SY

20 20 stations D R Includes the number of blanking plate assemblies.

Rotary Table/

Size: 10, 20, 30, 50 70, 100, 200 Size: 1,2,3,7 Size: 10, 20, 30, 50 With external shock absorber With adjustment bolt 10 20 30 Effective torque (Nm) High precision MSQA 10 20 30 40 0 0 With internal shock absorber Operating pressure (MPa) 0.2 1 0.8 0.6 0.4 With external shock absorber 70 100 200 Model selection Procedure Formulae/Data Selection Examples 1 Kinetic energy 6 5 4 3 2 Enumerate

Compact Guide Cylinder

Compact Guide Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS Bore sizes 80, 100 added. Port thread types NPT, G added.

ITV

Count Pressure Characteristics Flow Characteristics Set pressure: 10 kPa 0 1 10 kPa 20 kPa Output deviation factor (% F.S.) 20 0.5 40 kPa Set pressure (kPa) 40 Out 60 kPa 60 0 Return 80 kPa 80 0.5 100 kPa 100 120 100 80 60 40 1 0 1 1.5 0.5 2 2.5 3 3.5 4 20 Flow rate (/min (ANR)) Supply pressure (kPa) 14-8-7 8 Series ITV0 Dimensions For Single Unit 4-6 2-6 PWR ERR PWR L-bracket (Option) ERR

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

Air Cylinder Series CS1

40 90 59 43 14 17 36 80 39 36 Up to 1200 M16 x 1.5 M36 x 1.5 182 144 18.5 0.1 0.3 +0.3 +0.1 +0.100 0 100 40 50 63 60 23 45 70 48 17 20 41 90 39 44 Up to 1200 M18 x 1.5 M40 x 1.5 204 162 115 18.5 0.1 0.3 +0.3 +0.1 +0.100 0 100 50 40 63 60 25 50 74 48 17 20 46 90 39 44 Lube Non-lube Up to 1200 M20 x 1.5 M45 x 1.5 226 182 115 18.5 0.1 0.3 +0.100 0 +0.3 +0.1 63 126 50 1 71 67 30 60 86 60 20

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Hydraulic Cylinders

Bore size (mm) 20 NTH-025 17 19.6 M10 x 1.25 16.5 6 25 NTH-032 19 21.9 M12 x 1.25 18 7 32 NTH-040 22 25.4 M16 x 1.5 21 10 40 NTH-050 27 31.2 M20 x 1.5 26 12 50 NTH-060 32 37 M24 x 1.5 31 14 63 NTH-080 41 47.3 M30 x 1.5 40 17 80 NTH-100 55 63.5 M39 x 1.5 54 20 100 NTH-125 70 80.8 M48 x 1.5 69 26 Weights Unit: g Standard stroke (mm) 5 Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 218

energy saving effect

Cooling Capacity HRSH300-A-20/4035 Ambient temperature 32C 30 Ambient temperature 43C 28 Cooling capacity [kW] 25 HRS 20 Ambient temperature 45C HRS 090 15 10 HRS 100/150 5 HRSH 090 5 10 15 20 25 30 35 0 HRSH HRSH Circulating fluid temperature [C] HRSE Pump Capacity HRZ HRSH100-A-20/40HRSH100-W-20/40HRSH150/200-A-20/40HRSH150/200/250-W-20/40HRZD HRW 0.6 0.6 60 60 Circulating fluid pressure

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-Z7 (With indicator light) MX D-Z73 D-Z76 Auto switch model Applicable load Relay, PLC IC circuit MTS Load voltage 24 VDC 100 VAC 4 to 8 VDC (3) Max. load current and load current range 5 to 40 mA 5 to 20 mA 20 mA MY Contact protection circuit None Internal voltage drop 2.4 V (to 20 mA)/ 3 V (to 40 mA)

LG1H

LG1H/ Aluminum body With single end support and table moved to the end of the stroke W 10 50 Horizontal load 100% Horizontal load 50% 10 20 Amount of deflection (m) Horizontal Load point distance 1000 500 100 200 W 50 20 10 5 Lateral load 100% 1 2 Lateral load 50% Horizontal empty weight deflection Lateral empty weight deflection Load point distance Lateral 0.5 0.1 0.2 100 200 300 500 1000

CLA

16 41 47.3 39 .cOP-SA 80 la:~ 76.5 66.5 5 4 04X25t eDNA 80 100 20~ .'

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 7.6 5.1 2.6 0.6 0.1 7.6 5.1 2.6 0.6 0.1 30 30 5.1 3.4 1.7 0.4 0.1 5.1 3.4 1.7 0.4

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

[mA] 5 20 Analog output [V] For vacuum For compound pressure 100 kPa to 100 kPa 100 kPa 100 kPa 0 to 1 MPa 0 1 MPa 0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa 50 kPa 1 0.6 4 ZSE ISE A C B A B Pressure Pressure ZSP Dimensions PS PSE56, PSE5601 02 N01 N02 ISA A 11.5 3025 37.5 24 5.5 30 24 PSE 14 B 5.1 20 5 IS ISG Air tube M5 x 0.8 ZSM Part-C The dimensions of part C are common to

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-Z7 (With indicator light) MX D-Z73 D-Z76 Auto switch model Applicable load Relay, PLC IC circuit MTS Load voltage 24 VDC 100 VAC 4 to 8 VDC (3) Max. load current and load current range 5 to 40 mA 5 to 20 mA 20 mA MY Contact protection circuit None Internal voltage drop 2.4 V (to 20 mA)/ 3 V (to 40 mA)

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-Z7 (With indicator light) MX D-Z73 D-Z76 Auto switch model Applicable load Relay, PLC IC circuit MTS Load voltage 24 VDC 100 VAC 4 to 8 VDC (3) Max. load current and load current range 5 to 40 mA 5 to 20 mA 20 mA MY Contact protection circuit None Internal voltage drop 2.4 V (to 20 mA)/ 3 V (to 40 mA)

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32 32 1 1 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 16 0.2 0.2 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L