Vacuum Ejector Series ZM

/Flow Characteristics, Standard Supply Pressure: H 0.5 MPa ZM13H Exhaust Characteristics Flow Characteristics 90 90 135 80 120 80 Vacuum pressure ZA Suction flow rate l/min (ANR) Air consumption l/min (ANR) Vacuum pressure (kPa) Vacuum pressure (kPa) 70 105 70 Air consumption ZX 60 90 60 50 75 50 ZR Suction flow rate 40 60 40 ZM 30 30 45 ZMA 20 20 30 10 10 15 ZQ 0 0 0 0.0 0.6 0.5 0.4 0.3

Modular Type Air Filters Series AF

Metal Bowl Metal Bowl With Sight Glass NPT Threads Port Size Symbol 02 03 04 Accessories Symbol Nil B* C D H* Applicable Body Size 20 30 40 Port Size 1/4 3/8 1/2 Applicable Body Size All All 30, 40 30, 40 All Description None Mounting Bracket Float Auto Drain (N.C.)

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Knuckle pin (Common with double clevis pin) Rod end nut d d Dd9 C m L m l t t H B Metric Threads Metric Threads Bore size (mm) Bore size (mm) Snap ring d H B C t Dd9 l m Part No. Part No.

One-touch Fittings

28.4 9 25.6 3/8 KQ2U10-03GS 17 15.9 15.6 50.4 45.3 15.6 15.9 10.1 8 4.2 40 28.4 9.4 33.4 1/2 KQ2U10-04GS 22 15.9 15.6 54.6 48.2 15.6 15.9 10.1 8 4.2 40 28.4 9.4 61.3 H Connection thread (With sealant) Q Q 12 1/4 KQ2U12-02GS 19 18.5 18.2 53 48.3 17 18.5 11.4 8 4.2 57.4 45.4 9 36 3/8 KQ2U12-03GS 19 18.5 18.2 54.4 49.3 17 18.5 11.4 8 4.2 57.4 45.4 11 38.9 1/2 KQ2U12-04GS 22 18.5 18.2 58.6 52.2

Title not found

1 r|{t -h rffi Slandard With type air cushion MGP MGP F a s y a d r u s h e n L c l H * p e E a i o I recti I Piping is possible from two di ons High ' 1 2 " ' 1 6 20 40 * I I Auto switches can be mounted on two sides T;;...*. Clea. room series: . water resisbnttype: o20to o100 -!

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 2-5-40 to 2-5-43 for control unit.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

155

Main port C (2 locations) A B A B C D E F G H I J K L M N Main port Model SGCA2lll-ll10 SGCA2lll-ll15 SGCA3lll-ll20 SGCA4lll-ll25 3/8 63 49.6 29 14.5 103.3 111.3 117.8 26 26 52 4.5 44.5 25 26.3 1/2 63 49.6 29 14.5 103.3 111.3 117.8 26 26 52 4.5 44.5 25 26.3 3/4 80 59 35 17.5 112 120.5 127 35 31 62 5.5 48 30 31 1 90 74 44 22 135.9 144.5 151 40 36 72 6.5 60 35 39.5 External pilot solenoid type

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Check Valve Series AK 1

H Inch Size A L Connection thread size NPT Effective area (mm2) Weight (g) A H L Model AKB01-N01S AKB02-N02S AKB03-N03S AKB04-N04S 1/8 1/4 3/8 1/2 1/8 1/4 3/8 1/2 14.29 17.46 22.23 23.81 24.2 40 44.9 55.5 20.2 34 38.4 47.5 18 44 86 113 Reference dimensions of NPT thread after installation. 6.5 14 24 34 Connection thread size 15-14-6 7 Check Valve with One-touch Fitting Series AKH/AKB

Title not found

AR20K tJ 60K AB1010 40.

HRX-OM-I051

-H HRZ002-H HRZ004-H HRZ008-H HRZ001-H1 HRZ002-H1 HRZ004-H1 HRZ008-H1 HRZ002-W HRZ008-W HRZ002-W1 HRZ008-W1 HRZ010-WS HRZ010-W1S HRZ010-W2S *1 : For HRZ001-H* and HRZ002-H* , electron expansion valve is thermo static expansion valve.

Ionizer

Model with 40 mm-pitch emitter cartridges Position Detection Switch Flow Sensor Pressure Control Pressure Sensor Part no.

HRX-OM-K003

HRW008-H, -H*S HRW015-H, -H*S HRW030-H, -H*S: 6 LOW FLOW 0, 850LPM 0, 2.113.2GPM 7 FLOW UNIT LPM, GPM Allows the selection of the unit of flow rate. 8 PRESS UNIT MPa, PSI Allows the selection of the unit of pressure. 9 SLAVE ADRS. 1 to 16CH Allows the selection of the slave address for serial RS-485 communication. Allows the selection of alarm signals for contact signal.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

Note 5) Please contact SMC regarding the set nuts for AR50 and AR60. 15-7-9 03 BE 30 1N AW F Option specifications Filter regulator Applicable models AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide 1/4 Non-relieving Flow direction: Right Left Drain

High performance type Step Motor Controller (Servo/24 VDC)

Setting Data Entry 37 7.1 Step data 37 7.2 Basic parameter 40 7.3 Return to origin parameter 43 8.

4

-2-01-F P R P R 56.7 G: 300 H: 600 50.6 Applicable cable O.D. 6 to 8 DIN terminal (D, DZ) Pg9 Grommet (G, H) Manual override (Non-locking) For 4 x M4 (For mounting) 83 111 29 4.6 43.5 39.3 26.7 21.6 38 20 9 1 19 (Pitch) P = 26 1/8" 12 18 20 13 [1(P), 3(R) port] 13 L2 L1 (Station n) (Station 1) Max. 10 77.1 64 (35) 40 A A 23 5 1/8" [2(A) port] (Pitch) P = 26 31 n: Stations L Dimension n L

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PE 12 E Bracket Main port R T J D 1 2 3 I O M C N P: For mounting 4 locations B H G A Drawing indicates conduit terminal type.