AC Servo Motor Driver (CC-Link Type ） Igm: Leakage current of the servo motor (Found from Table 13.4.) 120 120 100 100 Leakage current Leakage current 80 80 60 60 40 40 [mA] [mA] 20 20 0 2 0 14 100 5.5 38 2 3.5 8 1422 38 80 150 5.5 30 60 100 3.5 8 22 60 150 30 80 Cable size[mm2] Cable size[mm2] a. 200V class b. 400V class Fig. 13.4 Leakage current example (lg1, lg2) for CV cable run in metal conduit 13 26 13.
100 D-A3lC D-G39C D-K39C Different surfaces 20 + 35 (n 2) (n = 2, 3, 4, ) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) n Same surface 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 1 10
TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06
90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction
, 200, 300 10 -X 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 20100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 Data 2 axes 1500 32 Note) Please contact SMC if it is used by exceeding the maximum stroke length.
101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 56 (62) 74 (80) 86 (92) 96 (102) 10 56 (60) 74 (78) 86 (90) 96 (100) 12 60 (63.5) 85 (88.5) 101 (104.5) 115 (118.5) 16 66 (69.5) 92 (95.5) 118 (121.5) 92 (95.5) 118 (121.5) 144 (147.5) 108 (111.5) 134 (137.5) 160 (163.5) 121 (124.5) 147 (150.5) 173 (176.5) 20 87 112
40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series
MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 3.11-8 Air Slide Table Series MXS Table defection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment applied at arrow for fully extended stroke of slide table Table yaw deflection due to static
(Long bowl, 0.4 MPa setting, With element service indicator, High pressure, Low temperature, High temperature, Clean series, and Copper, fluorine, and silicone-free + Low particle generation) AL30 to 60 (1000 cm3 tank) added. Number of pages increased from 100 to 116.
Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket
Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket
) Max. 5.6 (142.2) (When selecting option code P) 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (
W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load
20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.
page 12 for dimensions. 200, 220, 230, 240 VAC (50 Hz), 200 to 260V (60 Hz) 2 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 380, 400, 415 VAC (50 Hz), 380 to 420V (60 Hz) 3 Compound 420, 440, 480 VAC (50 Hz), 420 to 520V (60 Hz) 4 Please refer to page 11 for dimensions.
60 67 43 43 43 48 48 60 14 14 14 17 17 20 31 31 36 41 46 56 19 19 19 24 24 29 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 15 15 17 20 20 25 8 9 9 10 10 12 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 85 298 100 221 27 Up to 1400 1401 to 1600 3 5 30 46 M14 x 1.5 161 78 18 110 146 128 16 114 64 110 100 298 112 246 27 Up to 1400 1401
Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.
Possible to use in vacuum to 100 kPa.
) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)
) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)