: Up to 300 (mm/s) MXJ 0.3 50 40 30 20 MXP 0.2 10 MXY 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 MTS 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.01 0.1 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3)

Modular F.R.L. Units

R 5.5 7 7 9 9 S 12 14 14 18 18 U 3.5 4 4 5 5 V 29 41 41 48 48 AC20C-A AC25C-A AC30C-A AC40C-A AC40C-06-A 126.4 167.4 167.4 220.4 235.4 87.6 115.1 115.1 147.1 149.1 23.5 23.5 27 33.5 33.5 30 30 38.4 38.4 41.6 55.1 55.1 72.6 77.6 40 50 50 75 75 23.4 30.5 30.5 36.1 39.6 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 1/8 1/8 1/8 1/8 1/8 Model Semi-standard specifications Optional specifications

Large Size Vacuum Module: Series ZR

Without lead wire (housing and 3 sockets) ZS-10-A With lead wire ZS-10-5ALead wire length Nil 0.6 m 3 m 5 m Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. 30 50 Example) ZSE2-0R-15CN . 1 pc. ZS-10-5A-50 . 1 pc.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-A5 (With indicator light) D-A53 D-A54 D-A56 Auto switch part model Applicable load PLC Relay, PLC IC circuit Load voltage 24 VDC 200 VAC 24 VDC 100 VAC 4 to 8 VDC (3) Maximum load 5 to 25 mA 20 mA 5 to 50 mA 5 to 12.5 mA 5 to 50 mA current and range Contact protection circuit None Built-in None Internal

Compact Cylinder

to 50 21 17.5 27.5 24 8 8 30 5 29.5 M4 x 0.7 36 2.5 6 3.5 21 3.5 7.5 32 8 25 5 to 50 23.5 19 30 25.5 7 10 33.5 5 M5 x 0.8 40 2.5 8 4.5 24 3.5 8 36 8 32 5 to 50 26 21 32.5 27.5 12 12 41 5 M6 x 1.0 51 2.5 10 5 31 4.5 9 43.5 10 40 5 to 50 31 25 37.5 31.5 13 14 47 6 M8 x 1.25 60 3.5 12 6 37 4.5 11 50.5 10 6 JCQ Series Bore Size Standard (Through-hole): JCQ, JCDQ 50 to 100 50 to 80 Both ends

/

Orifice diameter Material 9 (50 mm) 8 (40 mm) 7 (35 mm) 6 (25 mm) 5 (20 mm) 4 (15 mm) Solenoid valve model (Port size) 3 (10 mm) VXED23 Model Body Seal VXED21 VXED22 40 (40A) 50 (50A) 02 (1/4) 03 (3/8) 04 (1/2) 06 (3/4) 10 (1) 32 (32A) Brass (C37) Thread Port symbol (Port size) NBR Stainless steel Flange Table (2) Solenoid Valve Option Table (3) Rated Voltage Electrical Option Rated

Compact Cylinder with Lock Series CLQ

B 69 78.5 CL CL B 88 98.5 19.5 22.5 78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18 20 8 10 16 20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through

0.4

1 2 1 2 28.3 5 4 3 4 3 48 34 18 30 5 31.3 30 5 Socket connector pin arrangement Socket connector pin arrangement 50 L 50 L A code A code 14.8 SPEEDCON 44.5 L 50 2 1 5 PCA 1401804 Cable length (L) 1500 [mm] 3000 [mm] 5000 [mm] 4 3 M12 SPEEDCON 5.00.15 5.00.15 1401804 1401805 1401806 Socket connector pin arrangement A code Terminal no.

HRX-OM-R005

Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2 Method of resetting data reset function . 5-50 5.18 Accumulated time reset function . 5-51 5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated

JXCx-OMU0026

Next, move the actuator to a 100mm position by moving it 5 times consecutively, 10mm at a time, at a speed of 50 mm/s (Step No. 2).

HRX-OM-O021

Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-48 5.17 Data reset function . 5-50 5.17.1 Data reset function . 5-50 5.17.2 Method of resetting data reset function . 5-50 5.18 Accumulated time reset function . 5-51 5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated

7.5

entry) Internal pilot / Built-in silencer External pilot SUP/EXH block assembly 1 SJ3000-50-1ARS-ll X port: Metric size 4 Inch size 5/32" SJ3000-50-3A-ll External pilot / Built-in silencer (Inch size) N7: With 1/4" one-touch fitting (straight) N9: With 5/16" one-touch fitting (straight) For different pressures, internal pilot Note 1) For different pressures Note 1) Internal pilot / Built-in

58

9 1/ 5 stroke 194.5 M36 x 1.5 34.5 3/4 106 50 25 120 301 75 40 141 322 The minimum stroke with rod boot is 30 mm or more.

13

Vacuum pressure Suction flow rate 13-5-5 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS-

CJ2X/CUX/CQSX/CQ2X/CM2X

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

CJ2X/CUX/CQSX/CQ2X/CM2X

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

@6@7EX500-AP 050 S Cable length (L) Connector specification Angle connector type 010 1000 mm 050 5000 mm S Straight A Angle M12 14.9 Straight connector type 14.9 1 M12 6 6 5 1 2 2 28.3 5 4 3 4 3 30 5 50 40.7 27 30 5 50 L 25.3 Socket connector Socket connector pin arrangement A-coded (Normal key) pin arrangement A-coded (Normal key) L Item Specifications Cable O.D. 6 mm Conductor nominal

CNG

Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-5-6 Model Selection Series CNG Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 200 200 100 100 40 30 40 50 30 40 50 32 Load weight: m (kg) 40 25 Load weight: m (kg) CL 20 20 20 32 CL1 10 10 25 20 MLGC 5 4 3 5 4 3 CNG

5 Port Solenoid Valve SY Series

Straight type 49 1 V100 Cable length 1 500 mm 300 mm 2 3 4 7 1000 mm DIN Terminal Type 2000 mm 5000 mm 5 D V115 Light/surge voltage suppressor Rated voltage Nil Without light/surge voltage suppressor S Z With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) 5 24 VDC 6 12 VDC 50 60 1 100 VAC Hz 50 60 2 200 VAC Hz DOZ is not available.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

2 1 to 5 V 1 to 5 V 4 to 20 mA 1 to 5 V 4 to 20 mA Analog output Operating temperature C 0 to 50 0 to 50 10 to 60 1-color 2-color Digital display Front face IP65 Others IP40 IP40 IP65 IP40 Enclosure Wiring specification Connector Connector Grommet Key lock, Peak/Bottom values holding, Auto-preset, Auto-shift, Display calibration, Anti-chattering Major setting function M reducer M R, NPT reducer