Fluoropolymer Piping Equipment

80 100 120 140 160 180 200 0 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) Temperature (C) 942 LQ1/LQ3/LVN/LQHB Series Applicable Fluids Material and fluid compatibility check list for high purity fluoropolymer fittings Chemical Compatibility LVC Acetic acid 100% LVA Acetone 100% Note 1,2) LVH Ammonium fluoride 40% Ammonium hydroxide 30% LVD Butyl acetate 100% LVQ Methylne

VNB

VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other 1 2 3 4 5 6 7 9 Coil rated voltage 1 2 3 4 5 6 7 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Electrical entry G C TNote) D DL Option Electrical entry/With indicator light/ surge voltage suppressor Grommet Conduit Conduit terminal DIN terminal DIN terminal with

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

AC Servo Motor Driver (Pulse input type)

Rotations per Second Distance of movement per second Distance of movement per rotation Rotation Speed (rpm) = Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) 46 - 5.6.3 Acceleration/deceleration Time Configuation < Acceleration/deceleration Time Configuration> Acceleration/deceleration time (ms) configuration: The acceleration/deceleration time sets the amount

Process Valve

Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Orifice dia.

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

70pvvna

100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil A B Non-locking push type Non-locking extended type Locking slotted type 1 2 3 4 5 6 7 9 1 2 3 4 5 6 7 9 Electrical entry Grommet Conduit Conduit terminal DIN terminal DIN terminal with indicator light Option G C T Note) D DL Option Option Option Note) When the electrical entry

VNC

Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage suppressor With light/surge voltage suppressor With indicator light Option VDW L Light/Surge voltage suppressor Nil Z VQ Except 12 VDC, 240 VAC, other voltages

High Pressure Coolant Valve

./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4 4 1 7 6 5 24 VDC 12 VDC 240 VAC 50/60 Hz Semi-standard For other rated voltages

VNH

Gasket material A B NBR seals FKM seals Rated voltage Nil Air operated 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Valve size Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1 2 3 4 Rc Rc Rc Rc1 10A 15A 20A 25A 1 2 3 4 4

Series MXP Precision Air Slide Table

N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 1 N = 0.2248 lbf 165

LMU100/200 Series Mist Spray Unit

Contact capacity 50 VA AC, 50 W DC 1 2 5 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 24 VDC Pressure gauge for supply pressure Pressure gauge for tank pressure Pilot valve Recommended Equipment AIR BLOW Supply pressure AIR It is recommended to use each mist spray unit type with the mixing valves, magnet holders, branch pipes and nylon tubes listed in the table below.

JXCx-OMT0005CN

JX C D 1 LEFS16B-100B-S1CD17S LEFS16B-100 D DeviceNet DeviceNet 1 1 DC24V S T T 7 8 DIN <> LEHZ10K2-4 < >LECPMJ SVRE 1.5 7 - 2.3 *1 DeviceNet PLC JXC-CD-TJXC-CD-S DC24V P5062-5 *1 LE-CP-LE-CP---S ENC *2 120.3 120.3 mm mm MOT 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 PWR DC24V USB A-miniB type JXC-CPW AWG200.5mm 2

SFOD-OMT0009CN

200 mm/s mm/s <> 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 2) AWG20 (0.5mm USB JXC-W1-2 -USB DC24V M PWR JXC-W1 2) C PWR DC24V 2) () <> 1.5m () 2) AWG16 (1.25mm JXC-C1 1) 2)PLCDC24V 12.

JXCx-OMT0001CN

200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 <> 2) AWG20 (0.5mm USB JXC-W1-2 DC24V USB M PWR 2) JXC-W1 C PWR DC24V 2) 1.5m () <> JXC-C1 2) AWG16 (1.25mm 1) 2) PLC5 EtherNet DC24V 3) P1 P2 EtherNet/IP 14 USB (JXC-W1-2) 34 CI3 4Modbus -9No.JXC-OMT0001CN-C 3.

LECA6_C

CN1(P.18) 4.2 CN2CN3: LE-CA-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O (P.27) 6.3 (P.24) 17 - 5.

LECP6_C

CN1(P.18) 4.2 CN2CN3: LE-CP-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 USB 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O P.27 6.3 /(P.24) 17 - 5.

Table of Contents - Tubing

L* N x 4 N x 8 N x 12 N x 6 N x 12 N x 18 N x 8 N x 16 N x 10 N x 20 N x 12 N x 24 D 18 28 28 24 37 37 31 42 52 52 67 67 TCU0425-1N-X6 TCU0425-2N-X6 TCU0425-3-N-X6 TCU0604-1-N-X6 TCU0604-2-N-X6 TCU0604-3-N-X6 TCU0805-1-N-X6 TCU0805-2-N-X6 TCU1065-1-N-X6 TCU1065-2-N-X6 TCU1208 -1-N-X6 TCU1208 -2-N-X6 LX5.9 + 200 LX4.4 + 200 LX2.9 + 200 LX5.3 + 200 LX3.8 + 200 LX2.5 + 200 LX5.2 + 200 LX3 +

Series VQ Base Mounted Metal Seal/Rubber Seal

Lead wire color 24VDC 100, 110 200, 220 V AC V AC Black (Yellow) [Yellow] Lead wire color 24VDC 100, 110 200, 220 VAC VAC SOL.A SOL.A () () Black (Blue) [Red] Red (Blue) [Red] COM(+) COM(+) Red (Blue) [Red] SOL.B White (Gray) [Gray] () Single solenoid VQ0 double VQ1000 double solenoid Note: ( ) is for 100, 110VAC. [ ] is for 200, 220VAC Plug connector lead wire length Note) The length of

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SCFM Flow Length of Run Feet Compressor HP 25 50 75 100 150 200 300 500 100 6 1/2 1/2 1/2 1/2 1/2 1/2 1/2 3/4 3/4 1 18 1/2 1/2 1/2 3/4 3/4 3/4 3/4 1 1 3 30 3/4 3/4 3/4 3/4 1 1 1 1-1/4 1-1/4 5 45 3/4 3/4 1 1 1 1 1-1/4 1-1/4 1-1/4 7-1/2 60 3/4 1 1 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 10 90 1 1 1-1/4 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 2 15 120 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 1-1/2 2 2 20 150 1-1/4 1-1