Refrigerated Air Dryer

AMD AMH Data A: Inlet Air Temperature Data B: Ambient Temperature Data C: Inlet Air Pressure AME Inlet air temperature Ambient temperature Inlet air pressure MPa psi Correction factor F C Correction factor AMF Correction factor IDFB3E to 37E IDFB55E, 75E 1.31 F C 77 90 95 100 104 25 32 35 37.8 40 75 100 110 120 125 150 175 200 232 0.53 0.70 0.76 0.83 0.86 1.03 1.21 1.38 1.60 1.24 0.95 ZFC

CG5-S

38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 176 80 to 750 130 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 210 100 to 750 131 110 10 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 26 8 M26 x 1.5 100 1/2 212 Flange brackets and plug bolts are installed before shipment from factory.

3-Position Rotary Table

(CCW: Counterclockwise, C: Center, CW: Clockwise) C C C C CW CCW CW CCW CW CCW CW CCW Left 90: Right 90 Left 45: Right 45 Left 90: Right 30 Left 60: Right 90 Working Principle This model uses a 3-position 5-port solenoid valve (pressure center).

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

Compact Guide Cylinder Series MGQ

MGF 100 B0.2 MGZ 80 63 100 MGT 50 40 A0.2 D By-pass port dia. 32 25 Load mass (kg) 10 20 16 A0.2 12 D(mm) MGQL 8 10 12 15 18 18 22 22 28 33 A (mm) B (mm) C (mm) Bore size (mm) Hexagon socket head cap screw MGQM 10 12 14 18 22 22 27 27 31 39 1 12 16 20 25 32 40 50 63 80 100 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 40 42 52 62 80 90 100 110

CG1

are not attached for bore size 80 and 100.

Digital Flow Switch ( compatible)

The time from when the flow is applied as a step input (when the flow rate changes from 0% to 100% instantaneously) until the switch output turns ON (OFF) at 90% of the rated flow rate. Response time (analogue output) Ripple Indicates pulsation. S Set flow range The range of ON/OFF threshold values that can be set for products with a switch output.

Digital Flow Switch ( compatible)

The time from when the flow is applied as a step input (when the flow rate changes from 0% to 100% instantaneously) until the switch output turns ON (OFF) at 90% of the rated flow rate. Response time (analogue output) Ripple Indicates pulsation. S Set flow range The range of ON/OFF threshold values that can be set for products with a switch output.

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

MGQ

39 12 16 20 25 32 40 50 63 80 100 40 42 52 62 80 90 100 110 140 170 18 22 26 32 38 38 44 44 56 62 36 38 46 56 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 C dimension for a bore size of 32 to 100 is identical to the A dimension. 8-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Series AK1000

0.69 90 0.62 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 70 0.48 60 0.41 50 0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Compact Cylinder

-100 M8 x 60L x 135L 60 135 15 CVQB405 x 65L M5 x 45L 65 45 20 10 x 70L x 50L 70 50 25 15 x 75L x 55L 75 55 30 20 x 80L x 60L 80 60 35 25 14.5 x 85L x 65L 85 65 40 30 x 90L x 70L 90 70 7.5 45 35 x 95L x 75L 95 75 50 40 x 100L x 80L 100 80 75 45 x 125L x 85L 125 85 -100 50 x 150L x 90L 150 90 75 x 115L 115 -100 x 140L 140 3 Series CVQ Allowable Kinetic Energy Rod End Allowable Lateral Load

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

IZx-OMP0064

With high speed static neutralization cartridge, Supply pressure: 0.1 MPa (Per one cartridge: 8.6L/min (ANR)) Frequency: 30Hz Ionizer installation distance: 600mm 90 3 60 Without sensor Discharge time [s] Offset voltage [V] Specified value: +/30V 2 30 0 1 -30 With feedback sensor -60 0 -90 0 100 200 300 400 500 0 100 200 300 400 500 Feedback sensor installation height [mm] Feedback sensor

3

resolution 35 90 20 mm shorter 160 CAT.ES100-115A Series PFMC 3-Color Display Digital Flow Switch Series PFMC Clockwise 225 Counterclockwise 90 Rotary display Rotary display Functions Functions (sRefer to pages 10 and 11 for details.)

Multistage Ejector (N)ZL Series

] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate [l/min(ANR)] Suction Flow rate [l/min (ANR)] Time to reach vacuum Time to reach vacuum Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa Measurement conditions/Tank capacity: 1l Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure

Base Mounted Metal Seal/Rubber Seal Series VQ

Lead wire color 24 VDC 100 VAC 110 V 200 VAC 220 V Black Lead wire color 24 VDC 100 VAC 110 V 200 VAC 220 V SOL.A SOL.A Black (Blue) [Red] (Yellow) [Yellow] () () Red (Blue) [Red] Red (Blue) [Red] White (Gray) [Gray] COM ( + ) COM(+)() SOL.B Single solenoid VQ0 double VQ1000 double solenoid ( ) is for 100, 110 VAC [ ] is for 200, 220 VAC Note Black (Blue) [Red]: A side solenoid () Red (Blue

Compact and Lightweight

100 100 100 100 100 Vacuum pressure Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 80 80 80 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure Air consumption 60 60 60 60 60 60 Suction flow rate Air consumption 40 40 40 40 40 40 Suction flow rate 20 20

LEYx-OMZ0015

or less(No condensation) 90 or less (No condensation) 90 or less (No condensation) Motor output/size 100W40 200W60 400W60 Electric specifications Type of Motor AC servo motor (100/200VAC) AC servo motor (100/200VAC) AC servo motor (200VAC) [Motor type: S2, S3, S4]: Incremental 17bit encoder (Resolution: 131072 p/rev) [Motor type: S6, S7, S8]: Absolute 18bit encoder (Resolution: 262144 p/