LA-OMP0023

360 Table weight [g] 50 70 90 110 Note 1) Continuous thrust can be generated and maintained continuously.

XSA Series

-6 Leakage Pam3/s Internal 1.310-9 Note4) External 1.310-11 Piping method Face seal fitting and compression fitting / (Rc, NPT) Threaded ports Port size Inch Face seal fitting Compression fitting 1/4 3/8 1/4 3/8 Rc, NPT 1/8 1/4 3/8 Rated voltage Note 5) 100/110/200/220/230/240/24/48VAC 12/24VDC Ambient and fluid temperature oC 5to60 Power consumption [W] Note 6) DC polar indication 4.5 7

VM

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

IFW5 10 03 N 1 1 PSE Z I SE3 Diaphragm style flow switch PS Light 0 None Z I SE1 2 1 With neon light (110 VAC, Red) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

MXS

160 250 Note) Refer to p.3.11-5 for cautions on end lock.

pa

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

Manifold Specifications

, B port location 1(P), 3(R) port 4(A), 2(B) port Port size Valve (1) effective area (mm2) (Cv factor) 1 4: 0.48, 4 3: 0.85 VZ1120 Socket: 26 pins MIL, with strain relief (Conforming to MIL-C-83503) Applicable flat ribbon cable connector Internal wiring + COM (For COM specifications, specify them separately.) 1 3 5 6 VZ1120MOZ-M5 Applicable valve model Rated voltage 100 VAC 50/60 Hz, 110

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

R 5 8 12 RR 5.3 8.5 11 PD 23 29.2 36 QQ 16.4 20.4 25.5 NV 4.5 6.6 9 NW 85.2 124.8 150.1 NX 7.3 10.5 14 PA 44 63 113 PB 80 110 132 PC 4 9.4 8.5 PP 5.3 8 16 Q 140 185 290 Model MY2HT16G MY2HT25G MY2HT40G X 7 9 12 Y 5 8 12 Z 160 210 330 U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 XX 12 14 23 "P" indicates cylinder supply ports.

Digital Flow Switches Series PF2A

Temperature characteristics Current consumption (No load) Weight Note 3) Port size (Rc, NPT, G) Detection type Indicator light Operating pressure range Proof pressure Accumulated flow range Note 4) 0 to 50C 5% F.S. or less 1% F.S. or less 2% F.S. or less 3% F.S. or less (15 to 35C, based on 25C), 5% F.S. or less (0 to 50C, based on 25C) 160 mA or less 170 mA or less 290 g 150 mA or less 250

High Purity Chemical Valve

T) (mm) W Model LVC20 LVC30 LVC40 LVC50 LVC60 Dimensions 64 (mm) S T Model LVC3m LVC4m LVC5m 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Unit type) Suck back (Single type) 50 3.5 4.5 37 30 44 37 30 44 4 x 3.5 20 (Max. 11.5) (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 51 51 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 466 Series LVC Manifolds Manifold Specifications

Thermo-chiller/Rack Mount Type

Revision History Single-phase 100 VAC (50/60 Hz) and 110 VAC (60 Hz) power supplies have been added. The circulating fluid temperature, flow rate, and electric conductivity setting/display range have been expanded. Number of pages has been increased from 32 to 36. XY The HRR050 (air-cooled type, water-cooled type) has been added.

Micro-Mist Separator with Prefilter Series AMH

50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76 12 4.5 55 37 1/2 3/4 225 AMH450 232 1 AMH550 3/4 1 259 AMH650 1 1 1/2 311 5 SeriesAMH (mm) Accessory AMH850 0: With auto drain (N.O. type) For AMH850 a: 3/88 female thread Optional Specification LL 0 T: With element service indicator 75 .

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9 39 29 5 8.5 18.5 K 4.8 19 0.3 29.2 30 Z ZZ G (NN 1) x H H 16 8 16 8 A B 4.2 4.2 9 8.5 9 1 A B NN x M5 x 0.8 thread depth 10 5 HA GA 4H9 ( ) depth 4 +0.030 0 4H9 ( ) depth 4 +0.030 0 B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

IFW5 10 03 N 1 1 PSE Z I SE3 Diaphragm style flow switch PS Light 0 None Z I SE1 2 1 With neon light (110 VAC, Red) 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 10 1 to 10 l/min 4 With neon light (220 VAC, Green) 20 10 to 20 l/min Simple flow setting Without removing the cover, you can set with a screwdriver from

MY2

Standard Strokes Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 16 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1000 25, 40 1500 Strokes are manufacturable in 1mm increments, up to the maximum stroke. However, add "-XB10" to the end of the part number for non-standard strokes from 51 to 599.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 16 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1000 25, 40 1500 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. However, add -XB10 to the end of the part number for non-standard strokes from 51 to 599.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MX MTS 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 MY With stroke adjuster for auto switches Stroke adjuster CY 10 Three types (rubber stopper, metal stopper, shock absorber) are available.

PF3W7x.eng

Excessive accumulated flow 5% of maximum rated flow [00.05] 00.05 gal/min (4 L type) [00.21] 00.21 gal/min (16 L type) [000.5] 000.5 gal/min (40 L type) [001.3] 001.3 gal/min (100 L type) [000.3] 000.3 gal/min (250 L type) Temperature upper limit exceeded The fluid temperature is above 110 oC. Reduce the fluid temperature.

PF-OMN0009_C

L/min ) (250 L/min ) [cm] -37No.PF-OMN0009CN-F PVC 3F.S.11 cm IN OUT PF3W511/521(PVC ) (100 L/min ) (250 L/min ) [cm] -38No.PF-OMN0009CN-F PF3W504S PF3W520S [] [] P: P: PF3W540S [] P: -39No.PF-OMN0009CN-F () (PF3W504/520/540) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A