Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Consult SMC when requiring grommet type of AC specification or others. 1.12-28

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

HRX-OM-W058

Table 3-4 Piping port size Name Port size*1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more 1.0MPa more Automatic water-fill port *2 Rc3/8 22 to 24Nm (Automatic water-fill pressure 0.2 to 0.5MPa) Overflow port *2 Rc3/4 28 to 30Nm Inside diameter 19mm more of piping

Refrigerated Air Dryers Series IDF/IDU

) 28 (47) 45 (77) 65 (110) 86 (147) 130 (221) 181 (308) 297 (504) 406 (690) Note) In case of Option A (Cool compressed air output), the air flow capacity is different.

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Rating symbol DC 24 VS V100-61-5-05 24 VDC DC 12 VS V100-61-5-06 12 VDC 100/110 VS V100-61-4-01 100 VAC 200/220 VS V100-61-4-02 200 VAC 100/110 VS V100-61-4-01 110 VAC 200/220 VS V100-61-4-02 220 VAC 240 VS V100-61-4-07 240 VAC With Light/Surge Voltage Suppressor Rated voltage Part no.

0.

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (for VQZ100) This is used when changing piping location.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

8 2 x 2.5 depth 5 PFMB7201-C8L 88 48 18 OUT2 OUT1 10.2 DC () DC (+) 1 43 12 (34.2) 3 1 IN 18 2 x 3.4 OUT IN 2 x 8 One-touch fitting 68 28 8 2 x 2.5 depth 5 6 Series PFMB7 Dimensions PFMB7201-(N)02 70 48 Width across flats 17 18 OUT2 OUT1 10.2 DC (+) DC () 1 43 IN OUT (34.2) 13 1 IN 3 2 x Port size 18 Rc1/4 NPT1/4 2 x 3.4 28 8 2 x 2.5 depth 5 PFMB7201-(N)02L 88 48 18 OUT2 OUT1 10.2 DC (+)

High-Precision Digital Pressure Switch

: 48.4 N02: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or

Compact and Lightweight

10 One-touch Screw-in One-touch 01 02 02 Screw-in Screw-in Screw-in ZH13DA09 11 11 One-touch One-touch One-touch 09 N02 11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch

SYJA3000

01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center 01 02 SYJA7540Note1) P, A, B port: Rc(PT)1/8R1, R2 port: Rc(PT)1/4 Note2

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

2 port 3 port 28 17 20.5 28 20.5 17 20.5 28 20.5 VDW10 VDW20 VDW30 VDW200 VDW300 2 Compact Direct Operated 2 Port Solenoid Valve for Water and Air Series VDW10/20/30 How to Order Valves (Single Type) VD W 2 1 1 G 2 01 For water, air and vacuum Series Option 1 2 3 10 20 30 None Foot type bracket Nil F Note) Foot brackets are packed with valves.

HRX-OM-X071

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

5 Port Solenoid Valve, Series VQC

Note) Available for the rubber seal type only. 25 Manifold Specification Sheet Series VQC4000: Base-Mounted Type/Plug-in Unit How to order manifolds VV5QC 4 1 08 TD0 02 T Kit 1 2 3 7 VV5QC 4 1 16 SDQW 02 S Kit Series VQC4000 4 5 6 Base-Mounted plug-in Stations Electrical entry Options 01 1 station Nil None Special wiring specifications Note 1) (except for double wiring) D-side entry Kit

HRX-OM-M090

Table 3-5 Piping port size Name Port size*1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.4MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.4MPa more Faiclity water inlet*2 Rc3/8 22 to 24Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet*2 Rc3/8 22 to 24Nm 1.0MPa more Automatic water-fill port

HRX-OM-R016

Table 3-5 Piping port size Name Port size*1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.4MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.4MPa more Faiclity water inlet*2 Rc3/8 22 to 24Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet*2 Rc3/8 22 to 24Nm 1.0MPa more Automatic water-fill port

Guide Cylinder/Compact Type Series MGC

) 32 32 30 30.5 33 33.5 30 34 31.5 30.5 24.5 27.5 29.5 26 27 (36) 23 (32) 24.5 (33.5) 23.5 (32.5) 17.5 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 40 40 34.5 35 37.5 38 35 39 36.5 35.5 29.5 32 34.5 31 32 (36) 28 (40) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 24 (36) 50 50 40 40.5 43 43.5 42 46 43.5 42.5 36.5 39.5 41.5 38 ( ): Set values for long stroke, double rod Note) Adjust