39

, 75 , 90 , 105 A photograph shows handle unit L.

DOC1023126

I/O Connector specifications . 70 .. Details of parallel input/output signals . 70 .. Parallel input/output specification . 72 .. Parallel input/output type circuit (NPN and PNP specifications) . 72 Setting .73 . Operation data . 73 . Parameter . 75 Optional parts (sold separately .77 . Power supply cable . 77 . I/O cable . 77 . Setup communication cable . 78 .

Mechanically Jointed Rodless Cylinder Series MY2

12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PC 7.2 8.2 5.5 PE 3.7 2.7 5 PG 4 6 9 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PD 2.8 6.6 8.5 PA 40 60 100 PH 5.1 7.5 9.5 Model MY2H16G MY2H25G MY2H40G P indicates cylinder supply ports.

VEX1

DXT 170-75-1 Connection/Disconnection of a plug q Push the connector straight on the pins of the solenoid, making sure the lip of the lever is securely positioned in the groove on the solenoid cover. w Press the lever against the connector and pull the connector away straightly from the solenoid.

2/3 Port Valve

Refer to p.4.1-74, 4.1-75 for specifications and models.

Rotary Actuator/Vane Style Series CRB1

0 0.052 22 R7.5 R30 1/8 82 98 80 34 45 3 8 21 5 17 60 75 14 39 83 52 8 9 CDRB1BW 63-E 27 25 CDRB1BW 8030 30 20 M8 x 1.25 depth 12 17 0.006 0.017 30 0 0.052 R8 R30 1/4 95 110 90 34 53.5 3 8 21 5 19 70 88 15 48 94 63 7.5 9 CDRB1BW 80-E 29 30 CDRB1BW 10032 35.5 24 M10 x 1.5 depth 13 25 0.007 0.020 45 0 0.062 R11 R30 1/4 125 140 103 39 65 4 13 21 5 28 80 108 11.5 60 120 78 7.5 11 CDRB1BW 100

Clamp Cylinder with Lock

Pedestal KZZ KL2 KS KY 80 15 KQ 35 45 50 30 95 KL1 5 KX 15 25 50 KC KZ 57 16 34 KZZ KL1 KL2 KX KZ KY KS KQ KC Type Applicable cylinder Bore size 50 63 40 CKA-K075 CLK2lA40-75Y, CLK2lA50-75Y, CLK2lA63-75Y 69 59' 400.5 404 396 (406) 0 167 75 132 222 35 70 CKA-K100 CLK2lA40-100Y, CLK2lA50-100Y, CLK2lA63-100Y 83 58' 435.5 439 431 (441) 0 177 75 142 232 45 90 CKA-K150 CLK2lA40-150Y, CLK2lA50-150Y

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

85.5 59 70 100 110.5 75 86 112.5 123 91 102 125 135.5 107 118 137.5 148 123 134 162.5 173 139 150 175 185.5 155 166 187.5 198 171 182 212.5 223 187 198 225 235.5 203 214 237.5 248 219 230 250 260.5 235 246 275 285.5 251 262 287.5 298 267 278 300 310.5 283 294 325 335.5 299 310 337.5 348 315 326 350 360.5 331 342 362.5 373 L1 L2 L3 L4 4-14-15 Body Ported 16 Series VQZ100/200/300 Dimensions

Vacuum Module Series ZX

57.4 Air pressure SUP port (PV) ZY 20 1 11.5 7 ZF A: Release flow rate adjusting needle with lock nut 8 8 ZP Manual override (Non-locking) Bracket C Standard accessory Pilot valve for supply (Needle fully open) 2 x 3.6 (Mounting hole) SP Release valve Release pressure output port (D) M5 (or M6) ZCUK Pilot pressure EXH port (PE) M3 Release flow rate adjusting needle Interface plate AMJ A 70

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

85.5 20 331 342 362.5 373 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350 360.5 12 203 214 237.5 248 13 219 230 250 260.5 14 235 246 275 285.5 7 123 134 162.5 173 8 139 150 175 185.5 9 155 166 187.5 198 10 171 182 212.5 223 11 187 198 225 235.5 4 75 86 112.5 123 5 91 102 125 135.5 6 107 118 137.5 148 3 59 70 100 110.5 L1 L2 L3 L4 2.10-15

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS32-10 S SS ZZ Z 10 104 134 40 20 114 144 50 30 124 154 50 40 134 164 50 21-/2210-/11-/12CXS32-20 CXS32-30 CXS32-40 CXS32-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 144 174 60 21-/2210-/11-/12100 194 224 90 CXS32-75 CXS32-100 75 169 199 70 21-/2210-/11-/1221-/2210-/11-/12859 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Specific Product Precautions Air Preparation Equipment

LJ1H

Model Regenerative Absorption Unit Selection Guide Allowable Moment (Nm) LJ1H2021PF-K (Power supply voltage 100VAC) LJ1H2022PF-K (Power supply voltage 200VAC) Allowable static moment Pitching Yawing m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Allowable dynamic moment 71 75 25 50 75 100 125 150 175 200 225 250

Fieldbus system EtherCAT compatible SI Unit

or 1342 22, 38, 70 or 1342 IO-Link master Class B EX600-LBB1 1 (4 ports) 22, 38, 70 or 1342 22, 38, 70 or 1342 1: Not available for EX600-SEC1/2 compatibility mode. 2: The allocated bytes of the IO-Link master can be changed by the IO-Link master size setting switch. -80No.EX-OMA1023 Details of I/O map of the IO-Link master unit I/O map of the IO-Link master unit is described below.

DOC1023125

(Becomes close to the trapezoidal acceleration as the setting value reaches 0) Acceleration and deceleration ratio 10 10 10 10 to 100 EQFS251 to 50 EQFS321 to 70 EQFS401 to 70 Torque when held *2 50 70 70 Sets the torque when stopped after the positioning operation. (Unit: %) H 140 80 80 Sets the position loop P constant.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

In this case, bring the ambient temperature within 0 to 45 (32 to 113 ), or use it at 75% or smaller effective load ratio.

Digital Flow Switches

Note 6) This product conforms to the CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A750, 550 PF2A711, 511 PF2A710, 510 3.0 1.0 10 2.5 0.8 8 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 5 2.5 7.5 0 100 10 25 50 75 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PF2A721, 521 PF2A751

MY2

12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PC 7.2 8.2 5.5 PE 3.7 2.7 5 PG 4 6 9 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PD 2.8 6.6 8.5 PA 40 60 100 PH 5.1 7.5 9.5 "P" indicates cylinder supply ports.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PC 7.2 8.2 5.5 PE 3.7 2.7 5 PG 4 6 9 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PD 2.8 6.6 8.5 PA 40 60 100 PH 5.1 7.5 9.5 Model MY2H16G MY2H25G MY2H40G P indicates cylinder supply ports.

Smooth Cylinder

, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications and auto switch information not provided below are the same as those of the

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications and auto switch information not provided below are the same as those