Mounting: A (Both Ends Tapped), Bore Size: 40mm, Thread: TF (G Thread), Full Stroke: 200mm, First Stroke: 150mm

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 200/100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 200/130, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

VQ7-6/7-8

Mounting bolt M6 X 165 with SW M6 X 180 with SW M6 X 185 with SW M6 X 200 with SW Size Option mounting diagram Interface regulator Double check spacer Double check spacer Interface regulator Spacer 1 Throttle valve spacer Spacer 1 Spacer 1 Throttle valve spacer Spacer 1 Spacer 1 Spacer 1 Note 1) A throttle spacer and double check spacer cannot be combined.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53 85 98.5 30 CXS6-50-XB19 50 63 95

Compact Cylinder with Air Cushion and Lock Series RLQ

Lead-wire length (m) 0.5 (Nil) Rail mounting 32 to 63 Direct mount 32 to 63 Load voltage Indicator Electrical entry direction Wiring (output) Pre-wired connector 3 (L) 5 (Z) Applicable load None (N) Type Special function DC AC Perpendicular In-line Perpendicular In-line 3-wire (NPN equiv.) 5 V IC circuit A96 A96V A76H Reed switch Grommet 200 V A93 F9N F9P F9B F9NW F9PW F9BW F9BA A93V

SMC Pneumatic Clean Series

When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

RLQ

Lead-wire length (m) 0.5 (Nil) Rail mounting 32 to 6 Direct mounting 32 to 63 Load voltage Indicator light Electrical entry direction Wiring (output) Special function Pre-wired connector Applicable load None (N) Type 3 (L) 5 (Z) DC AC Perpendicular In-line Perpendicular In-line 3-wire (NPN equiv.) 5 V A96 A96V A76H IC circuit Reed switch Grommet 200 V A72 A73 A73C A79W F7NV F7PV F7BV J79C

Digital Flow Switch (Integrated display type) ( compatible)

1.3 to 10.6 0.9 to 14.5 125 to 1000 0 to 1372 100 L 2.6 to 26.4 1.9 to 37.0 100 to 1000 0 to 1400 250 L 13 to 66 5 to 92 200 to 1000 0 to 1400 Temperature value PD value Series Unit Flow Rated temperature Display/settable Rated temperature Display/settable range range range range range Min. to Max.

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

High Purity Fluoropolymer

Model L K J M N T W H E LQ2P2A 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 14.5 LQ2P2B LQ2P2C 18 6 19 19.9 7 16 73 LQ2P5B LQ2P5A LQ2P4B LQ2P4A LQ2P3B LQ2P3A 83 20.5 24 6 22 26.2 7 24 95 82 24.5 30 9 28 33.1 21 7 30 110 93 30.5 36 9 32 40 26 10 36 108 Union: LQ2U Metric sizes Applicable tubing O.D.

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: .95 LPM , .95 LPM, Max Pressure: 2.9 PSIG / 200 mbar , 2.9 PSIG / 200 mbar, Max Vacuum: 11.2 in HgV / -380 mbar , 11.2 in HgV / -380 mbar, Voltage (DC): 3.5, DC Motor Type: Low Cost, Item Dimensions: Length: 1.69 in / 43 mm Width: .91 in / 23 mm Height: 1.46 in / 37 mm , Length: 1.69

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 12v/50Hz Flow Rate: .95 LPM , .95 LPM, Max Pressure: 8.7 PSIG / 241 in H20 / 600 mbar , 8.7 PSIG / 241 in H20 / 600 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (50 Hz): 12, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 2.83 in / 72 mm Width: 2.09

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 115/60/1 Flow Rate: .95 LPM , .95 LPM, Max Pressure: 8.7 PSIG / 241 in H20 / 600 mbar , 8.7 PSIG / 241 in H20 / 600 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 2.83 in / 72 mm Width: 2.09

PA3000/5000/PAX1000

lines, the pilot air pressure for this point is approximately 0.25MPa. 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air consumption 400 350 Air consumption l/min (ANR) SUP=0.5MPa Note 1) Even when switching cycles are changed for PA3000 with SUP=0.2MPa or PA5000 with SUP=0.2MPa or 0.3MPa, there is almost no change in the lifting height. 300 250 SUP=0.3MPa Calculating air consumption (for PA3000) 200

Thermo-chiller Series HRZ Fluorinated Fluid Type

VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25 60 46 Refer to page 94.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

1.05 MPa Maximum operating pressure 0.5 MPa Minimum operating pressure Note 1) 0.005 MPa 10 to 80C Ambient and fluid temperature Cushion Rubber bumper (Provided as standard) Lubrication Note 2) Not required (Non-lube) Rod end thread Female thread Rod end thread tolerance JIS class 2 +1.0 0 Stroke length tolerance Piston speed Note 3) 0.3 to 300 mm/s (Refer to page 19.) 150 cm3/min or less 200

Modular Type Regulator Series AR

When the knob is not easily locked, turn it left and right a little and then push it (when the knob is locked, the "orange mark", i.e., the gap will disappear). 0.1 0.1 0 0 0 0 1000 2000 3000 4000 5000 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) AR25 Rc 3/8 AR50 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 0 500 1000 1500

Process Pump <Fluororesin Type> Series PA3000

) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.5MPa 0.4 0.4 0.3 SUP = 0.5MPa SUP = 0.5MPa 0.4MPa 0.3 0.3 0.4MPa 0.4MPa 0.2 0.3MPa 0.2 0.2 0.3MPa 0.3MPa 0.1 0.1 0.1 0.2MPa 0.2MPa 0.2MPa 00 5 10 15 00 5 10 15 00 5 10 15 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PAP3313-T13: Flow rate characteristics (10Hz)* PAP3313-T13: Air consumption PAP3310-T13: Air consumption 200

Process Pump Series PA3000/5000/PAX1000 Series PB1000

lines, the pilot air pressure for this point is approximately 0.25MPa. 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air consumption 400 350 Air consumption l/min (ANR) SUP=0.5MPa Note 1) Even when switching cycles are changed for PA3000 with SUP=0.2MPa or PA5000 with SUP=0.2MPa or 0.3MPa, there is almost no change in the lifting height. 300 250 SUP=0.3MPa Calculating air consumption (for PA3000) 200